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Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium Grant 10,720,324 - Nakatani , et al. | 2020-07-21 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium Grant 10,199,219 - Shimamoto , et al. Fe | 2019-02-05 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium App 20180363138 - NAKATANI; Kimihiko ;   et al. | 2018-12-20 |
Method of manufacturing semiconductor device Grant 10,032,630 - Yamamoto , et al. July 24, 2 | 2018-07-24 |
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Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium App 20170365467 - SHIMAMOTO; Satoshi ;   et al. | 2017-12-21 |
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Substrate Processing Apparatus For Forming Film Including At Least Two Different Elements App 20160329208 - TAKASAWA; Yushin ;   et al. | 2016-11-10 |
Substrate processing apparatus capable of forming films including at least two different elements Grant 9,487,861 - Takasawa , et al. November 8, 2 | 2016-11-08 |
Method of manufacturing semiconductor device for forming film including at least two different elements Grant 9,478,417 - Takasawa , et al. October 25, 2 | 2016-10-25 |
Subtrate Processing Apparatus Capable Forming Film Including At Least Two Different Elements App 20160298236 - TAKASAWA; Yushin ;   et al. | 2016-10-13 |
Method of manufacturing semiconductor device for forming film including at least two different elements Grant 9,443,720 - Takasawa , et al. September 13, 2 | 2016-09-13 |
Method of manufacturing semiconductor device for forming film including at least two different elements Grant 9,443,719 - Takasawa , et al. September 13, 2 | 2016-09-13 |
Method Of Manufacturing Semiconductor Device App 20160211132 - TAKASAWA; Yushin ;   et al. | 2016-07-21 |
Method Of Manufacturing Semiconductor Device App 20160211134 - TAKASAWA; Yushin ;   et al. | 2016-07-21 |
Method Of Manufacturing Semiconductor Device App 20160211133 - TAKASAWA; Yushin ;   et al. | 2016-07-21 |
Method and apparatus of manufacturing a semiconductor device by forming a film on a substrate Grant 9,385,013 - Takasawa , et al. July 5, 2 | 2016-07-05 |
Method of manufacturing semiconductor device by forming a film on a substrate Grant 9,384,970 - Takasawa , et al. July 5, 2 | 2016-07-05 |
Method of manufacturing a semiconductor device by forming a film on a substrate Grant 9,384,967 - Takasawa , et al. July 5, 2 | 2016-07-05 |
Method of manufacturing semiconductor device by forming a film on a substrate Grant 9,384,971 - Takasawa , et al. July 5, 2 | 2016-07-05 |
Method of manufacturing a semiconductor device by forming a film on a substrate Grant 9,384,966 - Takasawa , et al. July 5, 2 | 2016-07-05 |
Method of manufacturing semiconductor device by forming a film on a substrate Grant 9,384,969 - Takasawa , et al. July 5, 2 | 2016-07-05 |
Method of manufacturing semiconductor device by forming a film on a substrate Grant 9,384,972 - Takasawa , et al. July 5, 2 | 2016-07-05 |
Method of manufacturing a semiconductor device by forming a film on a substrate Grant 9,384,968 - Takasawa , et al. July 5, 2 | 2016-07-05 |
Method and Apparatus of Manufacturing a Semiconductor Device by Forming a Film on a Substrate App 20160148824 - TAKASAWA; Yushin ;   et al. | 2016-05-26 |
Method of manufacturing semiconductor device and substrate processing apparatus Grant 9,330,904 - Takasawa , et al. May 3, 2 | 2016-05-03 |
Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus for forming thin film containing at least two different elements Grant 9,318,316 - Takasawa , et al. April 19, 2 | 2016-04-19 |
Method of manufacturing semiconductor device and substrate processing apparatus Grant 9,312,123 - Takasawa , et al. April 12, 2 | 2016-04-12 |
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Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus App 20150206742 - TAKASAWA; Yushin ;   et al. | 2015-07-23 |
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus App 20150206737 - TAKASAWA; Yushin ;   et al. | 2015-07-23 |
Method of manufacturing semiconductor device and substrate processing apparatus Grant 8,409,988 - Takasawa , et al. April 2, 2 | 2013-04-02 |
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Semiconductor device manufacturing method and semiconductor manufacturing apparatus Grant 6,943,089 - Takasawa , et al. September 13, 2 | 2005-09-13 |
Method for manufacturing semiconductor device, substrate treatment method, and semiconductor manufacturing apparatus Grant 6,821,871 - Nomura , et al. November 23, 2 | 2004-11-23 |
Semiconductor device manufacturing method and semiconductor manufacturing apparatus App 20020025651 - Takasawa, Yushin ;   et al. | 2002-02-28 |
Method for manufacturing semiconductor device, substrate treatment method, and semiconductor manufacturing apparatus App 20020016051 - Nomura, Hisashi ;   et al. | 2002-02-07 |
Method for conflict detection in parallel processing system Grant 5,473,774 - Childers , et al. December 5, 1 | 1995-12-05 |