loadpatents
Patent applications and USPTO patent grants for Kashiwagi; Makoto.The latest application filed is for "workpiece supporting apparatus and workpiece supporting method".
Patent | Date |
---|---|
Silicon bulk thermoelectric conversion material Grant 11,456,406 - Shiomi , et al. September 27, 2 | 2022-09-27 |
Top ring for holding a substrate and substrate processing apparatus Grant 11,400,561 - Kobayashi , et al. August 2, 2 | 2022-08-02 |
Polishing head for holding substrate and substrate processing apparatus Grant 11,370,080 - Kobayashi , et al. June 28, 2 | 2022-06-28 |
Substrate holding apparatus and substrate processing apparatus Grant 11,335,588 - Kashiwagi May 17, 2 | 2022-05-17 |
Polishing head and polishing apparatus Grant 11,331,768 - Kashiwagi , et al. May 17, 2 | 2022-05-17 |
Jig for a polishing apparatus Grant 11,305,399 - Kobayashi , et al. April 19, 2 | 2022-04-19 |
Workpiece Supporting Apparatus And Workpiece Supporting Method App 20220068695 - KASHIWAGI; Makoto ;   et al. | 2022-03-03 |
Substrate Transporter And Substrate Processing Apparatus Including Substrate Transporter App 20220005716 - Yazawa; Akihiro ;   et al. | 2022-01-06 |
Substrate processing apparatus and substrate processing method Grant 11,180,853 - Ishii , et al. November 23, 2 | 2021-11-23 |
Top Ring For Holding A Substrate And Substrate Processing Apparatus App 20210170543 - Ishii; Yu ;   et al. | 2021-06-10 |
Brake Control Apparatus and Method For Detecting Abnormality In Brake Control Apparatus App 20210114577 - KASHIWAGI; Makoto | 2021-04-22 |
Silicon Bulk Thermoelectric Conversion Material App 20210057626 - SHIOMI; Junichiro ;   et al. | 2021-02-25 |
Method and apparatus for polishing a substrate, and method for processing a substrate Grant 10,926,376 - Nakanishi , et al. February 23, 2 | 2021-02-23 |
Substrate Holding Apparatus And Substrate Processing Apparatus App 20200402835 - Kashiwagi; Makoto | 2020-12-24 |
Laminated Membrane, Substrate Holder Including Laminated Membrane, And Substrate Processing Apparatus App 20200316747 - Kobayashi; Kenichi ;   et al. | 2020-10-08 |
Polishing Head For Holding Substrate And Substrate Processing Apparatus App 20200306924 - Kobayashi; Kenichi ;   et al. | 2020-10-01 |
Substrate Processing Apparatus And Substrate Processing Method App 20200246939 - Kind Code | 2020-08-06 |
Substrate holding parts Grant D890,823 - Kobayashi , et al. | 2020-07-21 |
Substrate holding parts Grant D890,824 - Kobayashi , et al. | 2020-07-21 |
Substrate holding parts Grant D890,825 - Kobayashi , et al. | 2020-07-21 |
Substrate holding parts Grant D890,822 - Kobayashi , et al. | 2020-07-21 |
Polishing Head And Polishing Apparatus App 20200094371 - Akazawa; Kenichi ;   et al. | 2020-03-26 |
Jig For A Polishing Apparatus App 20200039025 - Kobayashi; Kenichi ;   et al. | 2020-02-06 |
Top Ring For Holding A Substrate And Substrate Processing Apparatus App 20200039024 - Kobayashi; Kenichi ;   et al. | 2020-02-06 |
Polishing Apparatus And Polishing Method App 20200023486 - Seki; Masaya ;   et al. | 2020-01-23 |
Substrate Processing Apparatus And Substrate Processing Method App 20190390335 - ISHII; Yu ;   et al. | 2019-12-26 |
Substrate processing apparatus and substrate processing method Grant 10,458,020 - Ishii , et al. Oc | 2019-10-29 |
Polishing apparatus and polishing method Grant 10,427,269 - Kashiwagi , et al. October 1, 2 | 2019-10-01 |
Polishing Head And Polishing Apparatus App 20190184519 - KASHIWAGI; Makoto ;   et al. | 2019-06-20 |
Substrate Holding Apparatus, Substrate Processing Apparatus Having Substrate Holding Apparatus, And Substrate Processing Method App 20190131166 - KASHIWAGI; Makoto ;   et al. | 2019-05-02 |
Polishing Apparatus App 20190118335 - KOBAYASHI; Kenichi ;   et al. | 2019-04-25 |
Exhaust gas abatement system Grant 10,227,926 - Hosotani , et al. | 2019-03-12 |
Method And Apparatus For Polishing A Substrate, And Method For Processing A Substrate App 20190054594 - NAKANISHI; Masayuki ;   et al. | 2019-02-21 |
Tubing pump Grant 10,012,225 - Koyama , et al. July 3, 2 | 2018-07-03 |
Polishing Apparatus And Polishing Method App 20170291273 - KASHIWAGI; Makoto ;   et al. | 2017-10-12 |
Inner cylinder for exhaust gas treatment apparatus Grant D799,690 - Kawamura , et al. October 10, 2 | 2017-10-10 |
Tube clamp structure of tubing pump Grant 9,541,221 - Koyama , et al. January 10, 2 | 2017-01-10 |
Substrate Processing Apparatus And Substrate Processing Method App 20160305022 - ISHII; Yu ;   et al. | 2016-10-20 |
Tubing pump for delivering fluid in a tube Grant 9,217,428 - Koyama , et al. December 22, 2 | 2015-12-22 |
Tube Clamp Structure Of Tubing Pump App 20150285404 - Koyama; Masahiro ;   et al. | 2015-10-08 |
Tubing Pump App 20150275887 - Koyama; Masahiro ;   et al. | 2015-10-01 |
Exhaust Gas Abatement System App 20150000870 - Hosotani; Kazumasa ;   et al. | 2015-01-01 |
Tubing Pump App 20140219843 - KOYAMA; Masahiro ;   et al. | 2014-08-07 |
Exhaust gas cleaning apparatus Grant 8,246,732 - Arai , et al. August 21, 2 | 2012-08-21 |
Exhaust Gas Cleaning Apparatus App 20100116140 - Arai; Hiroyuki ;   et al. | 2010-05-13 |
Liquid Treatment Apparatus App 20080023334 - Nakagawa; Sota ;   et al. | 2008-01-31 |
Bipolar Chamber and Electrochemical Liquid Treatment Apparatus Having Such Bipolar Chamber App 20070215477 - Akahori; Masaji ;   et al. | 2007-09-20 |
Method and apparatus for treating waste water App 20060243604 - Nakagawa; Sota ;   et al. | 2006-11-02 |
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