| Patent | Date |
|---|
Tem-based Metrology Method And System
App 20220310356 - MACHAVARIANI; VLADIMIR ; et al. | 2022-09-29 |
Metrology method and system
Grant 11,450,541 - Machavariani , et al. September 20, 2 | 2022-09-20 |
Method and system for providing a quality metric for improved process control
Grant 11,372,340 - Kandel , et al. June 28, 2 | 2022-06-28 |
TEM-based metrology method and system
Grant 11,309,162 - Machavariani , et al. April 19, 2 | 2022-04-19 |
Metrology And Process Control For Semiconductor Manufacturing
App 20220036218 - ROTHSTEIN; EITAN ; et al. | 2022-02-03 |
Metrology and process control for semiconductor manufacturing
Grant 11,093,840 - Rothstein , et al. August 17, 2 | 2021-08-17 |
Tem-based Metrology Method And System
App 20210217581 - MACHAVARIANI; VLADIMIR ; et al. | 2021-07-15 |
Device metrology targets and methods
Grant 11,054,752 - Amit , et al. July 6, 2 | 2021-07-06 |
Metrology And Process Control For Semiconductor Manufacturing
App 20210150387 - ROTHSTEIN; EITAN ; et al. | 2021-05-20 |
TEM-based metrology method and system
Grant 10,916,404 - Machavariani , et al. February 9, 2 | 2021-02-09 |
Method of analyzing and utilizing landscapes to reduce or eliminate inaccuracy in overlay optical metrology
Grant 10,831,108 - Marciano , et al. November 10, 2 | 2020-11-10 |
Metrology Method And System
App 20200294829 - MACHAVARIANI; VLADIMIR ; et al. | 2020-09-17 |
Metrology using overlay and yield critical patterns
Grant 10,685,165 - Kandel , et al. | 2020-06-16 |
Application-to-application device ID sharing
Grant 10,621,337 - Sharabani , et al. | 2020-04-14 |
Selective traffic blockage
Grant 10,594,736 - Amit , et al. | 2020-03-17 |
Symmetric target design in scatterometry overlay metrology
Grant 10,591,406 - Bringoltz , et al. | 2020-03-17 |
Selective traffic blockage
Grant 10,594,732 - Amit , et al. | 2020-03-17 |
Device metrology targets and methods
Grant 10,571,811 - Amit , et al. Feb | 2020-02-25 |
Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology
Grant 10,533,940 - Manassen , et al. Ja | 2020-01-14 |
Multi-layer overlay metrology target and complimentary overlay metrology measurement systems
Grant 10,527,954 - Kandel , et al. J | 2020-01-07 |
Tem-based Metrology Method And System
App 20190393016 - MACHAVARIANI; VLADIMIR ; et al. | 2019-12-26 |
Structured illumination for contrast enhancement in overlay metrology
Grant 10,274,425 - Seligson , et al. | 2019-04-30 |
Near field metrology
Grant 10,261,014 - Sapiens , et al. | 2019-04-16 |
Scanning in Angle-Resolved Reflectometry and Algorithmically Eliminating Diffraction from Optical Metrology
App 20190094142 - Manassen; Amnon ; et al. | 2019-03-28 |
Reflection symmetric scatterometry overlay targets and methods
Grant 10,234,280 - Bringoltz , et al. | 2019-03-19 |
Achieving a small pattern placement error in metrology targets
Grant 10,228,320 - Levinski , et al. | 2019-03-12 |
Systems for providing illumination in optical metrology
Grant 10,203,247 - Brady , et al. Feb | 2019-02-12 |
Device Metrology Targets And Methods
App 20190004438 - Amit; Eran ; et al. | 2019-01-03 |
Compound objectives for imaging and scatterometry overlay
Grant 10,139,528 - Seligson , et al. Nov | 2018-11-27 |
Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology
Grant 10,126,238 - Manassen , et al. November 13, 2 | 2018-11-13 |
Self-moire target design principles for measuring unresolved device-like pitches
Grant 10,101,592 - Levinski , et al. October 16, 2 | 2018-10-16 |
Multi-Layer Overlay Metrology Target and Complimentary Overlay Metrology Measurement Systems
