| Patent | Date |
|---|
SiC SUBSTRATE PRODUCTION METHOD
App 20220290324 - KANEKO; Tadaaki ; et al. | 2022-09-15 |
METHOD FOR MANUFACTURING SiC SUBSTRATE
App 20220285502 - NAGAYA; Masatake ; et al. | 2022-09-08 |
SiC SUBSTRATE, SiC EPITAXIAL SUBSTRATE, SiC INGOT AND PRODUCTION METHODS THEREOF
App 20220282395 - KANEKO; Tadaaki | 2022-09-08 |
Container Made Of Sic
App 20220259759 - Kaneko; Tadaaki ; et al. | 2022-08-18 |
Manufacturing Device For Sic Semiconductor Substrate
App 20220259760 - Kaneko; Tadaaki ; et al. | 2022-08-18 |
Method Of Manufacturing Semiconductor Substrate, Manufacturing Apparatus Therefor, And Epitaxial Growth Method
App 20220220633 - KANEKO; Tadaaki | 2022-07-14 |
Method For Manufacturing Sic Substrate, Manufacturing Device For Same, And Method For Epitaxial Growth
App 20220213615 - KANEKO; Tadaaki | 2022-07-07 |
Temperature Distribution Evaluation Method, Temperature Distribution Evaluation Device, And Soaking Range Evaluation Method
App 20220216116 - KANEKO; Tadaaki ; et al. | 2022-07-07 |
Method for producing SiC substrate provided with graphene precursor and method for surface treating SiC substrate
Grant 11,365,491 - Kaneko , et al. June 21, 2 | 2022-06-21 |
Semiconductor Substrate Manufacturing Device Applicable To Large-diameter Semiconductor Substrate
App 20220189798 - KANEKO; Tadaaki | 2022-06-16 |
Device For Manufacturing Semiconductor Substrate Comprising Temperature Gradient Inversion Means And Method For Manufacturing Semiconductor Substrate
App 20220189797 - KANEKO; Tadaaki | 2022-06-16 |
Vapour-phase epitaxial growth method, and method for producing substrate equipped with epitaxial layer
Grant 11,359,307 - Kaneko , et al. June 14, 2 | 2022-06-14 |
SiC SUBSTRATE MANUFACTURING METHOD AND MANUFACTURING DEVICE, AND METHOD FOR REDUCING WORK-AFFECTED LAYER IN SiC SUBSTRATE
App 20220181155 - KANEKO; Tadaaki ; et al. | 2022-06-09 |
METHOD AND APPARATUS FOR PRODUCING SiC SUBSTRATE
App 20220178048 - KANEKO; Tadaaki ; et al. | 2022-06-09 |
SiC EPITAXIAL SUBSTRATE MANUFACTURING METHOD AND MANUFACTURING DEVICE THEREFOR
App 20220181156 - KANEKO; Tadaaki | 2022-06-09 |
METHOD AND DEVICE FOR MANUFACTURING SiC SUBSTRATE, AND METHOD FOR REDUCING MACRO-STEP BUNCHING OF SiC SUBSTRATE
App 20220181149 - KANEKO; Tadaaki ; et al. | 2022-06-09 |
Sic Semiconductor Substrate, And, Production Method Therefor And Production Device Therefor
App 20210399095 - KANEKO; Tadaaki ; et al. | 2021-12-23 |
Sic Semiconductor Substrate, Method For Manufacturing Same, And Device For Manufacturing Same
App 20210398807 - KANEKO; Tadaaki ; et al. | 2021-12-23 |
Reference sample with inclined support base, method for evaluating scanning electron microscope, and method for evaluating SiC substrate
Grant 10,847,342 - Kaneko , et al. November 24, 2 | 2020-11-24 |
Reference Sample With Inclined Support Base, Method For Evaluating Scanning Electron Microscope, And Method For Evaluating Sic S
App 20200279716 - Kaneko; Tadaaki ; et al. | 2020-09-03 |
Reference sample with inclined support base, method for evaluating scanning electron microscope, and method for evaluating SiC substrate
Grant 10,699,873 - Kaneko , et al. | 2020-06-30 |
Surface treatment method for SiC substrate
Grant 10,665,465 - Kaneko , et al. | 2020-05-26 |
Method for manufacturing semiconductor wafer
Grant 10,508,361 - Kaneko , et al. Dec | 2019-12-17 |
Etching method for SiC substrate and holding container
Grant 10,388,536 - Torimi , et al. A | 2019-08-20 |
Reference Sample With Inclined Support Base, Method For Evaluating Scanning Electron Microscope, And Method For Evaluating Sic S
App 20190148107 - Kaneko; Tadaaki ; et al. | 2019-05-16 |
Vapour-phase Epitaxial Growth Method, And Method For Producing Substrate Equipped With Epitaxial Layer
App 20190136409 - Kaneko; Tadaaki ; et al. | 2019-05-09 |
Method For Producing Sic Substrate Provided With Graphene Precursor And Method For Surface Treating Sic Substrate
