Karimata; Tsutomu

Patent Applications and Registrations

Patent applications and USPTO patent grants for Karimata; Tsutomu.The latest application filed is for "adjustment method and electron beam device".

Company Profile

5.59.66

Karimata; Tsutomu - Tokyo JP
Karimata; Tsutomu - Kanagawa-ken JP
Karimata; Tsutomu - Yokohama JP
Karimata; Tsutomu - Yokohama-shi JP
Karimata; Tsutomu - Kanagawa N/A JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Adjustment method and electron beam device Grant 11,217,421 - Hayashi , et al. January 4, 2	2022-01-04
Coil-integrated-type yoke and manufacturing method of the same Grant 11,164,697 - Matsushima , et al. November 2, 2	2021-11-02
Gate valve Grant 10,900,573 - Karimata January 26, 2	2021-01-26
Adjustment Method And Electron Beam Device App 20210012997 - HAYASHI; Takehide ; et al.	2021-01-14
Electron Beam Irradiation Apparatus And Electron Beam Alignment Method App 20200273658 - WATANABE; Kenji ; et al.	2020-08-27
Coil-integrated-type Yoke And Manufacturing Method Of The Same App 20200066477 - MATSUSHIMA; Keisuke ; et al.	2020-02-27
Gate Valve App 20200027686 - KARIMATA; Tsutomu	2020-01-23
Vacuum Connection Mechanism And Electron Optical Device App 20190279839 - OHARA; Takashi ; et al.	2019-09-12
Inspection device Grant 10,157,722 - Hatakeyama , et al. Dec	2018-12-18
Inspection apparatus Grant 9,601,302 - Yoshikawa , et al. March 21, 2	2017-03-21
Inspection Device App 20160307726 - Hatakeyama; Masahiro ; et al.	2016-10-20
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 9,406,480 - Noji , et al. August 2, 2	2016-08-02
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 9,368,314 - Nakasuji , et al. June 14, 2	2016-06-14
Inspection Apparatus App 20150340193 - YOSHIKAWA; Shoji ; et al.	2015-11-26
Inspection apparatus Grant 9,134,261 - Yoshikawa , et al. September 15, 2	2015-09-15
Testing Apparatus Using Charged Particles And Device Manufacturing Method Using The Testing Apparatus App 20150122993 - Noji; Nobuharu ; et al.	2015-05-07
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 8,946,631 - Noji , et al. February 3, 2	2015-02-03
Substrate Inspection Method And A Substrate Processing Method App 20140367570 - Kimba; Toshifumi ; et al.	2014-12-18
Sample observing device and sample observing method Grant 8,884,225 - Karimata , et al. November 11, 2	2014-11-11
Inspection System By Charged Particle Beam And Method Of Manufacturing Devices Using The System App 20140319346 - Nakasuji; Mamoru ; et al.	2014-10-30
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 8,822,919 - Kimba , et al. September 2, 2	2014-09-02
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 8,803,103 - Nakasuji , et al. August 12, 2	2014-08-12
Detector and inspecting apparatus Grant 8,796,621 - Hatakeyama , et al. August 5, 2	2014-08-05
Testing Apparatus Using Charged Particles And Device Manufacturing Method Using The Testing Apparatus App 20140158885 - Noji; Nobuharu ; et al.	2014-06-12
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 8,742,341 - Noji , et al. June 3, 2	2014-06-03
Inspection System By Charged Particle Beam And Method Of Manufacturing Devices Using The System App 20140034831 - Nakasuji; Mamoru ; et al.	2014-02-06
Inspection Device App 20140014848 - Hatakeyama; Masahiro ; et al.	2014-01-16
Detector And Inspecting Apparatus App 20130228684 - Hatakeyama; Masahiro ; et al.	2013-09-05
Inspection device Grant 8,497,476 - Hatakeyama , et al. July 30, 2	2013-07-30
Sample Observing Device And Sample Observing Method App 20130161511 - Karimata; Tsutomu ; et al.	2013-06-27
Detector and inspecting apparatus Grant 8,431,892 - Hatakeyama , et al. April 30, 2	2013-04-30
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 8,368,031 - Nakasuji , et al. February 5, 2	2013-02-05
Inspection Device App 20120235036 - Hatakeyama; Masahiro ; et al.	2012-09-20
Inspection System By Charged Particle Beam And Method Of Manufacturing Devices Using The System App 20120032079 - Nakasuji; Mamoru ; et al.	2012-02-09
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 8,053,726 - Nakasuji , et al. November 8, 2	2011-11-08
Apparatus For Inspection With Electron Beam, Method For Operating Same, And Method For Manufacturing Semiconductor Device Using Former App 20110104830 - Kimba; Toshifumi ; et al.	2011-05-05
Detector and inspecting apparatus Grant 7,928,382 - Hatakeyama , et al. April 19, 2	2011-04-19
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 7,928,378 - Kimba , et al. April 19, 2	2011-04-19
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,888,642 - Nakasuji , et al. February 15, 2	2011-02-15
Detector And Inspecting Apparatus App 20110024623 - HATAKEYAMA; Masahiro ; et al.	2011-02-03
Electron beam apparatus and an aberration correction optical apparatus Grant 7,863,580 - Hatakeyama , et al. January 4, 2	2011-01-04
