| Patent | Date |
|---|
Vehicle Weight Estimation Apparatus, Vehicle Weight Estimation Method, And Computer Readable Recording Medium
App 20220283015 - KINOSHITA; Shohei ; et al. | 2022-09-08 |
Mounting table, and method of manufacturing the mounting table
Grant 11,425,791 - Kasai August 23, 2 | 2022-08-23 |
Temperature Control Device, Temperature Control Method, And Inspection Apparatus
App 20220262661 - KASAI; Shigeru ; et al. | 2022-08-18 |
Temperature Adjustment Method For Mounting Base, Inspection Device, And Mounting Base
App 20220221509 - KASAI; Shigeru | 2022-07-14 |
Inspection apparatus and temperature control meihod
Grant 11,385,280 - Kasai , et al. July 12, 2 | 2022-07-12 |
Weight Estimation Apparatus, Weight Estimation Method, And Computer-readable Recording Medium
App 20220205829 - KIYOKAWA; Yu ; et al. | 2022-06-30 |
Heating Device And Control Method Of Led
App 20220191974 - KASAI; Shigeru ; et al. | 2022-06-16 |
Test Device Control Method And Test Device
App 20220178994 - AGAWA; Hiroaki ; et al. | 2022-06-09 |
Power Supply And Inspection Apparatus
App 20220178988 - KASAI; Shigeru ; et al. | 2022-06-09 |
State Estimation Apparatus, State Estimation Method, And Computer-readable Recording Medium
App 20220163422 - KIYOKAWA; Yu ; et al. | 2022-05-26 |
Testing device
Grant 11,340,283 - Kasai , et al. May 24, 2 | 2022-05-24 |
Heater Temperature Control Method, Heater, And Placement Stand
App 20220151026 - KASAI; Shigeru | 2022-05-12 |
Structure Diagnosis Apparatus, Structure Diagnosis Method, And Computer-readable Recording Medium
App 20220137003 - KINOSHITA; Shohei ; et al. | 2022-05-05 |
Bearing Diagnosis Apparatus, Bearing Diagnosis Method, And Computer Readable Recording Medium
App 20220136929 - KINOSHITA; Shohei ; et al. | 2022-05-05 |
Placement Table, Testing Device, And Testing Method
App 20220128624 - KASAI; Shigeru ; et al. | 2022-04-28 |
Diagnosis apparatus, diagnosis method, and computer-readable recording medium
Grant 11,307,175 - Kiyokawa , et al. April 19, 2 | 2022-04-19 |
Particle radiation therapy apparatus
Grant 11,247,073 - Nagamoto , et al. February 15, 2 | 2022-02-15 |
Method For Controlling Temperature Of Substrate Support And Inspection Apparatus
App 20220015193 - KASAI; Shigeru ; et al. | 2022-01-13 |
Placement stand and electronic device inspecting apparatus
Grant 11,221,358 - Kasai , et al. January 11, 2 | 2022-01-11 |
Inspection Apparatus And Inspection Method
App 20210389366 - AKIYAMA; Naoki ; et al. | 2021-12-16 |
Inspection Apparatus And Inspection Method
App 20210382105 - AKIYAMA; Naoki ; et al. | 2021-12-09 |
Temperature control device, temperature control method, and inspection apparatus
Grant 11,169,204 - Kobayashi , et al. November 9, 2 | 2021-11-09 |
Diagnosis Apparatus, Diagnosis Method, And Computer Readable Recording Medium
App 20210341352 - KINOSHITA; Shohei ; et al. | 2021-11-04 |
Prober
Grant 11,125,813 - Kasai September 21, 2 | 2021-09-21 |
Dummy Wafer
App 20210265183 - KASAI; Shigeru ; et al. | 2021-08-26 |
Diagnosis Apparatus, Diagnosis Method, And Computer-readable Recording Medium
App 20210231617 - KIYOKAWA; Yu ; et al. | 2021-07-29 |
Inspection Apparatus And Temperature Control Method
