KANAYA; Yuho

Patent Applications and Registrations

Patent applications and USPTO patent grants for KANAYA; Yuho.The latest application filed is for "exposure apparatus, exposure method, and method for producing device".

Company Profile

2.37.31

KANAYA; Yuho - Kumagaya-shi JP
Kanaya; Yuho - Kumagaya JP
Kanaya; Yuho - Tokyo JP
Kanaya; Yuho - Kamagaya JP
Kanaya; Yuho - Saitama-ken JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Exposure Apparatus, Exposure Method, And Method For Producing Device App 20190155168 - YASUDA; Masahiko ; et al.	2019-05-23
Exposure apparatus, exposure method, and method for producing device Grant 10,209,623 - Yasuda , et al. Feb	2019-02-19
Exposure Apparatus, Exposure Method, And Method For Producing Device App 20160313650 - YASUDA; Masahiko ; et al.	2016-10-27
Movable body system, movable body drive method, pattern formation apparatus, pattern formation method, exposure apparatus, exposure method, and device manufacturing method Grant 9,436,102 - Kanaya September 6, 2	2016-09-06
Exposure apparatus, exposure method, and method for producing device Grant 9,383,656 - Yasuda , et al. July 5, 2	2016-07-05
Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and measuring method Grant 9,304,412 - Shibazaki , et al. April 5, 2	2016-04-05
Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method with measurement device to measure movable body in Z direction Grant 9,256,140 - Kanaya February 9, 2	2016-02-09
Exposure Apparatus, Exposure Method, And Method For Producing Device App 20150227058 - YASUDA; Masahiko ; et al.	2015-08-13
Exposure apparatus, exposure method, and method for producing device Grant 9,063,438 - Yasuda , et al. June 23, 2	2015-06-23
Movable Body System, Movable Body Drive Method, Pattern Formation Apparatus, Pattern Formation Method, Exposure Apparatus, Exposure Method, And Device Manufacturing Method App 20140327899 - KANAYA; Yuho	2014-11-06
Movable body drive method and movable body drive system, pattern formation method and apparatus, and device manufacturing method Grant 8,867,022 - Shibazaki , et al. October 21, 2	2014-10-21
Movable body system, movable body drive method, pattern formation apparatus, pattern formation method, exposure apparatus, exposure method, and device manufacturing method Grant 8,817,236 - Kanaya August 26, 2	2014-08-26
Movable body drive method and movable body drive system, and pattern formation method and pattern formation apparatus Grant 8,792,086 - Kanaya July 29, 2	2014-07-29
Exposure apparatus, exposure method, and device manufacturing method Grant 8,786,829 - Kanaya July 22, 2	2014-07-22
Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method Grant 8,767,182 - Shibazaki , et al. July 1, 2	2014-07-01
Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method Grant 8,665,455 - Kanaya March 4, 2	2014-03-04
Mark Detection Method, Exposure Method And Exposure Apparatus, And Device Manufacturing Method App 20140022377 - Kanaya; Yuho	2014-01-23
Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, position control method and position control system, and device manufacturing method Grant 8,582,084 - Shibazaki , et al. November 12, 2	2013-11-12
Movable body drive method and movable body drive system, pattern formation method and pattern formation apparatus, and device manufacturing method Grant 8,547,527 - Kanaya October 1, 2	2013-10-01
Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method Grant 8,422,015 - Kanaya April 16, 2	2013-04-16
Movable Body Drive Method And Movable Body Drive System, Pattern Formation Method And Apparatus, Exposure Method And Apparatus, And Device Manufacturing Method For Continuous Position Measurement Of Moveable Body Before And After Switching Between Sensor Heads App 20120293788 - SHIBAZAKI; Yuichi ; et al.	2012-11-22
Movable Body Drive Method And Movable Body Drive System, Pattern Formation Method And Apparatus, Exposure Method And Apparatus, Position Control Method And Position Control System, And Device Manufacturing Method App 20120212726 - Shibazaki; Yuichi ; et al.	2012-08-23
Position measurement system, exposure apparatus, position measuring method, exposure method and device manufacturing method, and tool and measuring method Grant 8,243,257 - Kanaya August 14, 2	2012-08-14
Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method for continuous position measurement of movable body before and after switching between sensor heads Grant 8,237,919 - Shibazaki , et al. August 7, 2	2012-08-07
Exposure apparatus, exposure method, and device manufacturing method Grant 8,228,482 - Kanaya July 24, 2	2012-07-24
Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, measuring method, and position measurement system Grant 8,218,129 - Shibazaki , et al. July 10, 2	2012-07-10
Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, position control method and position control system, and device manufacturing method Grant 8,194,232 - Shibazaki , et al. June 5, 2	2012-06-05
