| Patent | Date |
|---|
Early Warning Systems And Methods For Determining Capacitor Failures
App 20220172933 - Kapoor; Sunil ; et al. | 2022-06-02 |
Combiner And Distributor For Adjusting Impedances Or Power Across Multiple Plasma Processing Stations
App 20220158604 - Kapoor; Sunil ; et al. | 2022-05-19 |
Mutually Induced Filters
App 20220149801 - Kapoor; Sunil ; et al. | 2022-05-12 |
Apparatuses And Methods For Avoiding Electrical Breakdown From Rf Terminal To Adjacent Non-rf Terminal
App 20220139670 - Kim; Hyungjoon ; et al. | 2022-05-05 |
Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal
Grant 11,264,207 - Kim , et al. March 1, 2 | 2022-03-01 |
Mutually induced filters
Grant 11,258,420 - Kapoor , et al. February 22, 2 | 2022-02-22 |
Combiner and distributor for adjusting impedances or power across multiple plasma processing stations
Grant 11,258,421 - Kapoor , et al. February 22, 2 | 2022-02-22 |
Control Of Wafer Bow In Multiple Stations
App 20220051919 - Augustyniak; Edward ; et al. | 2022-02-17 |
Anomalous Plasma Event Detection And Mitigation In Semiconductor Processing
App 20220037135 - Kapoor; Sunil ; et al. | 2022-02-03 |
Control of wafer bow in multiple stations
Grant 11,183,406 - Augustyniak , et al. November 23, 2 | 2021-11-23 |
Multiple-Output Radiofrequency Matching Module and Associated Methods
App 20210313948 - Leeser; Karl ; et al. | 2021-10-07 |
Rf Signal Parameter Measurement In An Integrated Circuit Fabrication Chamber
App 20210302478 - Kapoor; Sunil ; et al. | 2021-09-30 |
Modular Recipe Controlled Calibration (mrcc) Apparatus Used To Balance Plasma In Multiple Station System
App 20210202208 - Juco; Eller Y. ; et al. | 2021-07-01 |
Multiple-output radiofrequency matching module and associated methods
Grant 11,038,483 - Leeser , et al. June 15, 2 | 2021-06-15 |
Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station system
Grant 10,991,550 - Juco , et al. April 27, 2 | 2021-04-27 |
Capacitance Measurement Without Disconnecting From High Power Circuit
App 20210098233 - Kapoor; Sunil ; et al. | 2021-04-01 |
Rf Current Measurement In Semiconductor Processing Tool
App 20210090962 - Kapoor; Sunil ; et al. | 2021-03-25 |
Fault detection using showerhead voltage variation
Grant 10,879,092 - Kapoor , et al. December 29, 2 | 2020-12-29 |
Easier to Wear Shoes and Associated Methods
App 20200260817 - KAPOOR; SUNIL | 2020-08-20 |
Mutually Induced Filters
App 20200252040 - Kind Code | 2020-08-06 |
Apparatuses And Methods For Avoiding Electrical Breakdown From Rf Terminal To Adjacent Non-rf Terminal
App 20200251307 - Kind Code | 2020-08-06 |
Multiple-Output Radiofrequency Matching Module and Associated Methods
App 20200244244 - Leeser; Karl ; et al. | 2020-07-30 |
Combiner And Distributor For Adjusting Impedances Or Power Across Multiple Plasma Processing Stations
App 20200195216 - Kapoor; Sunil ; et al. | 2020-06-18 |
Multiple-output radiofrequency matching module and associated methods
Grant 10,666,218 - Leeser , et al. | 2020-05-26 |
RF generator for generating a modulated frequency or an inter-modulated frequency
Grant 10,665,427 - Kapoor , et al. | 2020-05-26 |
Mutually induced filters
Grant 10,637,427 - Kapoor , et al. | 2020-04-28 |
Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal
Grant 10,636,624 - Kim , et al. | 2020-04-28 |
Control Of Wafer Bow In Multiple Stations
App 20200118856 - Augustyniak; Edward ; et al. | 2020-04-16 |
Combiner and distributor for adjusting impedances or power across multiple plasma processing stations
Grant 10,622,962 - Kapoor , et al. | 2020-04-14 |
Modular Recipe Controlled Calibration (MRCC) Apparatus Used to Balance Plasma in Multiple Station System
App 20200075289 - Juco; Eller Y. ; et al. | 2020-03-05 |
Control of water bow in multiple stations
Grant 10,553,465 - Augustyniak , et al. Fe | 2020-02-04 |
Rf Generator For Generating A Modulated Frequency Or An Inter-modulated Frequency
App 20200027701 - Kapoor; Sunil ; et al. | 2020-01-23 |
Apparatuses And Methods For Avoiding Electrical Breakdown From Rf Terminal To Adjacent Non-rf Terminal
App 20200027700 - Kim; Hyungjoon ; et al. | 2020-01-23 |
Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal
Grant 10,373,805 - Kim , et al. | 2019-08-06 |
