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Patent applications and USPTO patent grants for Kang; Tung Yaw.The latest application filed is for "photomask cleaning using vacuum ultraviolet (vuv) light cleaning".
Patent | Date |
---|---|
Photomask cleaning using vacuum ultraviolet (VUV) light cleaning App 20070012335 - Chang; Hsiao Chih ;   et al. | 2007-01-18 |
Photomask cleaning using vacuum ultraviolet (VUV) light cleaning App 20070012336 - Su; Yih-Chen ;   et al. | 2007-01-18 |
Method for repair of photomasks Grant 7,097,948 - Ko , et al. August 29, 2 | 2006-08-29 |
Method for repair of photomasks App 20050045584 - Ko, Wu Hung ;   et al. | 2005-03-03 |
Utilizing vacuum ultraviolet (VUV) exposure to remove halos of carbon deposition in clear reticle repair Grant 6,627,363 - Wen , et al. September 30, 2 | 2003-09-30 |
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