Patent | Date |
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Semiconductor device comprising an antiferroelectric gate insulating film Grant 9,331,212 - Kamon May 3, 2 | 2016-05-03 |
Semiconductor integrated circuit and pattern layouting method for the same Grant 8,839,176 - Kamon September 16, 2 | 2014-09-16 |
Semiconductor Integrated Circuit And Pattern Layouting Method For The Same App 20140035108 - KAMON; Kazuya | 2014-02-06 |
Semiconductor integrated circuit and pattern layouting method for the same Grant 8,543,956 - Kamon September 24, 2 | 2013-09-24 |
Semiconductor Device App 20120286342 - KAMON; Kazuya | 2012-11-15 |
Semiconductor Integrated Circuit And Pattern Layouting Method For The Same App 20110248387 - Kamon; Kazuya | 2011-10-13 |
Simulator for a chemical mechanical polishing Grant 7,363,207 - Kamon April 22, 2 | 2008-04-22 |
Layout data saving method, layout data converting device and graphic verifying device Grant 7,213,217 - Kamon May 1, 2 | 2007-05-01 |
Projection aligner, aberration estimating mask pattern, aberration quantity estimating method, aberration eliminating filter and semiconductor manufacturing method Grant 7,170,682 - Kamon January 30, 2 | 2007-01-30 |
Mask data processor Grant 7,020,866 - Kamon March 28, 2 | 2006-03-28 |
Projection aligner, aberration estimating mask pattern, aberration quantity estimating method, aberration eliminating filter and semiconductor manufacturing method App 20060023309 - Kamon; Kazuya | 2006-02-02 |
Layout data saving method, layout data converting device and graphic verifying device App 20050268270 - Kamon, Kazuya | 2005-12-01 |
Projection aligner, aberration estimating mask pattern, aberration quantity estimating method, aberration eliminating filter and semiconductor manufacturing method Grant 6,970,291 - Kamon November 29, 2 | 2005-11-29 |
Layout data saving method, layout data converting device and graphic verifying device Grant 6,951,004 - Kamon September 27, 2 | 2005-09-27 |
Mask Data Correction Apparatus, Fourier Transformation Apparatus, Up Sampling Apparatus, Down Sampling Apparatus, Method Of Manufacturing Transfer Mask, And Method Of Manufacturing Device Having Pattern Structure Grant 6,831,997 - Kamon December 14, 2 | 2004-12-14 |
Simulator for a chemical mechanical polishing App 20040167755 - Kamon, Kazuya | 2004-08-26 |
Photomask, fabrication method of photomask, and fabrication method of semiconductor integrated circuit Grant 6,737,198 - Kamon May 18, 2 | 2004-05-18 |
Mask data processor App 20040060033 - Kamon, Kazuya | 2004-03-25 |
Layout data saving method, layout data converting device and graphic verifying device App 20040031006 - Kamon, Kazuya | 2004-02-12 |
Projection aligner, aberration estimating mask pattern,aberration quantity estimating method, aberration eliminating filter and semiconductor manufacturing method App 20030123038 - Kamon, Kazuya | 2003-07-03 |
Mask data correction apparatus, fourier transformation apparatus, up sampling apparatus, down sampling apparatus, method of manufacturing transfer mask, and method of manufacturing device having pattern structure App 20020018599 - Kamon, Kazuya | 2002-02-14 |
Method Of Forming A Pattern Using Proximity-effect-correction App 20010053964 - KAMON, KAZUYA | 2001-12-20 |
Photomask, Fabrication Method Of Photomask, And Fabrication Method Of Semiconductor Integrated Circuit App 20010049062 - KAMON, KAZUYA | 2001-12-06 |
Projection aligner, aberration estimating mask pattern, aberration quantity estimating method, aberration eliminating filter and semiconductor manufacturing method App 20010010886 - Kamon, Kazuya | 2001-08-02 |
Apparatus and method for correcting light proximity effects by predicting mask performance Grant 5,815,685 - Kamon September 29, 1 | 1998-09-29 |
Mask inspecting method and mask detector Grant 5,481,624 - Kamon January 2, 1 | 1996-01-02 |
Projection exposure apparatus and polarizer Grant 5,436,761 - Kamon July 25, 1 | 1995-07-25 |
Projection exposure apparatus Grant 5,365,371 - Kamon November 15, 1 | 1994-11-15 |
Projection exposure apparatus Grant 5,311,249 - Kamon , et al. May 10, 1 | 1994-05-10 |
Projection exposure apparatus Grant 5,300,972 - Kamon April 5, 1 | 1994-04-05 |
Pattern forming method Grant 5,294,505 - Kamon March 15, 1 | 1994-03-15 |
Projection exposure apparatus Grant 5,287,142 - Kamon February 15, 1 | 1994-02-15 |
Method of and an apparatus for detecting alignment marks Grant 5,285,258 - Kamon February 8, 1 | 1994-02-08 |
Projection exposure apparatus Grant 5,264,898 - Kamon , et al. November 23, 1 | 1993-11-23 |
Fly-eye lens device and lighting system including same Grant 5,251,067 - Kamon October 5, 1 | 1993-10-05 |
Projection aligner Grant 5,144,362 - Kamon , et al. September 1, 1 | 1992-09-01 |