Patent | Date |
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Rare-earth oxide based coatings based on ion assisted deposition Grant 11,424,136 - Sun , et al. August 23, 2 | 2022-08-23 |
Heat treated ceramic substrate having ceramic coating Grant 11,279,661 - Sun , et al. March 22, 2 | 2022-03-22 |
Heat Treated Ceramic Substrate Having Ceramic Coating App 20210317049 - Sun; Jennifer Y. ;   et al. | 2021-10-14 |
Plasma Erosion Resistant Rare-earth Oxide Based Thin Film Coatings App 20210317563 - Sun; Jennifer Y. ;   et al. | 2021-10-14 |
Plasma erosion resistant rare-earth oxide based thin film coatings Grant 11,053,581 - Sun , et al. July 6, 2 | 2021-07-06 |
Rare-earth Oxide Based Coatings Based On Ion Assisted Deposition App 20210118703 - Sun; Jennifer Y. ;   et al. | 2021-04-22 |
Rare-earth oxide based chamber material Grant 10,934,216 - Sun , et al. March 2, 2 | 2021-03-02 |
Rare-earth oxide based coatings based on ion assisted deposition Grant 10,930,526 - Sun , et al. February 23, 2 | 2021-02-23 |
Plasma Erosion Resistant Thin Film Coating For High Temperature Application App 20210010126 - Firouzdor; Vahid ;   et al. | 2021-01-14 |
Plasma erosion resistant thin film coating for high temperature application Grant 10,815,562 - Firouzdor , et al. October 27, 2 | 2020-10-27 |
Ion assisted deposition for rare-earth oxide based thin film coatings on process rings Grant 10,796,888 - Sun , et al. October 6, 2 | 2020-10-06 |
Rare-earth oxide based erosion resistant coatings for semiconductor application Grant 10,734,202 - Sun , et al. | 2020-08-04 |
Plasma Erosion Resistant Rare-earth Oxide Based Thin Film Coatings App 20200087776 - Sun; Jennifer Y. ;   et al. | 2020-03-19 |
Rare-earth oxide based chamber material Grant 10,584,068 - Sun , et al. | 2020-03-10 |
Rare-earth oxide based chamber material Grant 10,577,286 - Sun , et al. | 2020-03-03 |
Ion assisted deposition top coat of rare-earth oxide Grant 10,563,297 - Sun , et al. Feb | 2020-02-18 |
Plasma Spray Coating Enhancement Using Plasma Flame Heat Treatment App 20200035463 - Sun; Jennifer Y. ;   et al. | 2020-01-30 |
Ion assisted deposition top coat of rare-earth oxide Grant 10,544,500 - Sun , et al. Ja | 2020-01-28 |
Plasma erosion resistant rare-earth oxide based thin film coatings Grant 10,501,843 - Sun , et al. Dec | 2019-12-10 |
Plasma spray coating enhancement using plasma flame heat treatment Grant 10,468,235 - Sun , et al. No | 2019-11-05 |
Rare-earth Oxide Based Chamber Material App 20190263722 - Sun; Jennifer Y. ;   et al. | 2019-08-29 |
Heat Treated Ceramic Substrate Having Ceramic Coating App 20190233343 - Sun; Jennifer Y. ;   et al. | 2019-08-01 |
Heat treated ceramic substrate having ceramic coating Grant 10,364,197 - Sun , et al. July 30, 2 | 2019-07-30 |
Coating Architecture For Plasma Sprayed Chamber Components App 20180366302 - Sun; Jennifer Y. ;   et al. | 2018-12-20 |
Plasma erosion resistant rare-earth oxide based thin film coatings Grant 10,119,188 - Sun , et al. November 6, 2 | 2018-11-06 |
Chemistry Compatible Coating Material For Advanced Device On-wafer Particle Performance App 20180269039 - Sun; Jennifer Y. ;   et al. | 2018-09-20 |
Plasma Erosion Resistant Thin Film Coating For High Temperature Application App 20180230587 - Firouzdor; Vahid ;   et al. | 2018-08-16 |
Chemistry compatible coating material for advanced device on-wafer particle performance Grant 10,020,170 - Sun , et al. July 10, 2 | 2018-07-10 |
Substrate Support Assembly Having A Plasma Resistant Protective Layer App 20180151401 - Sun; Jennifer Y. ;   et al. | 2018-05-31 |