App 20210208194 - KASAI; Shigeru ; et al. | 2021-07-08 |
Damage Diagnosis Device, Damage Diagnosis Method, And Recording Medium In Which Damage Diagnosis Program Is Stored
App 20210172828 - KINOSHITA; Shohei ; et al. | 2021-06-10 |
Assessing device, assessing system, assessing method, and computer-readable recording medium
Grant 11,029,231 - Kinoshita , et al. June 8, 2 | 2021-06-08 |
Damage Detection Apparatus, Method, And Program
App 20210131930 - KINOSHITA; Shohei ; et al. | 2021-05-06 |
Placement Stand And Electronic Device Inspecting Apparatus
App 20210102991 - KASAI; Shigeru ; et al. | 2021-04-08 |
Prober
App 20210033666 - KASAI; Shigeru | 2021-02-04 |
Abnormality Diagnosis Apparatus, Abnormality Diagnosis Method, And Computer Readable Recording Medium
App 20210010897 - KIYOKAWA; Yu ; et al. | 2021-01-14 |
Testing Device
App 20200408828 - KASAI; Shigeru ; et al. | 2020-12-31 |
Inspection Device
App 20200386805 - KASAI; Shigeru ; et al. | 2020-12-10 |
Damage Diagnosing Device, Damage Diagnosing Method, And Recording Medium Having Damage Diagnosing Program Stored Thereon
App 20200363287 - KINOSHITA; Shohei ; et al. | 2020-11-19 |
Particle beam treatment apparatus
Grant 10,835,766 - Kinugasa , et al. November 17, 2 | 2020-11-17 |
Particle Radiation Therapy Apparatus
App 20200338367 - NAGAMOTO; Yoshifumi ; et al. | 2020-10-29 |
Position adjustment device for flat panel detector, position adjustment method for flat panel detector, and radiotherapy apparatus
Grant 10,765,387 - Kobayashi , et al. Sep | 2020-09-08 |
Vibration Determination Device, Vibration Determination Method, And Program
App 20200278241 - KIYOKAWA; Yu ; et al. | 2020-09-03 |
Mounting Table, and Method of Manufacturing the Mounting Table
App 20200205233 - KASAI; Shigeru | 2020-06-25 |
Temperature Control Device, Temperature Control Method, and Inspection Apparatus
App 20200174066 - KOBAYASHI; Masahito ; et al. | 2020-06-04 |
Test Wafer And Method For Manufacturing Same
App 20200173942 - KASAI; Shigeru | 2020-06-04 |
Plasma processing device with shower plate having protrusion for suppressing film formation in gas holes of shower plate
Grant 10,557,200 - Ikeda , et al. Feb | 2020-02-11 |
Particle Beam Treatment Apparatus
App 20190388712 - KINUGASA; Kunihiko ; et al. | 2019-12-26 |
Particle beam treatment apparatus
Grant 10,478,642 - Kinugasa , et al. Nov | 2019-11-19 |
Assessing Device, Assessing Method, And Computer-readable Recording Medium
App 20190301968 - KINOSHITA; Shohei ; et al. | 2019-10-03 |
Position Adjustment Device For Flat Panel Detector, Position Adjustment Method For Flat Panel Detector, And Radiotherapy Apparat
App 20190192095 - KOBAYASHI; Takayuki ; et al. | 2019-06-27 |
Microwave plasma source and plasma processing apparatus
Grant 10,319,567 - Ikeda , et al. | 2019-06-11 |
Inspection Device, Inspection Method, And Non-transitory Recoding Medium Storing Inspection Program
App 20190011402 - KINOSHITA; Shohei ; et al. | 2019-01-10 |
Particle Beam Treatment Apparatus
App 20180345043 - KINUGASA; Kunihiko ; et al. | 2018-12-06 |
Leakage position calculation device, leakage position calculation method, computer-readable recording medium, vibration calculation device, and computation device
