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Patent applications and USPTO patent grants for Kang; Songyun.The latest application filed is for "etching method, etching apparatus, and ring member".
Patent | Date |
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Etching method, etching apparatus, and ring member Grant 9,441,292 - Suzuki , et al. September 13, 2 | 2016-09-13 |
Plasma processing apparatus, plasma processing method and storage medium Grant 9,252,001 - Sawada , et al. February 2, 2 | 2016-02-02 |
Etching Method, Etching Apparatus, And Ring Member App 20150206763 - Suzuki; Ayuta ;   et al. | 2015-07-23 |
Etching method, etching apparatus, and ring member Grant 8,945,413 - Suzuki , et al. February 3, 2 | 2015-02-03 |
Plasma Processing Apparatus, Plasma Processing Method and Storage Mediuim App 20140138356 - Sawada; Ikuo ;   et al. | 2014-05-22 |
Plasma processing apparatus, plasma processing method and storage medium Grant 8,636,871 - Sawada , et al. January 28, 2 | 2014-01-28 |
Etching Method, Etching Apparatus, And Ring Member App 20130186858 - SUZUKI; Ayuta ;   et al. | 2013-07-25 |
Plasma processing apparatus and method Grant 8,419,960 - Sawada , et al. April 16, 2 | 2013-04-16 |
Plasma Processing Apparatus App 20110240222 - Sawada; Ikuo ;   et al. | 2011-10-06 |
Plasma Processing Apparatus And Method App 20110174778 - Sawada; Ikuo ;   et al. | 2011-07-21 |
Plasma Processing Apparatus App 20100307684 - Ota; Ryosaku ;   et al. | 2010-12-09 |
Plasma Processing Apparatus, Plasma Processing Method And Storage Medium App 20100006543 - Sawada; Ikuo ;   et al. | 2010-01-14 |
Film Forming Method and Film Forming Apparatus App 20080311313 - Kobayashi; Yasuo ;   et al. | 2008-12-18 |
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