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Patent applications and USPTO patent grants for Kanayama; Tokiko.The latest application filed is for "cleaning and etching methods and their apparatuses".
Patent | Date |
---|---|
Ozone processing device Grant 7,713,378 - Kikuchi , et al. May 11, 2 | 2010-05-11 |
Cleaning method and etching method Grant 6,939,409 - Kanayama , et al. September 6, 2 | 2005-09-06 |
Cleaning and etching methods and their apparatuses Grant 6,913,653 - Kanayama , et al. July 5, 2 | 2005-07-05 |
Cleaning and etching methods and their apparatuses App 20050109733 - Kanayama, Tokiko ;   et al. | 2005-05-26 |
Ozone treatment method and ozone treatment apparatus Grant 6,867,150 - Kikuchi , et al. March 15, 2 | 2005-03-15 |
Ozone processing device App 20040250768 - Kikuchi, Tatsuo ;   et al. | 2004-12-16 |
Cleaning method and etching method App 20040108296 - Kanayama, Tokiko ;   et al. | 2004-06-10 |
Cleaning and etching methods and their apparatuses App 20040069318 - Kanayama, Tokiko ;   et al. | 2004-04-15 |
Ozone treatment method and ozone treatment apparatus App 20040040582 - Kikuchi, Tatsuo ;   et al. | 2004-03-04 |
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