Grant 10,119,880 - Takata , et al. November 6, 2 | 2018-11-06 |
Motor
Grant 9,847,689 - Hoshina , et al. December 19, 2 | 2017-12-19 |
Piping Inspection System, Piping Inspection Device, Piping Inspection Method, And Recording Medium
App 20170343514 - Takata; Soichiro ; et al. | 2017-11-30 |
Plasma Processing Apparatus and Plasma Processing Method
App 20170263421 - IKEDA; Taro ; et al. | 2017-09-14 |
Plasma processing apparatus and shower plate
Grant 9,663,856 - Kasai , et al. May 30, 2 | 2017-05-30 |
Antenna for plasma generation, plasma processing apparatus and plasma processing method
Grant 9,552,966 - Komatsu , et al. January 24, 2 | 2017-01-24 |
Microwave radiation antenna, microwave plasma source and plasma processing apparatus
Grant 9,548,187 - Ikeda , et al. January 17, 2 | 2017-01-17 |
Plasma processing apparatus and plasma generation antenna
Grant 9,543,123 - Ikeda , et al. January 10, 2 | 2017-01-10 |
Leakage Position Calculation Device, Leakage Position Calculation Method, Computer-readable Recording Medium, Vibration Calculation Device, And Computation Device
App 20160290886 - TAKATA; Soichiro ; et al. | 2016-10-06 |
Microwave Plasma Source And Plasma Processing Apparatus
App 20160284516 - IKEDA; Taro ; et al. | 2016-09-29 |
Method For Forming Insulating Film And Method For Manufacturing Semiconductor Device
App 20160240374 - KASAI; Shigeru ; et al. | 2016-08-18 |
Plasma Processing Device
App 20160222516 - IKEDA; Taro ; et al. | 2016-08-04 |
Etching method, etching apparatus, and storage medium
Grant 9,362,149 - Muraki , et al. June 7, 2 | 2016-06-07 |
Motor
App 20160134166 - HOSHINA; Tetsuo ; et al. | 2016-05-12 |
Microwave introducing mechanism, microwave plasma source and microwave plasma processing apparatus
Grant 9,281,154 - Ikeda , et al. March 8, 2 | 2016-03-08 |
Locking/unlocking Detection Device
App 20160040460 - KASAI; Shigeru ; et al. | 2016-02-11 |
Heat Treatment Apparatus And Heat Treatment Method
App 20160013056 - KASAI; Shigeru ; et al. | 2016-01-14 |
Microwave irradiation apparatus
Grant 9,224,623 - Kasai , et al. December 29, 2 | 2015-12-29 |
Liquid processing apparatus, liquid processing method, and recording medium having program for executing liquid processing method recorded therein
Grant 9,202,731 - Kasai , et al. December 1, 2 | 2015-12-01 |
Microwave heating apparatus and processing method
Grant 9,204,500 - Ikeda , et al. December 1, 2 | 2015-12-01 |
Electromagnetic-radiation power-supply mechanism for exciting a coaxial waveguide by using first and second poles and a ring-shaped reflection portion
Grant 9,072,158 - Ikeda , et al. June 30, 2 | 2015-06-30 |
Piezoelectric Vibration Sensor
App 20150107363 - Takahashi; Masatake ; et al. | 2015-04-23 |
Etching Method, Etching Apparatus, and Storage Medium
App 20150072533 - MURAKI; Yusuke ; et al. | 2015-03-12 |
Surface wave plasma generating antenna and surface wave plasma processing apparatus
Grant 8,945,342 - Ikeda , et al. February 3, 2 | 2015-02-03 |
Microwave irradiation device and microwave irradiation method
Grant 8,907,259 - Kasai , et al. December 9, 2 | 2014-12-09 |
