| Patent | Date |
|---|
Treatment liquid and pattern forming method
Grant 11,453,734 - Kamimura , et al. September 27, 2 | 2022-09-27 |
Chemical Liquid, Chemical Liquid Storage Body, Chemical Liquid Filling Method, And Chemical Liquid Storage Method
App 20220276561 - KAMIMURA; Tetsuya ; et al. | 2022-09-01 |
Cleaning Solution And Cleaning Method
App 20220275519 - HAYASHI; Kohei ; et al. | 2022-09-01 |
Treatment Liquid, Method For Washing Substrate, And Method For Removing Resist
App 20220260919 - Takahashi; Tomonori ; et al. | 2022-08-18 |
Cleaning Method
App 20220254624 - KAMIMURA; Tetsuya | 2022-08-11 |
Treatment liquid
Grant 11,410,859 - Kamimura , et al. August 9, 2 | 2022-08-09 |
Polishing liquid and chemical mechanical polishing method
Grant 11,401,442 - Kamimura August 2, 2 | 2022-08-02 |
Treatment liquid, method for washing substrate, and method for removing resist
Grant 11,397,383 - Takahashi , et al. July 26, 2 | 2022-07-26 |
Quality inspection method for chemical liquid
Grant 11,392,046 - Kamimura July 19, 2 | 2022-07-19 |
Storage Container Storing Treatment Liquid For Manufacturing Semiconductor
App 20220221798 - KAMIMURA; Tetsuya | 2022-07-14 |
Treatment liquid for manufacturing semiconductor, method of manufacturing treatment liquid for manufacturing semiconductor, pattern forming method, and method of manufacturing electronic device
Grant 11,372,331 - Kamimura June 28, 2 | 2022-06-28 |
Polishing liquid and chemical mechanical polishing method
Grant 11,359,113 - Kamimura June 14, 2 | 2022-06-14 |
Chemical liquid, chemical liquid storage body, chemical liquid filling method, and chemical liquid storage method
Grant 11,360,389 - Kamimura , et al. June 14, 2 | 2022-06-14 |
Storage Container Storing Treatment Liquid For Manufacturing Semiconductor
App 20220179320 - SHIMIZU; Tetsuya ; et al. | 2022-06-09 |
Cleaning Solution And Cleaning Method
App 20220177814 - KAMIMURA; Tetsuya | 2022-06-09 |
Chemical liquid purification method
Grant 11,351,503 - Kamimura , et al. June 7, 2 | 2022-06-07 |
Member, container, chemical liquid storage body, chemical liquid purification device, and manufacturing tank
Grant 11,326,048 - Kamimura May 10, 2 | 2022-05-10 |
Method For Manufacturing Electronic Device
App 20220121123 - KAMIMURA; Tetsuya ; et al. | 2022-04-21 |
Composition, Kit, And Method For Treating Substrate
App 20220119960 - MIZUTANI; Atsushi ; et al. | 2022-04-21 |
Polishing Liquid And Chemical Mechanical Polishing Method
App 20220106499 - KAMIMURA; Tetsuya | 2022-04-07 |
Polishing Liquid And Chemical Mechanical Polishing Method
App 20220098444 - KAMIMURA; Tetsuya | 2022-03-31 |
Polishing Liquid And Chemical Mechanical Polishing Method
App 20220098443 - KAMIMURA; Tetsuya | 2022-03-31 |
Polishing Liquid And Chemical Mechanical Polishing Method
App 20220089909 - KAMIMURA; Tetsuya | 2022-03-24 |
Treatment liquid for manufacturing semiconductor, storage container storing treatment liquid for manufacturing semiconductor, pattern forming method, and method of manufacturing electronic device
Grant 11,281,106 - Shimizu , et al. March 22, 2 | 2022-03-22 |
Polishing liquid and chemical mechanical polishing method
Grant 11,267,988 - Kamimura March 8, 2 | 2022-03-08 |
Polishing liquid and chemical mechanical polishing method
Grant 11,267,989 - Kamimura March 8, 2 | 2022-03-08 |