RF generator for generating a modulated frequency or an inter-modulated frequency
Grant 10,304,663 - Kapoor , et al. | 2019-05-28 |
Combiner And Distributor For Adjusting Impedances Or Power Across Multiple Plasma Processing Stations
App 20190149119 - Kapoor; Sunil ; et al. | 2019-05-16 |
Combiner and distributor for adjusting impedances or power across multiple plasma processing stations
Grant 10,187,032 - Kapoor , et al. Ja | 2019-01-22 |
Fault Detection Using Showerhead Voltage Variation
App 20180350643 - Kapoor; Sunil ; et al. | 2018-12-06 |
Multi-station plasma reactor with RF balancing
Grant 10,145,010 - Kapoor , et al. De | 2018-12-04 |
Mutually Induced Filters
App 20180331669 - Kapoor; Sunil ; et al. | 2018-11-15 |
Apparatuses And Methods For Avoiding Electrical Breakdown From Rf Terminal To Adjacent Non-rf Terminal
App 20180323037 - Kim; Hyungjoon ; et al. | 2018-11-08 |
Multiple-Output Radiofrequency Matching Module and Associated Methods
App 20180309424 - Leeser; Karl ; et al. | 2018-10-25 |
Fault detection using showerhead voltage variation
Grant 10,043,690 - Kapoor , et al. August 7, 2 | 2018-08-07 |
Mutually induced filters
Grant 10,044,338 - Kapoor , et al. August 7, 2 | 2018-08-07 |
Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal
Grant 10,043,636 - Kim , et al. August 7, 2 | 2018-08-07 |
Systems And Methods For Providing Shunt Cancellation Of Parasitic Components In A Plasma Reactor
App 20180175819 - Rangineni; Yaswanth ; et al. | 2018-06-21 |
Multi-station Plasma Reactor With Rf Balancing
App 20180163302 - Kapoor; Sunil ; et al. | 2018-06-14 |
Multiple-output radiofrequency matching module and associated methods
Grant 9,954,508 - Leeser , et al. April 24, 2 | 2018-04-24 |
Control Of Wafer Bow In Multiple Stations
App 20180025930 - Augustyniak; Edward ; et al. | 2018-01-25 |
Metrology methods to detect plasma in wafer cavity and use of the metrology for station-to-station and tool-to-tool matching
Grant 9,875,883 - Sakiyama , et al. January 23, 2 | 2018-01-23 |
Combiner And Distributor For Adjusting Impedances Or Power Across Multiple Plasma Processing Stations
App 20170365907 - Kapoor; Sunil ; et al. | 2017-12-21 |
Multi-station plasma reactor with RF balancing
Grant 9,840,776 - Kapoor , et al. December 12, 2 | 2017-12-12 |
Metrology Methods to Detect Plasma in Wafer Cavity and Use of the Metrology for Station-to-Station and Tool-to-Tool Matching
App 20170338085 - Sakiyama; Yukinori ; et al. | 2017-11-23 |
Metrology methods to detect plasma in wafer cavity and use of the metrology for station-to-station and tool-to-tool matching
Grant 9,754,769 - Sakiyama , et al. September 5, 2 | 2017-09-05 |
Apparatuses And Methods For Avoiding Electrical Breakdown From RF Terminal To Adjacent Non-RF Terminal
App 20170169995 - Kim; Hyungjoon ; et al. | 2017-06-15 |
Multiple-Output Radiofrequency Matching Module and Associated Methods
App 20170117869 - Leeser; Karl ; et al. | 2017-04-27 |
Mutually Induced Filters
App 20170111025 - Kapoor; Sunil ; et al. | 2017-04-20 |
Metrology Methods to Detect Plasma in Wafer Cavity and Use of the Metrology for Station-to-Station and Tool-to-Tool Matching
App 20170076921 - Sakiyama; Yukinori ; et al. | 2017-03-16 |
Fault Detection Using Showerhead Voltage Variation
App 20160293385 - Kapoor; Sunil ; et al. | 2016-10-06 |
Multi-station Plasma Reactor With Rf Balancing
App 20160168701 - Kapoor; Sunil ; et al. | 2016-06-16 |
Multi-station plasma reactor with RF balancing
Grant 9,263,350 - Kapoor , et al. February 16, 2 | 2016-02-16 |
Multi-station Plasma Reactor With Rf Balancing
App 20150348854 - Kapoor; Sunil ; et al. | 2015-12-03 |
Closed loop control system for RF power balancing of the stations in a multi-station processing tool with shared RF source
Grant 8,282,983 - Kapoor , et al. October 9, 2 | 2012-10-09 |
Variable-Density Plasma Processing of Semiconductor Substrates
App 20120164834 - Jennings; Kevin ; et al. | 2012-06-28 |
Systems and Methods for Receiver Upgrade
App 20080279120 - Kapoor; Sunil ; et al. | 2008-11-13 |
Systems and methods for receiver upgrade
Grant 7,395,091 - Kapoor , et al. July 1, 2 | 2008-07-01 |
Systems and methods for receiver upgrade
App 20050208912 - Kapoor, Sunil ; et al. | 2005-09-22 |
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