Annealing apparatus
Grant 8,897,631 - Kasai , et al. November 25, 2 | 2014-11-25 |
Antenna For Plasma Generation, Plasma Processing Apparatus And Plasma Processing Method
App 20140339981 - Komatsu; Tomohito ; et al. | 2014-11-20 |
Breakdown prediction device, breakdown prediction method, and breakdown prediction program
Grant 8,891,188 - Kasai , et al. November 18, 2 | 2014-11-18 |
Failure prediction method and failure prediction system
Grant 8,861,110 - Takata , et al. October 14, 2 | 2014-10-14 |
Plasma Processing Apparatus And Shower Plate
App 20140283747 - Kasai; Shigeru ; et al. | 2014-09-25 |
Failure Prediction Method And Failure Prediction System
App 20140219071 - Takata; Soichiro ; et al. | 2014-08-07 |
Structure for attaching vibration sensor to storage device
Grant 8,794,073 - Kasai , et al. August 5, 2 | 2014-08-05 |
Microwave Radiation Antenna, Microwave Plasma Source And Plasma Processing Apparatus
App 20140158302 - IKEDA; Taro ; et al. | 2014-06-12 |
Acceleration Sensor
App 20140116137 - Shinoda; Shigeki ; et al. | 2014-05-01 |
Device and method for fixing a reactor metering pipe
Grant 8,608,121 - Maehara , et al. December 17, 2 | 2013-12-17 |
Crime Prevention Device, Crime Prevention System And Method For Determining State Of Opening/closing Body
App 20130199095 - Shinoda; Shigeki ; et al. | 2013-08-08 |
Microwave Introducing Mechanism, Microwave Plasma Source And Microwave Plasma Processing Apparatus
App 20130180661 - Ikeda; Taro ; et al. | 2013-07-18 |
Microwave Heating Apparatus And Processing Method
App 20130168390 - IKEDA; Taro ; et al. | 2013-07-04 |
Annealing device
Grant 8,440,939 - Kasai , et al. May 14, 2 | 2013-05-14 |
Vibration Sensor
App 20130113337 - Kasai; Shigeru ; et al. | 2013-05-09 |
Plasma processing apparatus and method
Grant 8,419,960 - Sawada , et al. April 16, 2 | 2013-04-16 |
Heat Treatment Apparatus And Heat Treatment Method
App 20120328273 - KAWANO; Hisashi ; et al. | 2012-12-27 |
Electromagnetic-radiation Power-supply Mechanism And Microwave Introduction Mechanism
App 20120299671 - IKEDA; Taro ; et al. | 2012-11-29 |
Breakdown Prediction Device, Breakdown Prediction Method, And Breakdown Prediction Program
App 20120287526 - Kasai; Shigeru ; et al. | 2012-11-15 |
Tuner and microwave plasma source
Grant 8,308,898 - Kasai , et al. November 13, 2 | 2012-11-13 |
Annealing Apparatus
App 20120279944 - KASAI; Shigeru ; et al. | 2012-11-08 |
Processing apparatus
Grant 8,299,671 - Nomura , et al. October 30, 2 | 2012-10-30 |
Plasma Processing Apparatus And Plasma Generation Antenna
App 20120247675 - IKEDA; Taro ; et al. | 2012-10-04 |
Film Formation Apparatus
App 20120247390 - Sawada; Ikuo ; et al. | 2012-10-04 |
Surface Wave Plasma Generating Antenna And Surface Wave Plasma Processing Apparatus
App 20120222816 - IKEDA; Taro ; et al. | 2012-09-06 |
Microwave Irradiation Apparatus
App 20120211486 - Kasai; Shigeru ; et al. | 2012-08-23 |
Annealing apparatus
Grant 8,246,900 - Kasai , et al. August 21, 2 | 2012-08-21 |
Liquid Processing Apparatus, Liquid Processing Method, and Recording Medium Having Program for Executing Liquid Processing Method Recorded Therein
