Patent | Date |
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Substrate Cleaning Method, Substrate Cleaning System, And Memory Medium App 20220277968 - KANEKO; Miyako ;   et al. | 2022-09-01 |
Substrate cleaning method, substrate cleaning system, and memory medium Grant 11,367,630 - Kaneko , et al. June 21, 2 | 2022-06-21 |
Substrate cleaning apparatus, substrate cleaning system, substrate cleaning method and memory medium Grant 10,998,183 - Kaneko , et al. May 4, 2 | 2021-05-04 |
Substrate Cleaning Method, Substrate Cleaning System, And Memory Medium App 20200395230 - KANEKO; Miyako ;   et al. | 2020-12-17 |
Substrate processing method Grant 10,835,908 - Kaneko , et al. November 17, 2 | 2020-11-17 |
Film-forming method and film-forming apparatus Grant 10,811,264 - Wagatsuma , et al. October 20, 2 | 2020-10-20 |
Substrate cleaning method, substrate cleaning system, and memory medium Grant 10,811,283 - Kaneko , et al. October 20, 2 | 2020-10-20 |
Method of forming titanium oxide film and method of forming hard mask Grant 10,535,528 - Shindo , et al. Ja | 2020-01-14 |
Film forming method, film forming system and surface processing method Grant 10,392,698 - Kaneko , et al. A | 2019-08-27 |
Film-Forming Method and Film-Forming Apparatus App 20190067015 - WAGATSUMA; Yuichiro ;   et al. | 2019-02-28 |
Substrate Processing Method, Substrate Processing System And Memory Medium App 20190030558 - KANEKO; Miyako ;   et al. | 2019-01-31 |
Substrate Processing Method App 20180264492 - Kaneko; Miyako ;   et al. | 2018-09-20 |
Substrate cleaning method, substrate cleaning system, and memory medium Grant 10,043,652 - Kaneko , et al. August 7, 2 | 2018-08-07 |
Substrate Cleaning Method, Substrate Cleaning System, And Memory Medium App 20180182610 - KANEKO; Miyako ;   et al. | 2018-06-28 |
Substrate cleaning method, substrate cleaning system, and memory medium Grant 9,953,826 - Kaneko , et al. April 24, 2 | 2018-04-24 |
Method Of Forming Titanium Oxide Film And Method Of Forming Hard Mask App 20180108534 - SHINDO; Naoki ;   et al. | 2018-04-19 |
Analysis Method For Silanol Group Of Substrate Surface App 20180047647 - Kaneko; Miyako ;   et al. | 2018-02-15 |
Film Forming Method, Film Forming System And Surface Processing Method App 20180037989 - Kaneko; Miyako ;   et al. | 2018-02-08 |
Substrate cleaning system Grant 9,799,538 - Kaneko , et al. October 24, 2 | 2017-10-24 |
Substrate cleaning method and substrate cleaning system Grant 9,443,712 - Kaneko , et al. September 13, 2 | 2016-09-13 |
Substrate Cleaning Apparatus, Substrate Cleaning System, Substrate Cleaning Method And Memory Medium App 20160163534 - KANEKO; Miyako ;   et al. | 2016-06-09 |
Substrate Cleaning Method, Substrate Cleaning System, And Memory Medium App 20150128994 - KANEKO; Miyako ;   et al. | 2015-05-14 |
Substrate Cleaning Method, Substrate Cleaning System, And Memory Medium App 20150128995 - KANEKO; Miyako ;   et al. | 2015-05-14 |
Substrate Processing Method, Substrate Processing Apparatus And Storage Medium App 20150064911 - Kaneko; Miyako ;   et al. | 2015-03-05 |
Substrate Processing Method, Substrate Processing System And Memory Medium App 20150064910 - Kaneko; Miyako ;   et al. | 2015-03-05 |
Etching method, etching apparatus and storage medium Grant 8,969,218 - Watanabe , et al. March 3, 2 | 2015-03-03 |
Substrate Cleaning Method And Substrate Cleaning System App 20140144464 - Kaneko; Miyako ;   et al. | 2014-05-29 |
Substrate Cleaning System, Substrate Cleaning Method And Memory Medium App 20140144465 - KANEKO; Miyako ;   et al. | 2014-05-29 |
Substrate Cleaning Apparatus, Substrate Cleaning System, Substrate Cleaning Method And Memory Medium App 20140041685 - KANEKO; Miyako ;   et al. | 2014-02-13 |
Etching Method, Etching Apparatus And Storage Medium App 20120264308 - WATANABE; Tsukasa ;   et al. | 2012-10-18 |
Liquid Processing Method, Liquid Processing Apparatus And Storage Medium Storing Program For Performing Liquid Processing Method App 20120125368 - KANEKO; Miyako ;   et al. | 2012-05-24 |