Sheet beam-type testing apparatus Grant 7,829,871 - Nakasuji , et al. November 9, 2	2010-11-09
Testing apparatus using charged particles and device manufacturing method using the testing apparatus App 20100237243 - Noji; Nobuharu ; et al.	2010-09-23
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,745,784 - Nakasuji , et al. June 29, 2	2010-06-29
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 7,741,601 - Noji , et al. June 22, 2	2010-06-22
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,601,972 - Nakasuji , et al. October 13, 2	2009-10-13
Detector And Inspecting Apparatus App 20090224151 - Hatakeyama; Masahiro ; et al.	2009-09-10
Electron Beam Apparatus App 20090218506 - Nakasuji; Mamoru ; et al.	2009-09-03
Electron beam inspection system and inspection method and method of manufacturing devices using the system Grant 7,569,838 - Watanabe , et al. August 4, 2	2009-08-04
Testing apparatus using charged particles and device manufacturing method using the testing apparatus App 20090101816 - Noji; Nobuharu ; et al.	2009-04-23
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20090050822 - Nakasuji; Mamoru ; et al.	2009-02-26
Electron Beam Apparatus And Method Of Manufacturing Semiconductor Device Using The Apparatus App 20090039262 - NAKASUJI; Mamoru ; et al.	2009-02-12
Inspection system by charged particle beam and method of manufacturing devices using the system App 20090032708 - Nakasuji; Mamoru ; et al.	2009-02-05
Electron Beam Apparatus App 20090014649 - Nakasuji; Mamoru ; et al.	2009-01-15
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former App 20080308729 - Kimba; Toshifumi ; et al.	2008-12-18
Sheet Beam-type Testing Apparatus App 20080302963 - NAKASUJI; Mamoru ; et al.	2008-12-11
Electron beam apparatus and device production method using the electron beam apparatus Grant 7,439,502 - Nakasuji , et al. October 21, 2	2008-10-21
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,423,267 - Nakasuji , et al. September 9, 2	2008-09-09
Sheet beam-type testing apparatus Grant 7,417,236 - Nakasuji , et al. August 26, 2	2008-08-26
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,411,191 - Nakasuji , et al. August 12, 2	2008-08-12
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 7,408,175 - Kimba , et al. August 5, 2	2008-08-05
Electron beam inspection system and inspection method and method of manufacturing devices using the system App 20080173814 - Watanabe; Kenji ; et al.	2008-07-24
Electron beam apparatus and device production method using the electron beam apparatus App 20080173815 - Nakasuji; Mamoru ; et al.	2008-07-24
Method for inspecting substrate, substrate inspecting system and electron App 20080121804 - Nakasuji; Mamoru ; et al.	2008-05-29
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 7,365,324 - Noji , et al. April 29, 2	2008-04-29
Electron beam apparatus with detailed observation function and sample inspecting and observing method using electron beam apparatus Grant 7,352,195 - Watanabe , et al. April 1, 2	2008-04-01
Electron beam inspection system and inspection method and method of manufacturing devices using the system Grant 7,351,969 - Watanabe , et al. April 1, 2	2008-04-01
Electron Beam Apparatus And An Aberration Correction Optical Apparatus App 20080067377 - Hatakeyama; Masahiro ; et al.	2008-03-20
Inspection system by charged particle beam and method of manufacturing devices using the system App 20080042060 - Nakasuji; Mamoru ; et al.	2008-02-21
Electron beam apparatus and device production method using the electron beam apparatus App 20070272859 - Nakasuji; Mamoru ; et al.	2007-11-29
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,297,949 - Nakasuji , et al. November 20, 2	2007-11-20
Inspection system by charged particle beam and method of manufacturing devices using the same App 20070235644 - Nakasuji; Mamoru ; et al.	2007-10-11
Electron beam apparatus with detailed observation function and sample inspecting and observing method using electron beam apparatus App 20070200569 - Watanabe; Kenji ; et al.	2007-08-30
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former App 20070194235 - Kimba; Toshifumi ; et al.	2007-08-23
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,247,848 - Nakasuji , et al. July 24, 2	2007-07-24
Electron beam apparatus and device fabrication method using the electron beam apparatus Grant 7,244,932 - Nakasuji , et al. July 17, 2	2007-07-17
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,241,993 - Nakasuji , et al. July 10, 2	2007-07-10
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 7,223,973 - Kimba , et al. May 29, 2	2007-05-29
