Patent | Date |
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Sputtering apparatus Grant 9,034,156 - Yang , et al. May 19, 2 | 2015-05-19 |
Thin Film Transistor, Method Of Fabricating The Same, And Organic Light Emitting Diode Display Device Including The Same App 20140363936 - Park; Byoung-Keon ;   et al. | 2014-12-11 |
Device and method for fabricating display device Grant 8,899,174 - Jang , et al. December 2, 2 | 2014-12-02 |
Deposition amount measuring apparatus, depositing apparatus including the same, and method for manufacturing light emitting display Grant 8,889,214 - Kim , et al. November 18, 2 | 2014-11-18 |
Magnetron unit moving apparatus for preventing magnetization and magnetron sputtering equipment having the same Grant 8,882,976 - Chung , et al. November 11, 2 | 2014-11-11 |
Canister For Deposition Apparatus, And Deposition Apparatus And Method Using The Same App 20140308445 - Na; Heung-Yeol ;   et al. | 2014-10-16 |
Heating unit and substrate processing apparatus having the same Grant 8,815,016 - Hong , et al. August 26, 2 | 2014-08-26 |
Substrate processing apparatus Grant 8,771,420 - Na , et al. July 8, 2 | 2014-07-08 |
Deposition Amount Measuring Apparatus, Depositing Apparatus Including The Same, And Method For Manufacturing Light Emitting Display App 20140127833 - KIM; Kyung-Soo ;   et al. | 2014-05-08 |
System for sputtering and method thereof Grant 8,658,002 - Kang , et al. February 25, 2 | 2014-02-25 |
Method of forming polycrystalline silicon layer and atomic layer deposition apparatus used for the same Grant 8,546,248 - Chung , et al. October 1, 2 | 2013-10-01 |
Atomic layer deposition apparatus and method of fabricating atomic layer using the same Grant 8,486,195 - Na , et al. July 16, 2 | 2013-07-16 |
Source Gas Supply Unit, And Deposition Apparatus And Method Using The Same App 20130081700 - HONG; Jong-Won ;   et al. | 2013-04-04 |
Apparatus for thermally processing substrate Grant 8,373,097 - Na , et al. February 12, 2 | 2013-02-12 |
Driving shaft of effusion cell for deposition system and deposition system having the same Grant 8,366,832 - Jung , et al. February 5, 2 | 2013-02-05 |
Source gas supply unit, and deposition apparatus and method using the same Grant 8,343,281 - Hong , et al. January 1, 2 | 2013-01-01 |
Apparatus for Processing Substrate App 20120000425 - Park; Byoung-Keon ;   et al. | 2012-01-05 |
Canister For Deposition Apparatus And Deposition Apparatus Using Same App 20120000986 - JEONG; Min-Jae ;   et al. | 2012-01-05 |
System for Sputtering and Method Thereof App 20110272275 - Kang; Eu-Gene ;   et al. | 2011-11-10 |
Method of forming polycrystalline silicon layer and atomic layer deposition apparatus used for the same Grant 8,048,783 - Chung , et al. November 1, 2 | 2011-11-01 |
Method Of Forming Polycrystalline Silicon Layer And Atomic Layer Deposition Apparatus Used For The Same App 20110263107 - CHUNG; Yun-Mo ;   et al. | 2011-10-27 |
Device And Method For Fabricating Display Device App 20110189380 - Jang; Won-Hyouk ;   et al. | 2011-08-04 |
Sputtering Apparatus App 20110120859 - Yang; Tae-Hoon ;   et al. | 2011-05-26 |
Heating Unit And Substrate Processing Apparatus Having The Same App 20110107970 - HONG; Jong-Won ;   et al. | 2011-05-12 |
Apparatus For Thermally Processing Substrate App 20110100973 - NA; Heung-Yeol ;   et al. | 2011-05-05 |
Sputtering Apparatus App 20110083960 - YANG; TAE-HOON ;   et al. | 2011-04-14 |
Source Gas Supply Unit, And Deposition Apparatus And Method Using The Same App 20110070360 - Hong; Jong-Won ;   et al. | 2011-03-24 |
Metal Capturing Apparatus And Atomic Layer Deposition Apparatus Having The Same App 20110041767 - Na; Heung-Yeol ;   et al. | 2011-02-24 |
Canister For Deposition Apparatus, And Deposition Apparatus And Method Using The Same App 20110008540 - Na; Heung-Yeol ;   et al. | 2011-01-13 |
Method Of Forming Polycrystalline Silicon Layer And Atomic Layer Deposition Apparatus Used For The Same App 20100227458 - CHUNG; Yun-Mo ;   et al. | 2010-09-09 |
Method Of Forming Polycrystalline Silicon Layer App 20100227443 - LEE; Kil-Won ;   et al. | 2010-09-09 |
Atomic Layer Deposition Apparatus And Method Of Fabricating Atomic Layer Using The Same App 20100227060 - Na; Heung-Yeol ;   et al. | 2010-09-09 |
Thin Film Transistor, Method Of Fabricating The Same, And Organic Light Emitting Diode Display Device Including The Same App 20100224883 - PARK; Byoung-Keon ;   et al. | 2010-09-09 |
Method of forming shadow mask pattern Grant 7,765,669 - Kim , et al. August 3, 2 | 2010-08-03 |
Apparatus for aligning a tray and tray holder Grant 7,744,328 - Jung , et al. June 29, 2 | 2010-06-29 |
In-line Annealing Apparatus And Method Of Annealing Substrate Using The Same App 20100040991 - CHUNG; Yun-Mo ;   et al. | 2010-02-18 |
Magnetron Unit Moving Apparatus For Preventing Magnetization And Magnetron Sputtering Equipment Having The Same App 20100006424 - Chung; Yun-Mo ;   et al. | 2010-01-14 |
Magnetic Field Generation Control Unit And Magnetron Sputtering Apparatus And Method Using The Same App 20100006423 - CHUNG; Yun-Mo ;   et al. | 2010-01-14 |
Device for aligning substrate with mask and method using the same Grant 7,486,397 - Jung , et al. February 3, 2 | 2009-02-03 |
Apparatus for aligning a tray and tray holder App 20060196802 - Jung; Sung Wha ;   et al. | 2006-09-07 |
Method of forming shadow mask pattern App 20060158088 - Kim; Jin Kyoo ;   et al. | 2006-07-20 |
Driving shaft of effusion cell for deposition system and deposition system having the same App 20060144325 - Jung; Sung Wha ;   et al. | 2006-07-06 |
Device for aligning substrate with mask and method using the same App 20060146329 - Jung; Sung Wha ;   et al. | 2006-07-06 |