App 20180275530 - Kandel; Daniel ; et al. | 2018-09-27 |
Selective Traffic Blockage
App 20180131719 - Amit; Yair ; et al. | 2018-05-10 |
Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology
Grant 9,958,385 - Manassen , et al. May 1, 2 | 2018-05-01 |
Scanning In Angle-resolved Reflectometry And Algorithmically Eliminating Diffraction From Optical Metrology
App 20180106723 - Manassen; Amnon ; et al. | 2018-04-19 |
Focus measurements using scatterometry metrology
Grant 9,934,353 - El Kodadi , et al. April 3, 2 | 2018-04-03 |
Multi-layer overlay metrology target and complimentary overlay metrology measurement systems
Grant 9,927,718 - Kandel , et al. March 27, 2 | 2018-03-27 |
Self-Moire Target Design Principles for Measuring Unresolved Device-Like Pitches
App 20180081193 - Levinski; Vladimir ; et al. | 2018-03-22 |
Feed forward of metrology data in a metrology system
Grant 9,903,711 - Levy , et al. February 27, 2 | 2018-02-27 |
On-device metrology
Grant 9,875,946 - Shchegrov , et al. January 23, 2 | 2018-01-23 |
Reducing algorithmic inaccuracy in scatterometry overlay metrology
Grant 9,869,543 - Bringoltz , et al. January 16, 2 | 2018-01-16 |
Self-moire target design principles for measuring unresolved device-like pitches
Grant 9,864,209 - Levinski , et al. January 9, 2 | 2018-01-09 |
Decreasing inaccuracy due to non-periodic effects on scatterometric signals
Grant 9,851,300 - Bringoltz , et al. December 26, 2 | 2017-12-26 |
Approach for model calibration used for focus and dose measurement
Grant 9,841,689 - Levinski , et al. December 12, 2 | 2017-12-12 |
Structured Illumination for Contrast Enhancement in Overlay Metrology
App 20170307523 - Seligson; Joel ; et al. | 2017-10-26 |
Apodization for pupil imaging scatterometry
Grant 9,784,987 - Hill , et al. October 10, 2 | 2017-10-10 |
Symmetric target design in scatterometry overlay metrology
Grant 9,739,702 - Bringoltz , et al. August 22, 2 | 2017-08-22 |
Target element types for process parameter metrology
Grant 9,678,421 - Levinski , et al. June 13, 2 | 2017-06-13 |
Systems for Providing Illumination in Optical Metrology
App 20170146399 - Brady; Gregory R. ; et al. | 2017-05-25 |
Self-Moire Target Design Principles for Measuring Unresolved Device-Like Pitches
App 20170146810 - Levinski; Vladimir ; et al. | 2017-05-25 |
Structured illumination for contrast enhancement in overlay metrology
Grant 9,645,079 - Seligson , et al. May 9, 2 | 2017-05-09 |
Method and system for providing process tool correctables using an optimized sampling scheme with smart interpolation
Grant 9,620,426 - Izikson , et al. April 11, 2 | 2017-04-11 |
Phase characterization of targets
Grant 9,581,430 - Manassen , et al. February 28, 2 | 2017-02-28 |
Metrology Target Design For Tilted Device Designs
App 20170023358 - Lee; Myungjun ; et al. | 2017-01-26 |
Systems for providing illumination in optical metrology
Grant 9,512,985 - Brady , et al. December 6, 2 | 2016-12-06 |
Methods Of Analyzing And Utilizing Landscapes To Reduce Or Eliminate Inaccuracy In Overlay Optical Metrology
App 20160313658 - Marciano; Tal ; et al. | 2016-10-27 |
Feed Forward of Metrology Data in a Metrology System
App 20160290796 - Levy; Ady ; et al. | 2016-10-06 |
Method and system for providing a target design displaying high sensitivity to scanner focus change
Grant 9,454,072 - Levinski , et al. September 27, 2 | 2016-09-27 |
Device Metrology Targets And Methods
App 20160266505 - Amit; Eran ; et al. | 2016-09-15 |
Metrology Using Overlay And Yield Critical Patterns
App 20160253450 - Kandel; Daniel ; et al. | 2016-09-01 |