Electron beam apparatus with detailed observation function and sample inspecting and observing method using electron beam apparatus Grant 7,212,017 - Watanabe , et al. May 1, 2	2007-05-01
Inspection system by charged particle beam and method of manufacturing devices using the system App 20070057186 - Nakasuji; Mamoru ; et al.	2007-03-15
Method for inspecting substrate, substrate inspecting system and electron beam apparatus App 20070045536 - Nakasuji; Mamoru ; et al.	2007-03-01
Electron beam apparatus Grant 7,176,459 - Watanabe , et al. February 13, 2	2007-02-13
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20070018101 - Nakasuji; Mamoru ; et al.	2007-01-25
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 7,138,629 - Noji , et al. November 21, 2	2006-11-21
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,135,676 - Nakasuji , et al. November 14, 2	2006-11-14
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,129,485 - Nakasuji , et al. October 31, 2	2006-10-31
Sheet beam-type inspection apparatus Grant 7,109,484 - Nakasuji , et al. September 19, 2	2006-09-19
Method for inspecting substrate, substrate inspecting system and electron beam apparatus Grant 7,109,483 - Nakasuji , et al. September 19, 2	2006-09-19
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,095,022 - Nakasuji , et al. August 22, 2	2006-08-22
Testing apparatus using charged particles and device manufacturing method using the testing apparatus App 20060169900 - Noji; Nobuharu ; et al.	2006-08-03
Sheet beam-type testing apparatus App 20060138343 - Nakasuji; Mamoru ; et al.	2006-06-29
Electron beam inspection system and inspection method and method of manufacturing devices using the system App 20060118719 - Watanabe; Kenji ; et al.	2006-06-08
Sheet beam-type testing apparatus Grant 7,049,585 - Nakasuji , et al. May 23, 2	2006-05-23
Electron beam inspection system and inspection method and method of manufacturing devices using the system Grant 6,992,290 - Watanabe , et al. January 31, 2	2006-01-31
Electron beam apparatus App 20050253066 - Watanabe, Kenji ; et al.	2005-11-17
Electron beam apparatus with detailed observation function and sample inspecting and observing method using electron beam apparatus App 20050199807 - Watanabe, Kenji ; et al.	2005-09-15
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former App 20050121611 - Kimba, Toshifumi ; et al.	2005-06-09
Sheet beam-type inspection apparatus App 20050092921 - Nakasuji, Mamoru ; et al.	2005-05-05
Plating apparatus and method App 20050074559 - Inoue, Hiroaki ; et al.	2005-04-07
Testing apparatus using charged particles and device manufacturing method using the testing apparatus App 20050045821 - Noji, Nobuharu ; et al.	2005-03-03
Plating apparatus and method Grant 6,858,084 - Inoue , et al. February 22, 2	2005-02-22
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 6,855,929 - Kimba , et al. February 15, 2	2005-02-15
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20040183013 - Nakasuji, Mamoru ; et al.	2004-09-23
Electroless plating apparatus and method App 20040161529 - Hongo, Akihisa ; et al.	2004-08-19
Electroless plating apparatus and method Grant 6,716,330 - Hongo , et al. April 6, 2	2004-04-06
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20030207475 - Nakasuji, Mamoru ; et al.	2003-11-06
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 6,593,152 - Nakasuji , et al. July 15, 2	2003-07-15
Charged particle beam control apparatus App 20030030007 - Karimata, Tsutomu ; et al.	2003-02-13
Plating apparatus and method App 20030019426 - Inoue, Hiroaki ; et al.	2003-01-30
Electron beam apparatus and device production method using the electron beam apparatus App 20020148961 - Nakasuji, Mamoru ; et al.	2002-10-17
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former App 20020148975 - Kimba, Toshifumi ; et al.	2002-10-17
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20020142496 - Nakasuji, Mamoru ; et al.	2002-10-03
Method for inspecting substrate, substrate inspecting system and electron beam apparatus App 20020130262 - Nakasuji, Mamoru ; et al.	2002-09-19
Electroless plating apparatus and method App 20020127790 - Hongo, Akihisa ; et al.	2002-09-12
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20020109090 - Nakasuji, Mamoru ; et al.	2002-08-15
Electron beam inspection system and inspection method and method of manufacturing devices using the system App 20020088940 - Watanabe, Kenji ; et al.	2002-07-11
Sheet beam-type inspection apparatus App 20020036264 - Nakasuji, Mamoru ; et al.	2002-03-28
Inspection system by charged particle beam and method of manufacturing devices using the system App 20020033449 - Nakasuji, Mamoru ; et al.	2002-03-21
Inspection system by charged particle beam and method of manufacturing devices using the system App 20020028399 - Nakasuji, Mamoru ; et al.	2002-03-07