Plasma erosion resistant thin film coating for high temperature application Grant 9,976,211 - Firouzdor , et al. May 22, 2 | 2018-05-22 |
Ion assisted deposition top coat of rare-earth oxide Grant 9,970,095 - Sun , et al. May 15, 2 | 2018-05-15 |
Coating Architecture For Plasma Sprayed Chamber Components App 20180108517 - Sun; Jennifer Y. ;   et al. | 2018-04-19 |
Rare-earth Oxide Based Erosion Resistant Coatings For Semiconductor Application App 20180102237 - Sun; Jennifer Y. ;   et al. | 2018-04-12 |
Rare-earth Oxide Based Coatings Based On Ion Assisted Deposition App 20180100228 - Sun; Jennifer Y. ;   et al. | 2018-04-12 |
Ion Assisted Deposition For Rare-earth Oxide Based Thin Film Coatings On Process Rings App 20180096825 - Sun; Jennifer Y. ;   et al. | 2018-04-05 |
Plasma Erosion Resistant Rare-earth Oxide Based Thin Film Coatings App 20180087144 - Sun; Jennifer Y. ;   et al. | 2018-03-29 |
Ion Assisted Deposition Top Coat Of Rare-earth Oxide App 20180080116 - Sun; Jennifer Y. ;   et al. | 2018-03-22 |
Plasma Erosion Resistant Rare-earth Oxide Based Thin Film Coatings App 20180073125 - Sun; Jennifer Y. ;   et al. | 2018-03-15 |
Substrate support assembly having a plasma resistant protective layer Grant 9,916,998 - Sun , et al. March 13, 2 | 2018-03-13 |
Rare-earth Oxide Based Chamber Material App 20180044247 - Sun; Jennifer Y. ;   et al. | 2018-02-15 |
Rare-earth Oxide Based Chamber Material App 20180044246 - Sun; Jennifer Y. ;   et al. | 2018-02-15 |
Rare-earth oxide based monolithic chamber material Grant 9,890,086 - Sun , et al. February 13, 2 | 2018-02-13 |
Rare-earth oxide based monolithic chamber material Grant 9,884,787 - Sun , et al. February 6, 2 | 2018-02-06 |
Ion Assisted Deposition Top Coat Of Rare-earth Oxide App 20180030589 - Sun; Jennifer Y. ;   et al. | 2018-02-01 |
Ion assisted deposition for rare-earth oxide based coatings Grant 9,869,012 - Sun , et al. January 16, 2 | 2018-01-16 |
Ion assisted deposition top coat of rare-earth oxide Grant 9,869,013 - Sun , et al. January 16, 2 | 2018-01-16 |
Rare-earth oxide based erosion resistant coatings for semiconductor application Grant 9,865,434 - Sun , et al. January 9, 2 | 2018-01-09 |
Plasma erosion resistant rare-earth oxide based thin film coatings Grant 9,850,568 - Sun , et al. December 26, 2 | 2017-12-26 |
Rare-earth oxide based coatings based on ion assisted deposition Grant 9,812,341 - Sun , et al. November 7, 2 | 2017-11-07 |
Coating Architecture For Plasma Sprayed Chamber Components App 20170301520 - Sun; Jennifer Y. ;   et al. | 2017-10-19 |
Ion Assisted Deposition For Rare-earth Oxide Based Thin Film Coatings On Process Rings App 20170301522 - Sun; Jennifer Y. ;   et al. | 2017-10-19 |
Ion assisted deposition for rare-earth oxide based thin film coatings on process rings Grant 9,711,334 - Sun , et al. July 18, 2 | 2017-07-18 |
Anodization Architecture For Electro-plate Adhesion App 20170175284 - Sun; Jennifer Y. ;   et al. | 2017-06-22 |
Ion Assisted Deposition For Rare-earth Oxide Based Coatings App 20170130319 - Sun; Jennifer Y. ;   et al. | 2017-05-11 |
Rare-earth Oxide Based Coatings Based On Ion Assisted Deposition App 20170133207 - Sun; Jennifer Y. ;   et al. | 2017-05-11 |
Anodization architecture for electro-plate adhesion Grant 9,624,593 - Sun , et al. April 18, 2 | 2017-04-18 |
Rare-earth oxide based coating Grant 9,617,188 - Sun , et al. April 11, 2 | 2017-04-11 |
Innovative top-coat approach for advanced device on-wafer particle performance Grant 9,604,249 - Sun , et al. March 28, 2 | 2017-03-28 |
Ion assisted deposition for rare-earth oxide based coatings on lids and nozzles Grant 9,583,369 - Sun , et al. February 28, 2 | 2017-02-28 |
