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Patent applications and USPTO patent grants for Karino; Isamu.The latest application filed is for "method and apparatus for analyzing minute foreign substance, and process for semiconductor elements or liquid crystal elements by use thereof".
Patent | Date |
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Method and apparatus for analyzing minute foreign substance, and process for semiconductor elements or liquid crystal elements by use thereof Grant 6,355,495 - Fujino , et al. March 12, 2 | 2002-03-12 |
Analyzing method and apparatus for minute foreign substances, and manufacturing methods for manufacturing semiconductor device and liquid crystal display device using the same Grant 5,877,035 - Fujino , et al. March 2, 1 | 1999-03-02 |
Method of detecting the position and the content of fine foreign matter on substrates and analyzers used therefor Grant 5,715,052 - Fujino , et al. February 3, 1 | 1998-02-03 |
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