Symmetric Target Design In Scatterometry Overlay Metrology
App 20160216197 - Bringoltz; Barak ; et al. | 2016-07-28 |
Focus Measurements Using Scatterometry Metrology
App 20160103946 - El Kodadi; Mohamed ; et al. | 2016-04-14 |
Angle-resolved antisymmetric scatterometry
Grant 9,255,895 - Kandel , et al. February 9, 2 | 2016-02-09 |
Structured Illumination for Contrast Enhancement in Overlay Metrology
App 20160003735 - Seligson; Joel ; et al. | 2016-01-07 |
Apodization for Pupil Imaging Scatterometry
App 20150316783 - Hill; Andrew V. ; et al. | 2015-11-05 |
Target Element Types For Process Parameter Metrology
App 20150309402 - LEVINSKI; Vladimir ; et al. | 2015-10-29 |
Optics symmetrization for metrology
Grant 9,164,397 - Manassen , et al. October 20, 2 | 2015-10-20 |
Reducing Algorithmic Inaccuracy In Scatterometry Overlay Metrology
App 20150233705 - Bringoltz; Barak ; et al. | 2015-08-20 |
Structured illumination for contrast enhancement in overlay metrology
Grant 9,104,120 - Seligson , et al. August 11, 2 | 2015-08-11 |
Reflection Symmetric Scatterometry Overlay Targets And Methods
App 20150219449 - Bringoltz; Barak ; et al. | 2015-08-06 |
Device correlated metrology (DCM) for OVL with embedded SEM structure overlay targets
Grant 9,093,458 - Amir , et al. July 28, 2 | 2015-07-28 |
Apodization for pupil imaging scatterometry
Grant 9,091,650 - Hill , et al. July 28, 2 | 2015-07-28 |
Symmetric Target Design In Scatterometry Overlay Metrology
App 20150204664 - Bringoltz; Barak ; et al. | 2015-07-23 |
Near Field Metrology
App 20150198524 - Sapiens; Noam ; et al. | 2015-07-16 |
Metrology systems and methods
Grant 9,080,971 - Kandel , et al. July 14, 2 | 2015-07-14 |
Angle-Resolved Antisymmetric Scatterometry
App 20150177162 - Kandel; Daniel ; et al. | 2015-06-25 |
Scanning In Angle-resolved Reflectometry And Algorithmically Eliminating Diffraction From Optical Metrology
App 20150116717 - MANASSEN; Amnon ; et al. | 2015-04-30 |
Metrology Systems and Methods
App 20150036142 - Kandel; Daniel ; et al. | 2015-02-05 |
Device-like scatterometry overlay targets
Grant 8,913,237 - Levinski , et al. December 16, 2 | 2014-12-16 |
Flexible scatterometry metrology system and method
Grant 8,908,175 - Kandel , et al. December 9, 2 | 2014-12-09 |
Discrete polarization scatterometry
Grant 8,896,832 - Hill , et al. November 25, 2 | 2014-11-25 |
Metrology systems and methods
Grant 8,873,054 - Kandel , et al. October 28, 2 | 2014-10-28 |
On-device Metrology
App 20140316730 - Shchegrov; Andrei V. ; et al. | 2014-10-23 |
Angle-resolved antisymmetric scatterometry
Grant 8,848,186 - Kandel , et al. September 30, 2 | 2014-09-30 |
Systems for Providing Illumination in Optical Metrology
App 20140240951 - Brady; Gregory R. ; et al. | 2014-08-28 |
Apodization for Pupil Imaging Scatterometry
App 20140146322 - Hill; Andrew V. ; et al. | 2014-05-29 |
Method and System for Providing a Target Design Displaying High Sensitivity to Scanner Focus Change
App 20140141536 - Levinski; Vladimir ; et al. | 2014-05-22 |
Phase Characterization Of Targets
App 20140111791 - Manassen; Amnon ; et al. | 2014-04-24 |
Device Correlated Metrology (dcm) For Ovl With Embedded Sem Structure Overlay Targets
App 20140065736 - Amir; Nuriel ; et al. | 2014-03-06 |
Advanced process control optimization
Grant 8,655,469 - Choi , et al. February 18, 2 | 2014-02-18 |
Device-like Scatterometry Overlay Targets
App 20130342831 - Levinski; Vladimir ; et al. | 2013-12-26 |
Overlay metrology by pupil phase analysis
Grant 8,582,114 - Manassen , et al. November 12, 2 | 2013-11-12 |
Metrology Systems and Methods
App 20130229661 - Kandel; Daniel ; et al. | 2013-09-05 |
