Karyu; Makoto
Patent Applications and Registrations
Patent applications and USPTO patent grants for Karyu; Makoto.The latest application filed is for "method for manufacturing reflective mask and apparatus for manufacturing reflective mask".
- Karyu; Makoto - Kanagawa-ken JP
| Patent | Date |
|---|---|
| Plasma processing apparatus and plasma processing method Grant 10,111,313 - Motokawa , et al. October 23, 2 | 2018-10-23 |
| Method for manufacturing reflective mask and apparatus for manufacturing reflective mask Grant 9,507,251 - Yoshimori , et al. November 29, 2 | 2016-11-29 |
| Method For Manufacturing Reflective Mask And Apparatus For Manufacturing Reflective Mask App 20140186754 - Yoshimori; Tomoaki ; et al. | 2014-07-03 |
| Method for manufacturing reflective mask and apparatus for manufacturing reflective mask Grant 8,702,901 - Yoshimori , et al. April 22, 2 | 2014-04-22 |
| Plasma Processing Apparatus And Plasma Processing Method App 20130256270 - MOTOKAWA; Takeharu ; et al. | 2013-10-03 |
| Method For Manufacturing Reflective Mask And Apparatus For Manufacturing Reflective Mask App 20120129083 - Yoshimori; Tomoaki ; et al. | 2012-05-24 |
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