App 20120160274 - Kasai; Shigeru ; et al. | 2012-06-28 |
Structure For Attaching Vibration Sensor To Storage Device
App 20120137780 - Kasai; Shigeru ; et al. | 2012-06-07 |
Processing Apparatus And Method For Operating Same
App 20120118504 - Nomura; Masamichi ; et al. | 2012-05-17 |
Plasma processing apparatus
Grant 8,163,128 - Kasai , et al. April 24, 2 | 2012-04-24 |
Tuner And Microwave Plasma Source
App 20120067523 - KASAI; Shigeru ; et al. | 2012-03-22 |
Microwave Irradiation Device And Microwave Irradiation Method
App 20120061384 - Kasai; Shigeru ; et al. | 2012-03-15 |
Film-forming apparatus
Grant 8,128,751 - Kasai , et al. March 6, 2 | 2012-03-06 |
Processing equipment for object to be processed
Grant 8,110,045 - Yoneda , et al. February 7, 2 | 2012-02-07 |
Heat treatment apparatus, computer program, and storage medium
Grant 8,107,801 - Shimizu , et al. January 31, 2 | 2012-01-31 |
Vibration-damping Containing Case For Electronic Device, The Electronic Device, And Electronic Apparatus Having The Electronic Device Mounted Thereon
App 20110273827 - Kasai; Shigeru ; et al. | 2011-11-10 |
Heating apparatus, heat treatment apparatus, computer program and storage medium
Grant 8,041,197 - Kasai , et al. October 18, 2 | 2011-10-18 |
Plasma Processing Apparatus
App 20110240222 - Sawada; Ikuo ; et al. | 2011-10-06 |
Heat treating device
Grant 8,005,352 - Kasai August 23, 2 | 2011-08-23 |
Plasma Processing Apparatus And Method
App 20110174778 - Sawada; Ikuo ; et al. | 2011-07-21 |
Annealing Apparatus
App 20110174790 - Suzuki; Tomohiro ; et al. | 2011-07-21 |
Thermal processing apparatus
Grant 7,978,963 - Shimizu , et al. July 12, 2 | 2011-07-12 |
Magnetron control method, magnetron service life judgment method, microwave generation device, magnetron service life judgment device, processing device, computer program, and storage medium
Grant 7,915,827 - Kasai , et al. March 29, 2 | 2011-03-29 |
Processing Equipment For Object To Be Processed
App 20110048034 - YONEDA; Masatake ; et al. | 2011-03-03 |
Annealing Apparatus
App 20110033175 - Kasai; Shigeru ; et al. | 2011-02-10 |
Annealing Apparatus
App 20110024407 - Kasai; Shigeru ; et al. | 2011-02-03 |
Power Combiner And Microwave Introduction Mechanism
App 20110018651 - Ikeda; Taro ; et al. | 2011-01-27 |
Thermal Processing Apparatus
App 20110002674 - Shimizu; Masahiro ; et al. | 2011-01-06 |
Gas supply method using a gas supply system
Grant 7,854,962 - Kasai , et al. December 21, 2 | 2010-12-21 |
Annealing Device
App 20100314377 - Kasai; Shigeru ; et al. | 2010-12-16 |
Processing equipment for object to be processed
Grant 7,846,255 - Yoneda , et al. December 7, 2 | 2010-12-07 |
Plasma Generating Apparatus, Plasma Generating Method And Remote Plasma Processing Apparatus
App 20100224324 - KASAI; Shigeru | 2010-09-09 |
Motor
Grant 7,768,163 - Kasai August 3, 2 | 2010-08-03 |
Processing Apparatus
App 20100164315 - Nomura; Masamichi ; et al. | 2010-07-01 |
Heat Treating Device
App 20100150534 - Kasai; Shigeru | 2010-06-17 |
Film Forming Apparatus
App 20100107977 - KASAI; Shigeru ; et al. | 2010-05-06 |
Motor device
Grant 7,675,207 - Kasai March 9, 2 | 2010-03-09 |
Annealing Apparatus