App 20190136411 - Kaneko; Tadaaki ; et al. | 2019-05-09 |
Method For Manufacturing Semiconductor Wafer
App 20180312992 - Kaneko; Tadaaki ; et al. | 2018-11-01 |
Method For Manufacturing Silicon-carbide Semiconductor Element
App 20180233358 - Kaneko; Tadaaki ; et al. | 2018-08-16 |
Nanometer standard prototype and method for manufacturing nanometer standard prototype
Grant 10,012,675 - Kaneko , et al. July 3, 2 | 2018-07-03 |
Method for treating the surface of a silicon-carbide substrate including a removal step in which a modified layer produced by polishing is removed by heating under Si vapor pressure
Grant 9,978,597 - Kaneko , et al. May 22, 2 | 2018-05-22 |
Method for manufacturing silicon-carbide semiconductor element
Grant 9,941,116 - Kaneko , et al. April 10, 2 | 2018-04-10 |
SURFACE TREATMENT METHOD FOR SiC SUBSTRATE
App 20170345672 - Kaneko; Tadaaki ; et al. | 2017-11-30 |
Etching Method For Sic Substrate And Holding Container
App 20170323797 - Torimi; Satoshi ; et al. | 2017-11-09 |
Method of manufacturing diethyl carbonate
Grant 9,656,942 - Ii , et al. May 23, 2 | 2017-05-23 |
Method For Treating Surface Of Silicon-carbide Substrate
App 20160118257 - Kaneko; Tadaaki ; et al. | 2016-04-28 |
Method For Manufacturing Silicon-carbide Semiconductor Element
App 20160111279 - Kaneko; Tadaaki ; et al. | 2016-04-21 |
Method Of Manufacturing Diethyl Carbonate
App 20150291504 - Ii; Hirofumi ; et al. | 2015-10-15 |
Semiconductor wafer manufacturing method, and semiconductor wafer
Grant 9,029,219 - Kaneko , et al. May 12, 2 | 2015-05-12 |
Semiconductor Wafer Manufacturing Method, And Semiconductor Wafer
App 20140319539 - Kaneko; Tadaaki ; et al. | 2014-10-30 |
Nanometer Standard Prototype And Method For Manufacturing Nanometer Standard Prototype
App 20140317791 - Kaneko; Tadaaki ; et al. | 2014-10-23 |
Tantalum Carbide, Method For Producing Tantalum Carbide, Tantalum Carbide Wiring And Tantalum Carbide Electrode
App 20120175639 - Kaneko; Tadaaki ; et al. | 2012-07-12 |
Tantalum carbide, method for producing tantalum carbide, tantalum carbide wiring and tantalum carbide electrode
Grant 8,211,244 - Kaneko , et al. July 3, 2 | 2012-07-03 |
Method of mask forming and method of three-dimensional microfabrication
Grant 8,110,322 - Sano , et al. February 7, 2 | 2012-02-07 |
Tantalum Carbide, Method For Producing Tantalum Carbide, Tantalum Carbide Wiring And Tantalum Carbide Electrode
App 20100284895 - KANEKO; Tadaaki ; et al. | 2010-11-11 |
Method Of Mask Forming And Method Of Three-dimensional Microfabrication
App 20100143828 - Sano; Naokatsu ; et al. | 2010-06-10 |
Electron beam microprocessing method
Grant 7,704,861 - Kaneko , et al. April 27, 2 | 2010-04-27 |
Method for producing single crystal silicon carbide
Grant 7,637,998 - Kaneko , et al. December 29, 2 | 2009-12-29 |
Single crystal silicon carbide and method for producing the same
Grant 7,527,869 - Kaneko , et al. May 5, 2 | 2009-05-05 |
Method For Producing Single Crystal Silicon Carbide
App 20090038538 - Kaneko; Tadaaki ; et al. | 2009-02-12 |
Method of three-dimensional microfabrication and high-density three-dimentional fine structure
Grant 7,432,176 - Kaneko , et al. October 7, 2 | 2008-10-07 |
Method of Three-Dimensional Microfabrication and High-Density Three-Dimensional Fine Structure
App 20070232029 - Kaneko; Tadaaki ; et al. | 2007-10-04 |
Electron beam microprocessing method
App 20070099334 - Kaneko; Tadaaki | 2007-05-03 |
Tantalum carbide, method for producing tantalum carbide, tantalum carbide wiring and tantalum carbide electrode
App 20070059501 - Kaneko; Tadaaki ; et al. | 2007-03-15 |
Method of heat treatment and heat treatment apparatus
App 20060249073 - Asaoka; Yasushi ; et al. | 2006-11-09 |
Single crystal silicon carbide and method for producing the same
App 20040237879 - Kaneko, Tadaaki ; et al. | 2004-12-02 |
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