loadpatents
Patent applications and USPTO patent grants for Kariya; Takao.The latest application filed is for "cell structure of fuel cell and fuel cell stack".
Patent | Date |
---|---|
Cell Structure Of Fuel Cell And Fuel Cell Stack App 20090246585 - Kariya; Takao ;   et al. | 2009-10-01 |
Alignment apparatus and SOR X-ray exposure apparatus having same Grant 5,822,389 - Uzawa , et al. October 13, 1 | 1998-10-13 |
Mounting method Grant 5,687,947 - Iwamoto , et al. November 18, 1 | 1997-11-18 |
Substrate conveying device and method of controlling the same Grant 5,641,264 - Kuno , et al. June 24, 1 | 1997-06-24 |
Temperature controlling device for mask and wafer holders Grant 5,577,552 - Ebinuma , et al. November 26, 1 | 1996-11-26 |
Exposure method Grant 5,498,501 - Shimoda , et al. March 12, 1 | 1996-03-12 |
Exposure apparatus Grant 5,377,251 - Mizusawa , et al. December 27, 1 | 1994-12-27 |
X-ray mask structure Grant 5,356,686 - Fujioka , et al. October 18, 1 | 1994-10-18 |
Exposure apparatus Grant 5,317,615 - Ebinuma , et al. May 31, 1 | 1994-05-31 |
Substrate conveying apparatus Grant 5,277,539 - Matsui , et al. January 11, 1 | 1994-01-11 |
X-ray exposure apparatus Grant 5,267,292 - Tanaka , et al. November 30, 1 | 1993-11-30 |
Conveying apparatus and method of controlling the same Grant 5,226,523 - Kawakami , et al. July 13, 1 | 1993-07-13 |
Exposure apparatus Grant 5,182,615 - Kurosawa , et al. January 26, 1 | 1993-01-26 |
Exposure apparatus Grant 5,172,402 - Mizusawa , et al. December 15, 1 | 1992-12-15 |
X-ray exposure apparatus Grant 5,172,403 - Tanaka , et al. December 15, 1 | 1992-12-15 |
Method of manufacture of semiconductor devices Grant 5,168,512 - Iwamoto , et al. December 1, 1 | 1992-12-01 |
X-ray exposure apparatus Grant 5,164,974 - Kariya , et al. November 17, 1 | 1992-11-17 |
Exposure apparatus Grant 5,161,176 - Ebinuma , et al. November 3, 1 | 1992-11-03 |
X-ray reduction projection exposure system of reflection type Grant 5,153,898 - Suzuki , et al. October 6, 1 | 1992-10-06 |
Exposure apparatus Grant 5,150,391 - Ebinuma , et al. September 22, 1 | 1992-09-22 |
Exposure method and apparatus Grant 5,131,022 - Terashima , et al. July 14, 1 | 1992-07-14 |
Alignment system Grant 5,112,133 - Kurosawa , et al. May 12, 1 | 1992-05-12 |
Mask cassette and mask cassette loading device Grant 5,026,239 - Chiba , et al. June 25, 1 | 1991-06-25 |
Movable stage mechanism Grant 4,993,696 - Furukawa , et al. February 19, 1 | 1991-02-19 |
Device for holding a mask Grant 4,963,921 - Kariya , et al. October 16, 1 | 1990-10-16 |
Apparatus for holding an object by use of electrostatic attracting force Grant 4,667,110 - Kariya May 19, 1 | 1987-05-19 |
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