App 20100038833 - Kasai; Shigeru ; et al. | 2010-02-18 |
Film forming device
Grant 7,661,386 - Kasai , et al. February 16, 2 | 2010-02-16 |
Microwave Generating Apparatus and Microwave Generating Method
App 20090267669 - Kasai; Shigeru | 2009-10-29 |
Film-forming Apparatus
App 20090178614 - KASAI; Shigeru ; et al. | 2009-07-16 |
Microwave Plasma Source And Plasma Processing Apparatus
App 20090159214 - KASAI; Shigeru | 2009-06-25 |
Gas processing apparatus and gas processing method
App 20090151639 - Kasai; Shigeru ; et al. | 2009-06-18 |
Gas supply system and proessing system
App 20090133755 - Kasai; Shigeru ; et al. | 2009-05-28 |
Motor
App 20090127955 - KASAI; Shigeru | 2009-05-21 |
Motor Device
App 20090127952 - KASAI; Shigeru | 2009-05-21 |
Plasma Processing Apparatus
App 20090041640 - KASAI; Shigeru ; et al. | 2009-02-12 |
Device And Method For Fixing A Reactor Metering Pipe
App 20090032650 - MAEHARA; Takeshi ; et al. | 2009-02-05 |
Motor Provided With Holding Structure For Radial Bearing
App 20090026855 - Kasai; Shigeru | 2009-01-29 |
Magnetron Control Method, Magnetron Service Life Judgment Method, Microwave Generation Device, Magnetron Service Life Judgment Device, Processing Device, Computer Program, And Storage Medium
App 20080309239 - Kasai; Shigeru ; et al. | 2008-12-18 |
Single wafer processing unit
App 20080280048 - Kasai; Shigeru ; et al. | 2008-11-13 |
Plasma processing apparatus
Grant 7,445,690 - Kasai , et al. November 4, 2 | 2008-11-04 |
Plasma processing equipment
Grant 7,430,985 - Kasai October 7, 2 | 2008-10-07 |
Processing Equipment for Object to be Processed
App 20080230180 - Yoneda; Masatake ; et al. | 2008-09-25 |
Heating Apparatus, Heat Treatment Apparatus, Computer Program And Storage Medium
App 20080226272 - Kasai; Shigeru ; et al. | 2008-09-18 |
Heat Treatment Apparatus, Computer Program, And Storage Medium
App 20080187299 - Shimizu; Masahiro ; et al. | 2008-08-07 |
Substrate heating apparatus and purging method thereof
App 20080163818 - Saito; Tetsuya ; et al. | 2008-07-10 |
Electromagnetic relay
Grant 7,372,350 - Chida , et al. May 13, 2 | 2008-05-13 |
Coaxial type impedance matching device and impedance detecting method for plasma generation
Grant 7,355,379 - Kitamura , et al. April 8, 2 | 2008-04-08 |
Film-forming apparatus
App 20070175396 - Kasai; Shigeru ; et al. | 2007-08-02 |
Gas supply system and processing system
App 20070163713 - Kasai; Shigeru ; et al. | 2007-07-19 |
Plasma processing apparatus
Grant 7,226,524 - Kasai , et al. June 5, 2 | 2007-06-05 |
Coaxial type impedance matching device and impedance detecting method for plasma generation
Grant 7,176,634 - Kitamura , et al. February 13, 2 | 2007-02-13 |
Vacuum processing apparatus
App 20060160359 - Kasai; Shigeru ; et al. | 2006-07-20 |
Coaxial type impedance matching device and impedance detecting method for plasma generation
App 20060144519 - Kitamura; Toshiaki ; et al. | 2006-07-06 |
Plasma generating apparatus, plasma generating method and remote plasma processing apparatus
App 20060137613 - Kasai; Shigeru | 2006-06-29 |
Processing gas supply mechanism, film forming apparatus and method, and computer storage medium storing program for controlling same
