Kang; Michael S.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kang; Michael S..The latest application filed is for "edge ring assembly for plasma etching chambers".
- Kang; Michael S. - San Ramon CA
- Kang; Michael S. - San Francisco CA
| Patent | Date |
|---|---|
| Replaceable upper chamber section of plasma processing apparatus Grant 9,613,834 - Sharpless , et al. April 4, 2 | 2017-04-04 |
| Edge Ring Assembly For Plasma Etching Chambers App 20140367047 - Kang; Michael S. ; et al. | 2014-12-18 |
| Bare aluminum baffles for resist stripping chambers Grant 8,859,432 - Egley , et al. October 14, 2 | 2014-10-14 |
| Edge ring assembly for plasma etching chambers Grant 8,845,856 - Kang , et al. September 30, 2 | 2014-09-30 |
| Bare Aluminum Baffles For Resist Stripping Chambers App 20130056022 - Egley; Fred D. ; et al. | 2013-03-07 |
| Bare aluminum baffles for resist stripping chambers Grant 8,313,635 - Egley , et al. November 20, 2 | 2012-11-20 |
| Edge Ring Assembly For Plasma Etching Chambers App 20110126984 - Kang; Michael S. ; et al. | 2011-06-02 |
| Bare Aluminum Baffles For Resist Stripping Chambers App 20100319813 - Egley; Fred D. ; et al. | 2010-12-23 |
| Bare aluminum baffles for resist stripping chambers Grant 7,811,409 - Egley , et al. October 12, 2 | 2010-10-12 |
| Replaceable Upper Chamber Section Of Plasma Processing Apparatus App 20100243164 - Sharpless; Leonard J. ; et al. | 2010-09-30 |
| Bare aluminum baffles for resist stripping chambers App 20080178906 - Egley; Fred D. ; et al. | 2008-07-31 |
| Bare aluminum baffles for resist stripping chambers App 20050284573 - Egley, Fred D. ; et al. | 2005-12-29 |
uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.
While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.
All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.
| 