Polishing Liquid And Chemical Mechanical Polishing Method
App 20220064490 - KAMIMURA; Tetsuya | 2022-03-03 |
Treatment liquid for manufacturing semiconductor and pattern forming method
Grant 11,256,173 - Kamimura , et al. February 22, 2 | 2022-02-22 |
Treatment liquid, method for washing substrate, and method for removing resist
Grant 11,225,633 - Kamimura , et al. January 18, 2 | 2022-01-18 |
Resist Pattern Forming Method And Semiconductor Chip Manufacturing Method
App 20210405535 - KAMIMURA; Tetsuya ; et al. | 2021-12-30 |
Cleaning Liquid
App 20210395645 - Kamimura; Tetsuya ; et al. | 2021-12-23 |
Chemical Liquid, Rinsing Solution, And Resist Pattern Forming Method
App 20210397098 - KAMIMURA; Tetsuya | 2021-12-23 |
Composition, composition reservoir, and method for producing composition
Grant 11,192,786 - Kamimura December 7, 2 | 2021-12-07 |
Chemical Liquid, Resist Pattern Forming Method, Semiconductor Chip Manufacturing Method, Chemical Liquid Storage Body, And Chemical Liquid Manufacturing Method
App 20210373439 - KAMIMURA; Tetsuya | 2021-12-02 |
Treatment liquid and treatment liquid housing body
Grant 11,175,585 - Murayama , et al. November 16, 2 | 2021-11-16 |
Chemical liquid, chemical liquid storage body, and pattern forming method
Grant 11,079,677 - Kamimura August 3, 2 | 2021-08-03 |
Treatment liquid, kit, and method for washing substrate
Grant 11,072,767 - Takahashi , et al. July 27, 2 | 2021-07-27 |
Chemical Liquid, Chemical Liquid Storage Body, Resist Pattern Forming Method, And Semiconductor Chip Manufacturing Method
App 20210223698 - KAMIMURA; Tetsuya | 2021-07-22 |
Chemical Liquid And Chemical Liquid Storage Body
App 20210222092 - KAMIMURA; Tetsuya ; et al. | 2021-07-22 |
Manufacturing Method Of Semiconductor Chip, And Kit
App 20210157241 - KAMIMURA; Tetsuya | 2021-05-27 |
Chemical Liquid And Chemical Liquid Storage Body
App 20210139231 - KAMIMURA; Tetsuya ; et al. | 2021-05-13 |
Member, Container, Chemical Liquid Storage Body, Reactor, Distillation Column, Filter Unit, Storage Tank, Pipe Line, And Chemical Liquid Manufacturing Method
App 20210130084 - SHIMIZU; Tetsuya ; et al. | 2021-05-06 |
Chemical Liquid, Kit, Pattern Forming Method, Chemical Liquid Manufacturing Method, And Chemical Liquid Storage Body
App 20210132503 - OOMATSU; Tadashi ; et al. | 2021-05-06 |
Manufacturing method of semiconductor chip, and kit
Grant 10,942,455 - Kamimura March 9, 2 | 2021-03-09 |
Treatment liquid, method for washing substrate, and method for manufacturing semiconductor device
Grant 10,927,327 - Kamimura , et al. February 23, 2 | 2021-02-23 |
Treatment Fluid
App 20210005473 - KAMIMURA; Tetsuya ; et al. | 2021-01-07 |
Chemical liquid, chemical liquid storage body, manufacturing method of chemical liquid, and manufacturing method of chemical liquid storage body
Grant 10,884,338 - Kamimura January 5, 2 | 2021-01-05 |
Filtering Device, Purification Device, And Method For Manufacturing Chemical Liquid
App 20200384416 - OMATSU; Tadashi ; et al. | 2020-12-10 |
Filtering Device, Purification Device, And Method For Manufacturing Chemical Liquid
App 20200368691 - KAMIMURA; Tetsuya ; et al. | 2020-11-26 |
Filtering Device, Purification Device, And Method For Manufacturing Chemical Liquid
App 20200368692 - SHIMIZU; Tetsuya ; et al. | 2020-11-26 |
Filtering Device, Purification Device, And Method For Manufacturing Chemical Liquid
