Patent | Date |
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Substrate Holding Apparatus and Method for Shape Metrology App 20220143786 - Kang; Hoyoung ;   et al. | 2022-05-12 |
Fast imprint lithography Grant 11,314,166 - Kang April 26, 2 | 2022-04-26 |
Substrate holding apparatus and method for shape metrology Grant 11,247,309 - Kang , et al. February 15, 2 | 2022-02-15 |
Emergency escape apparatus for a building Grant 11,193,314 - Kang December 7, 2 | 2021-12-07 |
Cyclic Self-Limiting Etch Process App 20210305060 - Schepis; Anthony R. ;   et al. | 2021-09-30 |
Systems and methods for inhibiting detectivity, metal particle contamination, and film growth on wafers Grant 11,043,378 - Lemley , et al. June 22, 2 | 2021-06-22 |
Fast Imprint Lithography App 20210132494 - Kang; Hoyoung | 2021-05-06 |
Fast imprint lithography Grant 10,890,843 - Kang January 12, 2 | 2021-01-12 |
Aptamer Template And Method For Preparing Aptamer By Using Same App 20200332296 - KANG; Hoyoung ;   et al. | 2020-10-22 |
Back-side friction reduction of a substrate Grant 10,784,100 - Kang Sept | 2020-09-22 |
Replacement Buried Power Rail In Backside Power Delivery App 20200266169 - KANG; Hoyoung ;   et al. | 2020-08-20 |
Methods and systems for coating a substrate with a fluid Grant 10,707,070 - Kang | 2020-07-07 |
Systems And Methods For Inhibiting Defectivity, Metal Particle Contamination, And Film Growth On Wafers App 20200152453 - LEMLEY; Corey ;   et al. | 2020-05-14 |
Method For Globally Adjusting Spacer Critical Dimension Using Photo-active Self-assembled Monolayer App 20200103755 - FARRELL; Richard ;   et al. | 2020-04-02 |
Method And System For Prevention Of Metal Contamination By Using A Self-assembled Monolayer Coating App 20200073244 - Kang; Hoyoung ;   et al. | 2020-03-05 |
Method of liquid filter wetting Grant 10,525,416 - Kang , et al. J | 2020-01-07 |
Back-side friction reduction of a substrate Grant 10,504,715 - Kang Dec | 2019-12-10 |
Emergency Escape Apparatus For A Building App 20190338570 - KANG; Hoyoung | 2019-11-07 |
Substrate Holding Apparatus and Method for Shape Metrology App 20190283218 - Kang; Hoyoung ;   et al. | 2019-09-19 |
Methods And Systems For Coating A Substrate With A Fluid App 20190103268 - Kang; Hoyoung | 2019-04-04 |
Fast Imprint Lithography App 20190033711 - Kang; Hoyoung | 2019-01-31 |
System And Method For Backside Deposition Of A Substrate App 20190035646 - Nasman; Ronald ;   et al. | 2019-01-31 |
Method And System For Forming Memory Fin Patterns App 20190027481 - Kang; Hoyoung ;   et al. | 2019-01-24 |
Method Of Liquid Filter Wetting App 20180333680 - Kang; Hoyoung ;   et al. | 2018-11-22 |
Method and system for forming memory fin patterns Grant 10,115,726 - Kang , et al. October 30, 2 | 2018-10-30 |
Selective metal oxide deposition using a self-assembled monolayer surface pretreatment Grant 10,068,764 - Tapily , et al. September 4, 2 | 2018-09-04 |
Back-side Friction Reduction Of A Substrate App 20180082833 - Kang; Hoyoung | 2018-03-22 |
Selective Metal Oxide Deposition Using A Self-assembled Monolayer Surface Pretreatment App 20180076027 - Tapily; Kandabara N. ;   et al. | 2018-03-15 |
Back-side Friction Reduction Of A Substrate App 20180025899 - KANG; Hoyoung | 2018-01-25 |
Method And System For Forming Memory Fin Patterns App 20170221902 - Kang; Hoyoung | 2017-08-03 |
Method of improving line roughness in substrate processing Grant 9,508,557 - Kang November 29, 2 | 2016-11-29 |
Method of forming a memory capacitor structure using a self-assembly pattern Grant 9,385,129 - Kang July 5, 2 | 2016-07-05 |
Method Of Improving Line Roughness In Substrate Processing App 20160148812 - Kang; Hoyoung | 2016-05-26 |
Method Of Forming A Memory Capacitor Structure Using A Self-assembly Pattern App 20160141290 - Kang; Hoyoung | 2016-05-19 |
Switchably Coupled Digit Line Segments In A Memory Device App 20140313810 - Hwang; Sangmin ;   et al. | 2014-10-23 |
Method to reduce PEB sensitivity of resist Grant 7,071,124 - Kallingal , et al. July 4, 2 | 2006-07-04 |