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Patent applications and USPTO patent grants for Kari; Thomas S..The latest application filed is for "modified facet etch to prevent blown gate oxide and increase etch chamber life".
Patent | Date |
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Modified Facet Etch to Prevent Blown Gate Oxide and Increase Etch Chamber Life App 20070278611 - Polinsky; William A. ;   et al. | 2007-12-06 |
Modified facet etch to prevent blown gate oxide and increase etch chamber life Grant 7,262,136 - Polinsky , et al. August 28, 2 | 2007-08-28 |
Modified facet etch to prevent blown gate oxide and increase etch chamber life App 20040248355 - Polinsky, William A. ;   et al. | 2004-12-09 |
Modified facet etch to prevent blown gate oxide and increase etch chamber life Grant 6,762,125 - Polinsky , et al. July 13, 2 | 2004-07-13 |
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