Metrology systems and methods
Grant 8,441,639 - Kandel , et al. May 14, 2 | 2013-05-14 |
Overlay Metrology By Pupil Phase Analysis
App 20130044331 - Manassen; Amnon ; et al. | 2013-02-21 |
Method And System For Providing A Quality Metric For Improved Process Control
App 20130035888 - Kandel; Daniel ; et al. | 2013-02-07 |
Structured Illumination For Contrast Enhancement In Overlay Metrology
App 20120206729 - Seligson; Joel ; et al. | 2012-08-16 |
Scatterometry metrology target design optimization
Grant 8,214,771 - Adel , et al. July 3, 2 | 2012-07-03 |
Angle-resolved Antisymmetric Scatterometry
App 20120120396 - Kandel; Daniel ; et al. | 2012-05-17 |
Substrate matrix to decouple tool and process effects
Grant 8,142,966 - Izikson , et al. March 27, 2 | 2012-03-27 |
Multi-layer Overlay Metrology Target And Complimentary Overlay Metrology Measurement Systems
App 20120033215 - Kandel; Daniel ; et al. | 2012-02-09 |
Optics Symmetrization For Metrology
App 20120033226 - Manassen; Amnon ; et al. | 2012-02-09 |
Advanced Process Control Optimization
App 20120022679 - Choi; DongSub ; et al. | 2012-01-26 |
Discrete Polarization Scatterometry
App 20110310388 - Hill; Andrew V. ; et al. | 2011-12-22 |
Target design and methods for scatterometry overlay determination
Grant 8,004,679 - Levinski , et al. August 23, 2 | 2011-08-23 |
Method And System For Providing Process Tool Correctables Using An Optimized Sampling Scheme With Smart Interpolation
App 20110202298 - Izikson; Pavel ; et al. | 2011-08-18 |
Metrology Systems And Methods
App 20110069312 - Kandel; Daniel ; et al. | 2011-03-24 |
Substrate Matrix To Decouple Tool And Process Effects
App 20110051116 - Izikson; Pavel ; et al. | 2011-03-03 |
Scatterometry Metrology Target Design Optimization
App 20100175033 - Adel; Michael ; et al. | 2010-07-08 |
Target Design And Methods For Scatterometry Overlay Determination
App 20090279091 - Levinski; Vladimir ; et al. | 2009-11-12 |
Apparatus and methods for detecting overlay errors using scatterometry
Grant 7,616,313 - Kandel , et al. November 10, 2 | 2009-11-10 |
Optical gain approach for enhancement of overlay and alignment systems performance
Grant 7,602,491 - Kandel , et al. October 13, 2 | 2009-10-13 |
Order selected overlay metrology
Grant 7,528,941 - Kandel , et al. May 5, 2 | 2009-05-05 |
Methods and apparatus for designing and using micro-targets in overlay metrology
Grant 7,526,749 - Levinski , et al. April 28, 2 | 2009-04-28 |
Optical Gain Approach For Enhancement Of Overlay And Alignment Systems Performance
App 20080266561 - Kandel; Daniel ; et al. | 2008-10-30 |
Continuously varying offset mark and methods of determining overlay
Grant 7,440,105 - Adel , et al. October 21, 2 | 2008-10-21 |
Order Selected Overlay Metrology
App 20070279630 - Kandel; Daniel ; et al. | 2007-12-06 |
Apparatus and methods for detecting overlay errors using scatterometry
App 20070229829 - Kandel; Daniel ; et al. | 2007-10-04 |
Measuring overlay and profile asymmetry using symmetric and anti-symmetric scatterometry signals
Grant 7,277,172 - Kandel , et al. October 2, 2 | 2007-10-02 |
Methods and apparatus for designing and using micro-targets in overlay metrology
App 20070096094 - Levinski; Vladimir ; et al. | 2007-05-03 |
Measuring overlay and profile asymmetry using symmetric and anti-symmetric scatterometry signals
App 20060274310 - Kandel; Daniel ; et al. | 2006-12-07 |
Continuously varying offset mark and methods of determining overlay
App 20050195398 - Adel, Michael E. ; et al. | 2005-09-08 |
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