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Compositions and processes for depositing carbon-doped silicon-containing films Grant 9,447,287 - Xiao , et al. September 20, 2 | 2016-09-20 |
Process and system for providing acetylene Grant 8,915,992 - Maykut , et al. December 23, 2 | 2014-12-23 |
Materials and Methods of Forming Controlled Void App 20140363950 - Vrtis; Raymond Nicholas ;   et al. | 2014-12-11 |
Low temperature deposition of silicon-containing films Grant 8,906,455 - Yang , et al. December 9, 2 | 2014-12-09 |
Materials and methods of forming controlled void Grant 8,846,522 - Vrtis , et al. September 30, 2 | 2014-09-30 |
Compositions And Processes For Depositing Carbon-doped Silicon-containing Films App 20140287164 - Xiao; Manchao ;   et al. | 2014-09-25 |
Plasma enhanced cyclic chemical vapor deposition of silicon-containing films Grant 8,828,505 - Thridandam , et al. September 9, 2 | 2014-09-09 |
Method for recovering high-value components from waste gas streams Grant 8,795,411 - Hufton , et al. August 5, 2 | 2014-08-05 |
System And Method For Tungsten Hexafluoride Recovery And Reuse App 20140196664 - Johnson; Andrew David ;   et al. | 2014-07-17 |
Method and equipment for selectively collecting process effluent Grant 8,591,634 - Winchester , et al. November 26, 2 | 2013-11-26 |
Recovering of xenon by adsorption process Grant 8,535,414 - Johnson , et al. September 17, 2 | 2013-09-17 |
Low Temperature Deposition of Silicon-Containing Films App 20130189853 - Yang; Liu ;   et al. | 2013-07-25 |
Materials and Methods of Forming Controlled Void App 20130157435 - Vrtis; Raymond Nicholas ;   et al. | 2013-06-20 |
Materials and methods of forming controlled void Grant 8,399,349 - Vrtis , et al. March 19, 2 | 2013-03-19 |
Method for Recovering High-Value Components from Waste Gas Streams App 20130019749 - Hufton; Jeffrey Raymond ;   et al. | 2013-01-24 |
Low temperature deposition of silicon-containing films Grant 8,298,628 - Yang , et al. October 30, 2 | 2012-10-30 |
Selective etching and formation of xenon difluoride Grant 8,278,222 - Wu , et al. October 2, 2 | 2012-10-02 |
Process solutions containing surfactants Grant 8,227,395 - Zhang , et al. July 24, 2 | 2012-07-24 |
Plasma Enhanced Cyclic Chemical Vapor Deposition of Silicon- Containing Films App 20120171874 - Thridandam; Hareesh ;   et al. | 2012-07-05 |
Process and System for Providing Acetylene App 20120118763 - Maykut; Timothy John ;   et al. | 2012-05-17 |
Recovering Of Xenon By Adsorption Process App 20120079939 - Johnson; Andrew David ;   et al. | 2012-04-05 |
Process and system for providing acetylene Grant 8,129,577 - Maykut , et al. March 6, 2 | 2012-03-06 |
Method And Equipment For Selectively Collecting Process Effluent App 20120012201 - Winchester; David Charles ;   et al. | 2012-01-19 |
Process Solutions Containing Surfactants App 20110171583 - Zhang; Peng ;   et al. | 2011-07-14 |
Mechanical enhancement of dense and porous organosilicate materials by UV exposure Grant 7,932,188 - Lukas , et al. April 26, 2 | 2011-04-26 |
Process Solutions Containing Surfactants App 20100304313 - Zhang; Peng ;   et al. | 2010-12-02 |
Low Temperature Deposition of Silicon-Containing Films App 20100304047 - Yang; Liu ;   et al. | 2010-12-02 |
Process and System for Providing Acetylene App 20100069689 - Maykut; Timothy John ;   et al. | 2010-03-18 |
Selective Etching and Formation of Xenon Difluoride App 20100022095 - Wu; Dingjun ;   et al. | 2010-01-28 |
Process solutions containing surfactants Grant 7,591,270 - Zhang , et al. September 22, 2 | 2009-09-22 |
Method for removing carbon-containing residues from a substrate Grant 7,581,549 - Johnson , et al. September 1, 2 | 2009-09-01 |
Process solutions containing surfactants Grant 7,521,405 - Zhang , et al. April 21, 2 | 2009-04-21 |
Mechanical Enhancement of Dense and Porous Organosilicate Materials by UV Exposure App 20090054674 - Lukas; Aaron Scott ;   et al. | 2009-02-26 |
Addition of D2 to H2 to Detect and Calibrate Atomic Hydrogen Formed By Dissociative Electron attachment App 20090008426 - Dong; Chun Christine ;   et al. | 2009-01-08 |
Non-thermal process for forming porous low dielectric constant films Grant 7,470,454 - Lukas , et al. December 30, 2 | 2008-12-30 |
Mechanical enhancement of dense and porous organosilicate materials by UV exposure Grant 7,468,290 - Lukas , et al. December 23, 2 | 2008-12-23 |
Addition of D.sub.2 to H.sub.2 to detect and calibrate atomic hydrogen formed by dissociative electron attachment Grant 7,434,719 - Dong , et al. October 14, 2 | 2008-10-14 |
Non-thermal process for forming porous low dielectric constant films Grant 7,404,990 - Lukas , et al. July 29, 2 | 2008-07-29 |
Removal of transition metal ternary and/or quaternary barrier materials from a substrate Grant 7,371,688 - Ji , et al. May 13, 2 | 2008-05-13 |
Method for etching high dielectric constant materials and for cleaning deposition chambers for high dielectric constant materials Grant 7,357,138 - Ji , et al. April 15, 2 | 2008-04-15 |
Porous low dielectric constant compositions and methods for making and using same Grant 7,332,445 - Lukas , et al. February 19, 2 | 2008-02-19 |
Xenon recovery system Grant 7,285,154 - Karwacki, Jr. , et al. October 23, 2 | 2007-10-23 |
Method for removing titanium dioxide deposits from a reactor Grant 7,267,842 - Wu , et al. September 11, 2 | 2007-09-11 |
Process solutions containing surfactants Grant 7,129,199 - Zhang , et al. October 31, 2 | 2006-10-31 |
Method to protect internal components of semiconductor processing equipment using layered superlattice materials Grant 7,119,032 - Ji , et al. October 10, 2 | 2006-10-10 |
Mechanical enhancement of dense and porous organosilicate materials by UV exposure Grant 7,098,149 - Lukas , et al. August 29, 2 | 2006-08-29 |
Method for cleaning deposition chambers for high dielectric constant materials Grant 7,055,263 - Wu , et al. June 6, 2 | 2006-06-06 |
Process for cleaning a glass-coating reactor using a reactive gas Grant 6,857,433 - Henderson , et al. February 22, 2 | 2005-02-22 |
Halogen addition for improved adhesion of CVD copper to barrier Grant 6,783,868 - Ciotti , et al. August 31, 2 | 2004-08-31 |
On-line UV-Visible light halogen gas analyzer for semiconductor processing effluent monitoring Grant 6,686,594 - Ji , et al. February 3, 2 | 2004-02-03 |
Halogen addition for improved adhesion of CVD copper to barrier Grant 6,509,266 - Ciotti , et al. January 21, 2 | 2003-01-21 |