Movable Body Drive Method And Movable Body Drive System, And Pattern Formation Method And Pattern Formation Apparatus App 20120127450 - Kanaya; Yuho	2012-05-24
Exposure Apparatus, Exposure Method, And Method For Producing Device App 20120120381 - YASUDA; Masahiko ; et al.	2012-05-17
Detection Device, Movable Body Apparatus, Pattern Formation Apparatus And Pattern Formation Method, Exposure Apparatus And Exposure Method, And Device Manufacturing Method App 20120086927 - KANAYA; Yuho	2012-04-12
Exposure apparatus, exposure method, and method for producing device Grant 8,130,361 - Yasuda , et al. March 6, 2	2012-03-06
Detection device, movable body apparatus, pattern formation apparatus and pattern formation method, exposure apparatus and exposure method, and device manufacturing method Grant 8,098,362 - Kanaya January 17, 2	2012-01-17
Movable body drive method and movable body drive system, and pattern formation method and pattern formation apparatus Grant 8,085,385 - Kanaya December 27, 2	2011-12-27
Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method App 20110299058 - Shibazaki; Yuichi ; et al.	2011-12-08
Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method Grant 8,023,106 - Shibazaki , et al. September 20, 2	2011-09-20
Exposure method and device manufacturing method, exposure apparatus, and program Grant 7,817,242 - Kawakubo , et al. October 19, 2	2010-10-19
Movable Body System, Movable Body Drive Method, Pattern Formation Apparatus, Pattern Formation Method, Exposure Apparatus, Exposure Method, And Device Manufacturing Method App 20090284724 - KANAYA; Yuho	2009-11-19
Exposure Apparatus, Exposure Method, And Device Manufacturing Method App 20090284717 - Kanaya; Yuho	2009-11-19
Exposure Apparatus, Exposure Method, And Device Manufacturing Method App 20090284716 - KANAYA; Yuho	2009-11-19
Movable Body Apparatus, Pattern Formation Apparatus And Exposure Apparatus, And Device Manufacturing Method App 20090122287 - KANAYA; Yuho	2009-05-14
Movable Body Apparatus, Pattern Formation Apparatus And Exposure Apparatus, And Device Manufacturing Method App 20090122286 - KANAYA; Yuho	2009-05-14
Movable Body Apparatus, Pattern Formation Apparatus And Exposure Apparatus, And Device Manufacturing Method App 20090122285 - KANAYA; Yuho	2009-05-14
Movable Body Apparatus, Pattern Formation Apparatus And Exposure Apparatus, And Device Manufacturing Method App 20090115982 - KANAYA; Yuho	2009-05-07
Movable body drive method and movable body drive system, and pattern formation method and pattern formation apparatus App 20090073405 - Kanaya; Yuho	2009-03-19
Movable Body Drive Method And Movable Body Drive System, Pattern Formation Method And Apparatus, Exposure Method And Apparatus, And Device Manufacturing Method App 20090059198 - SHIBAZAKI; Yuichi ; et al.	2009-03-05
Position Measurement System, Exposure Apparatus, Position Measurement Method, Exposure Method And Device Manufacturing Method, And Tool And Measurement Method App 20090059194 - KANAYA; Yuho	2009-03-05
Movable Body Drive Method And Movable Body Drive System, Pattern Formation Method And Apparatus, Exposure Method And Apparatus, Device Manufacturing Method, And Measuring Method App 20090051894 - SHIBAZAKI; Yuichi ; et al.	2009-02-26
Movable Body Drive Method And Movable Body Drive System, Pattern Formation Method And Apparatus, Exposure Method And Apparatus, Device Manufacturing Method, Measuring Method, And Position Measurement System App 20090051892 - SHIBAZAKI; Yuichi ; et al.	2009-02-26
Movable Body Drive Method And Movable Body Drive System, Pattern Formation Method And Apparatus, Exposure Method And Apparatus, And Device Manufacturing Method App 20090053629 - SHIBAZAKI; Yuichi ; et al.	2009-02-26
Movable Body Drive Method And Movable Body Drive System, Pattern Formation Method And Apparatus, And Device Manufacturing Method App 20090051893 - SHIBAZAKI; Yuichi ; et al.	2009-02-26
Movable Body Drive Method and Movable Body Drive System, Pattern Formation Method and Pattern Formation Apparatus, and Device Manufacturing Method App 20090033900 - Kanaya; Yuho	2009-02-05
Movable Body Drive Method And Movable Body Drive System, Pattern Formation Method And Apparatus, Exposure Method And Apparatus, Position Control Method And Position Control System, And Device Manufacturing Method App 20090027640 - SHIBAZAKI; Yuichi ; et al.	2009-01-29
Detection Device, Movable Body Apparatus, Pattern Formation Apparatus And Pattern Formation Method, Exposure Apparatus And Exposure Method, And Device Manufacturing Method App 20090004580 - Kanaya; Yuho	2009-01-01
Exposure method and device manufacturing method, exposure apparatus, and program App 20070109524 - Kawakubo; Masaharu ; et al.	2007-05-17
Exposure apparatus, exposure method, and method for producing device App 20060187432 - Yasuda; Masahiko ; et al.	2006-08-24

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