App 20200368693 - OMATSU; Tadashi ; et al. | 2020-11-26 |
Treatment Liquid And Treatment Method
App 20200363725 - KAMIMURA; Tetsuya | 2020-11-19 |
Filtration Device, Refining Device, And Production Method For Liquid Medicine
App 20200360861 - OMATSU; Tadashi ; et al. | 2020-11-19 |
Filter Device, Purification Device, Chemical Solution Production Method
App 20200360862 - KAMIMURA; Tetsuya ; et al. | 2020-11-19 |
Polishing Liquid And Chemical Mechanical Polishing Method
App 20200362199 - KAMIMURA; Tetsuya | 2020-11-19 |
Analysis Method, Liquid Chemical, And Method For Producing Liquid Chemical
App 20200355584 - KAMIMURA; Tetsuya | 2020-11-12 |
Polishing Liquid And Chemical Mechanical Polishing Method
App 20200354610 - Kamimura; Tetsuya | 2020-11-12 |
Polishing Liquid And Chemical Mechanical Polishing Method
App 20200354609 - KAMIMURA; Tetsuya | 2020-11-12 |
Polishing Liquid And Chemical Mechanical Polishing Method
App 20200347268 - KAMIMURA; Tetsuya | 2020-11-05 |
Liquid Chemical, Method For Producing Liquid Chemical, And Method For Analyzing Test Target Solution
App 20200341382 - KAMIMURA; Tetsuya | 2020-10-29 |
Liquid Chemical And Method For Producing Liquid Chemical
App 20200341381 - KAMIMURA; Tetsuya | 2020-10-29 |
Liquid Chemical And Method For Producing Liquid Chemical
App 20200319559 - KAMIMURA; Tetsuya | 2020-10-08 |
Cleaning compositions
Grant 10,787,628 - Dory , et al. September 29, 2 | 2020-09-29 |
Chemical Liquid Storage Body
App 20200181008 - KAMIMURA; Tetsuya ; et al. | 2020-06-11 |
Chemical Liquid Purification Method
App 20200171434 - KAMIMURA; Tetsuya ; et al. | 2020-06-04 |
Treatment Liquid, Kit, And Method For Washing Substrate
App 20200165547 - TAKAHASHI; Tomonori ; et al. | 2020-05-28 |
Chemical Liquid Purification Method And Chemical Liquid
App 20200164294 - KAMIMURA; Tetsuya ; et al. | 2020-05-28 |
Filtering Device, Purification Device, Chemical Liquid Manufacturing Device, Filtered Substance To Be Purified, Chemical Liquid,
App 20200147528 - SHIMIZU; Tetsuya ; et al. | 2020-05-14 |
Chemical Liquid And Chemical Liquid Storage Body
App 20200131118 - KAMIMURA; Tetsuya | 2020-04-30 |
Treatment liquid and method for washing substrate
Grant 10,626,356 - Kamimura , et al. | 2020-04-21 |
Container, Method For Manufacturing Container, And Chemical Liquid Storage Body
App 20200115105 - Omatsu; Tadashi ; et al. | 2020-04-16 |
Film, Color Filter, Solid Image Pickup Element, And Infrared Sensor
App 20200096864 - TAKISHITA; Hirotaka ; et al. | 2020-03-26 |
Member, Container, Chemical Liquid Storage Body, Chemical Liquid Purification Device, And Manufacturing Tank
App 20200087501 - KAMIMURA; Tetsuya | 2020-03-19 |
Coloring composition, film, color filter, pattern forming method, method of manufacturing color filter, solid image pickup element, and infrared sensor
Grant 10,578,966 - Takishita , et al. | 2020-03-03 |
Chemical Liquid Purification Method, Chemical Liquid Manufacturing Method, And Chemical Liquid
App 20200023288 - KAMIMURA; Tetsuya | 2020-01-23 |
Chemical Liquid, Chemical Liquid Storage Body, And Pattern Forming Method
App 20190346764 - KAMIMURA; Tetsuya | 2019-11-14 |
Chemical Liquid Manufacturing Method And Chemical Liquid Manufacturing Device
App 20190339619 - KAMIMURA; Tetsuya | 2019-11-07 |