Rare-earth Oxide Based Monolithic Chamber Material App 20160326061 - Sun; Jennifer Y. ;   et al. | 2016-11-10 |
Ion Assisted Deposition Top Coat Of Rare-earth Oxide App 20160326626 - Sun; Jennifer Y. ;   et al. | 2016-11-10 |
Rare-earth Oxide Based Monolithic Chamber Material App 20160326060 - Sun; Jennifer Y. ;   et al. | 2016-11-10 |
Rare-earth Oxide Based Monolithic Chamber Material App 20160318807 - Sun; Jennifer Y. ;   et al. | 2016-11-03 |
Rare-earth oxide based monolithic chamber material Grant 9,440,886 - Sun , et al. September 13, 2 | 2016-09-13 |
Chemistry Compatible Coating Material For Advanced Device On-wafer Particle Performance App 20160211121 - Sun; Jennifer Y. ;   et al. | 2016-07-21 |
Plasma resistant ceramic coated conductive article Grant 9,394,615 - Sun , et al. July 19, 2 | 2016-07-19 |
Heat Treated Ceramic Substrate Having Ceramic Coating App 20160060181 - Sun; Jennifer Y. ;   et al. | 2016-03-03 |
Heat treated ceramic substrate having ceramic coating and heat treatment for coated ceramics Grant 9,212,099 - Sun , et al. December 15, 2 | 2015-12-15 |
Chamber Component With Fluorinated Thin Film Coating App 20150311043 - Sun; Jennifer Y. ;   et al. | 2015-10-29 |
Plasma Erosion Resistant Thin Film Coating For High Temperature Application App 20150307982 - Firouzdor; Vahid ;   et al. | 2015-10-29 |
Ion Assisted Deposition Top Coat Of Rare-earth Oxide App 20150311044 - Sun; Jennifer Y. ;   et al. | 2015-10-29 |
Ceramic Coated Article And Process For Applying Ceramic Coating App 20150299050 - Sun; Jennifer Y. ;   et al. | 2015-10-22 |
Rare-earth Oxide Based Erosion Resistant Coatings For Semiconductor Application App 20150270108 - Sun; Jennifer ;   et al. | 2015-09-24 |
Ceramic coated article and process for applying ceramic coating Grant 9,090,046 - Sun , et al. July 28, 2 | 2015-07-28 |
Rare-earth Oxide Based Monolithic Chamber Material App 20150133285 - Sun; Jennifer Y. ;   et al. | 2015-05-14 |
Plasma Spray Coating Enhancement Using Plasma Flame Heat Treatment App 20150075714 - Sun; Jennifer Y. ;   et al. | 2015-03-19 |
Coating Architecture For Plasma Sprayed Chamber Components App 20150079370 - Sun; Jennifer Y. ;   et al. | 2015-03-19 |
Anodization Architecture For Electro-plate Adhesion App 20150064450 - Sun; Jennifer Y. ;   et al. | 2015-03-05 |
Ion Assisted Deposition For Rare-earth Oxide Based Thin Film Coatings On Process Rings App 20150024155 - Sun; Jennifer Y. ;   et al. | 2015-01-22 |
Ion Assisted Deposition For Rare-earth Oxide Based Coatings On Lids And Nozzles App 20150021324 - Sun; Jennifer Y. ;   et al. | 2015-01-22 |
Plasma Erosion Resistant Rare-earth Oxide Based Thin Film Coatings App 20140377504 - Sun; Jennifer Y. ;   et al. | 2014-12-25 |
Rare-earth Oxide Based Erosion Resistant Coatings For Semiconductor Application App 20140363596 - Sun; Jennifer Y. ;   et al. | 2014-12-11 |
Substrate Support Assembly Having A Plasma Resistant Protective Layer App 20140154465 - Sun; Jennifer Y. ;   et al. | 2014-06-05 |
Innovative Top-coat Approach For Advanced Device On-wafer Particle Performance App 20140030533 - Sun; Jennifer Y. ;   et al. | 2014-01-30 |
Plasma Resistant Ceramic Coated Conductive Article App 20130284373 - Sun; Jennifer Y. ;   et al. | 2013-10-31 |
Plasma Spray Coating Process Enhancement For Critical Chamber Components App 20130288037 - Sun; Jennifer Y. ;   et al. | 2013-10-31 |
Ceramic Coated Article And Process For Applying Ceramic Coating App 20130273327 - Sun; Jennifer Y. ;   et al. | 2013-10-17 |
Heat Treated Ceramic Substrate Having Ceramic Coating And Heat Treatment For Coated Ceramics App 20130216821 - Sun; Jennifer Y. ;   et al. | 2013-08-22 |