Kamiya; Tatsuo
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kamiya; Tatsuo.The latest application filed is for "substrate processing system".
- Kamiya; Tatsuo - Tsubame JP
- KAMIYA; Tatsuo - Tsubame-shi JP
| Patent | Date |
|---|---|
| Substrate processing system Grant 10,388,553 - Kamiya A | 2019-08-20 |
| Substrate Processing System App 20170186633 - KAMIYA; Tatsuo | 2017-06-29 |
| Apparatus and method for transporting wafers between wafer carrier and process tool under vacuum Grant 9,543,180 - Kamiya January 10, 2 | 2017-01-10 |
| Apparatus And Method For Transporting Wafers Between Wafer Carrier And Process Tool Under Vacuum App 20160035596 - Kamiya; Tatsuo | 2016-02-04 |
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