Patent | Date |
---|
Method of manufacturing semiconductor device Grant 8,404,537 - Kamioka , et al. March 26, 2 | 2013-03-26 |
Method Of Manufacturing Semiconductor Device App 20120282773 - Kamioka; Isao ;   et al. | 2012-11-08 |
Method Of Manufacturing Semiconductor Device App 20120122294 - Kamioka; Isao ;   et al. | 2012-05-17 |
Nonvolatile semiconductor memory device and method for manufacturing the same Grant 8,115,249 - Kamioka , et al. February 14, 2 | 2012-02-14 |
Method of manufacturing semiconductor device Grant 8,097,503 - Kamioka , et al. January 17, 2 | 2012-01-17 |
Nonvolatile semiconductor memory device, semiconductor device and manufacturing method of nonvolatile semiconductor memory device Grant 8,093,126 - Mitani , et al. January 10, 2 | 2012-01-10 |
Method of fabricating a semiconductor device with a non-uniform gate insulating film Grant 8,026,133 - Ozawa , et al. September 27, 2 | 2011-09-27 |
Semiconductor memory device and method of manufacturing the same Grant 7,927,949 - Ozawa , et al. April 19, 2 | 2011-04-19 |
Method of manufacturing semiconductor device App 20110065262 - Kamioka; Isao ;   et al. | 2011-03-17 |
Semiconductor device and method of manufacturing the same Grant 7,897,455 - Ozawa , et al. March 1, 2 | 2011-03-01 |
Nonvolatile semiconductor memory device, semiconductor device and manufacturing method of nonvolatile semiconductor memory device Grant 7,883,967 - Mitani , et al. February 8, 2 | 2011-02-08 |
Method of manufacturing semiconductor device Grant 7,858,467 - Kamioka , et al. December 28, 2 | 2010-12-28 |
Semiconductor Memory Device And Method Of Manufacturing The Same App 20100197130 - OZAWA; Yoshio ;   et al. | 2010-08-05 |
Nonvolatile semiconductor memory device, semiconductor device and manufactoring method of nonvolatile semiconductor memory device App 20100171169 - Mitani; Yuuichiro ;   et al. | 2010-07-08 |
Nonvolatile Semiconductor Memory Device And Method For Manufacturing The Same App 20100140682 - KAMIOKA; Isao ;   et al. | 2010-06-10 |
Semiconductor memory device and method of manufacturing the same Grant 7,723,772 - Ozawa , et al. May 25, 2 | 2010-05-25 |
Semiconductor device fabrication method App 20100087041 - Kamioka; Isao ;   et al. | 2010-04-08 |
Semiconductor device fabrication method Grant 7,645,711 - Kamioka , et al. January 12, 2 | 2010-01-12 |
Semiconductor device and method of fabricating the same cross-reference to related applications App 20090269894 - Ozawa; Yoshio ;   et al. | 2009-10-29 |
Method Of Manufacturing Semiconductor Device App 20090246932 - KAMIOKA; Isao ;   et al. | 2009-10-01 |
Semiconductor device and method of fabricating the same App 20080261370 - Kamioka; Isao ;   et al. | 2008-10-23 |
Method of fabricating a semiconductor device Grant 7,396,721 - Kamioka , et al. July 8, 2 | 2008-07-08 |
Semiconductor memory device and method of manufacturing the same App 20070196985 - Ozawa; Yoshio ;   et al. | 2007-08-23 |
Semiconductor device and method of manufacturing the same App 20070173020 - Ozawa; Yoshio ;   et al. | 2007-07-26 |
Nonvolatile semiconductor memory device, semiconductor device and manufacturing method of nonvolatile semiconductor memory device App 20070018231 - Mitani; Yuuichiro ;   et al. | 2007-01-25 |
Semiconductor memory device and method of manufacturing the same App 20060240619 - Ozawa; Yoshio ;   et al. | 2006-10-26 |
Semiconductor device and method of fabricating the same App 20060202259 - Ozawa; Yoshio ;   et al. | 2006-09-14 |
Semiconductor device fabrication method App 20060166421 - Kamioka; Isao ;   et al. | 2006-07-27 |
Semiconductor device and method of fabricating the same App 20060166428 - Kamioka; Isao ;   et al. | 2006-07-27 |