App 20060086319 - Kasai; Shigeru ; et al. | 2006-04-27 |
Method and device for vacuum treatment
Grant 6,977,359 - Kasai December 20, 2 | 2005-12-20 |
Electromagnetic relay
App 20050264386 - Chida, Yoshifumi ; et al. | 2005-12-01 |
Variable optical attenuator
Grant 6,950,596 - Yahagi , et al. September 27, 2 | 2005-09-27 |
Gas processing apparatus and method and computer storage medium storing program for controlling same
App 20050189074 - Kasai, Shigeru ; et al. | 2005-09-01 |
Plasma processing apparatus
App 20050160987 - Kasai, Shigeru ; et al. | 2005-07-28 |
Treatment subject receiving vessel body, and treating system
App 20050118000 - Kasai, Shigeru ; et al. | 2005-06-02 |
Plasma processing equipment
App 20050082004 - Kasai, Shigeru | 2005-04-21 |
Coaxial type impedance matching device and impedance detecting method for plasma generation
App 20050057164 - Kitamura, Toshiaki ; et al. | 2005-03-17 |
Plasma processor
App 20050034815 - Kasai, Shigeru ; et al. | 2005-02-17 |
Coaxial type impedance matching device
Grant 6,856,211 - Yamada , et al. February 15, 2 | 2005-02-15 |
Film forming device
App 20050000423 - Kasai, Shigeru ; et al. | 2005-01-06 |
Gas treating device and gas treating method
App 20050003600 - Kasai, Shigeru ; et al. | 2005-01-06 |
Coaxial type impedance matching device and impedance detecting method for plasma generation
Grant 6,819,052 - Kitamura , et al. November 16, 2 | 2004-11-16 |
Substrate heating device and method of purging the device
App 20040149227 - Saito, Tetsuya ; et al. | 2004-08-05 |
Method and device for vacuum treatment
App 20040144770 - Kasai, Shigeru | 2004-07-29 |
Heat treating device
Grant 6,759,633 - Kubodera , et al. July 6, 2 | 2004-07-06 |
Variable optical attenuator
App 20040101245 - Yahagi, Akira ; et al. | 2004-05-27 |
Sheet-type treating device
App 20040069234 - Kasai, Shigeru ; et al. | 2004-04-15 |
Coaxial type impedance matching device
App 20040023561 - Yamada, Fumio ; et al. | 2004-02-05 |
Plasma generating method, plasma apparatus, phase difference detecting method, impedance detecting method, measuring device, and coaxial type impedance matching device
App 20030230984 - Kitamura, Toshiaki ; et al. | 2003-12-18 |
Method and apparatus for temperature control of heater
Grant 6,627,859 - Kasai , et al. September 30, 2 | 2003-09-30 |
Rotary driving mechanism
App 20030123375 - Uno, Masaru ; et al. | 2003-07-03 |
Heat treating device
App 20030075535 - Kubodera, Masato ; et al. | 2003-04-24 |
Temperature measuring system
Grant 6,530,687 - Suzuki , et al. March 11, 2 | 2003-03-11 |
Micro-machine (MEMS) switch with electrical insulator
Grant 6,483,395 - Kasai , et al. November 19, 2 | 2002-11-19 |
Gas processing apparatus baffle member, and gas processing method
Grant 6,436,193 - Kasai , et al. August 20, 2 | 2002-08-20 |
Micro-machine switch
App 20010022541 - Kasai, Shigeru ; et al. | 2001-09-20 |
Semiconductor processing apparatus
Grant 5,445,675 - Kubodera , et al. August 29, 1 | 1995-08-29 |
Rotary electric machine
Grant 5,057,725 - Kasai , et al. October 15, 1 | 1991-10-15 |
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