Kanaya; Kazuhiro
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kanaya; Kazuhiro.The latest application filed is for "plasma processing apparatus, plasma processing method, and storage medium".
- Kanaya; Kazuhiro - Kurokawa-gun JP
- Kanaya; Kazuhiro - Miyagi JP
- Kanaya; Kazuhiro - Nirasaki JP
- Kanaya; Kazuhiro - Nirasaki-shi JP
| Patent | Date |
|---|---|
| Plasma processing apparatus, plasma processing method, and storage medium Grant 9,299,540 - Ogi , et al. March 29, 2 | 2016-03-29 |
| Plasma Processing Apparatus, Plasma Processing Method, And Storage Medium App 20150001181 - OGI; Tatsuya ; et al. | 2015-01-01 |
| Plasma processing apparatus, plasma processing method, and storage medium Grant 8,864,934 - Ogi , et al. October 21, 2 | 2014-10-21 |
| Plasma Processing Apparatus, Plasma Processing Method, And Storage Medium App 20120248067 - Ogi; Tatsuya ; et al. | 2012-10-04 |
| System and method for processing a substrate and program therefor Grant 7,409,253 - Shimizu , et al. August 5, 2 | 2008-08-05 |
| System and method for processing a substrate and program therefor App 20060149403 - Shimizu; Noriaki ; et al. | 2006-07-06 |
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