Quality Inspection Method For Chemical Liquid
App 20190324373 - KAMIMURA; Tetsuya | 2019-10-24 |
Etching method, etching solution used in same, and production method for semiconductor substrate product
Grant 10,435,794 - Muro , et al. O | 2019-10-08 |
Coloring composition, film, color filter, pattern forming method, method of manufacturing color filter, solid image pickup element, and infrared sensor
Grant 10,401,726 - Takishita , et al. Sep | 2019-09-03 |
Chemical Liquid, Pattern Forming Method, And Kit
App 20190258165 - NAKAMURA; Takashi ; et al. | 2019-08-22 |
Treatment Liquid And Pattern Forming Method
App 20190258168 - KAMIMURA; Tetsuya ; et al. | 2019-08-22 |
Chemical Liquid, Chemical Liquid Storage Body, Pattern Forming Method, And Kit
App 20190243240 - KAMIMURA; Tetsuya ; et al. | 2019-08-08 |
Manufacturing Method Of Semiconductor Chip, And Kit
App 20190227440 - KAMIMURA; Tetsuya | 2019-07-25 |
Pattern Forming Method, Method For Producing Electronic Device, And Kit
App 20190227435 - KAMIMURA; Tetsuya | 2019-07-25 |
Chemical Liquid, Chemical Liquid Storage Body, Chemical Liquid Filling Method, And Chemical Liquid Storage Method
App 20190219923 - KAMIMURA; Tetsuya ; et al. | 2019-07-18 |
Chemical Liquid, Chemical Liquid Storage Body, Manufacturing Method Of Chemical Liquid, And Manufacturing Method Of Chemical Liq
App 20190219924 - KAMIMURA; Tetsuya | 2019-07-18 |
Solution, Solution Storage Body, Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Pattern Forming Method, And Man
App 20190196327 - KAMIMURA; Tetsuya | 2019-06-27 |
Treatment Liquid And Method For Treating Laminate
App 20190194580 - KAMIMURA; Tetsuya | 2019-06-27 |
Treatment Liquid, Method For Washing Substrate, And Method For Manufacturing Semiconductor Device
App 20190177669 - KAMIMURA; Tetsuya ; et al. | 2019-06-13 |
Treatment Liquid And Method For Treating Laminate
App 20190177670 - KAMIMURA; Tetsuya | 2019-06-13 |
Solution, Solution Storage Body, Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Pattern Forming Method, And Man
App 20190171102 - KAMIMURA; Tetsuya ; et al. | 2019-06-06 |
Treatment Liquid And Method For Washing Substrate
App 20190136161 - KAMIMURA; Tetsuya ; et al. | 2019-05-09 |
Coloring composition, method for producing coloring composition, color filter, pattern forming method, method for manufacturing color filter, solid-state imaging device, and image display device
Grant 10,241,247 - Taguchi , et al. | 2019-03-26 |
Treatment Liquid, Method For Washing Substrate, And Method For Removing Resist
App 20190079409 - TAKAHASHI; Tomonori ; et al. | 2019-03-14 |
Treatment Liquid, Method For Washing Substrate, And Method For Removing Resist
App 20190071623 - KAMIMURA; Tetsuya ; et al. | 2019-03-07 |
Composition, Composition Reservoir, And Method For Producing Composition
App 20190062159 - KAMIMURA; Tetsuya | 2019-02-28 |
Treatment Liquid And Treatment Liquid Housing Body
App 20190064672 - MURAYAMA; Satoru ; et al. | 2019-02-28 |
Cleaning Compositions
App 20190062674 - Dory; Thomas ; et al. | 2019-02-28 |
Purification Device, Purification Method, Manufacturing Device, Manufacturing Method Of Chemical Liquid, Container, And Chemical Liquid Storage Container
App 20190060782 - SHIMIZU; Tetsuya ; et al. | 2019-02-28 |
Semiconductor substrate treatment liquid, treatment method, and method for manufacturing semiconductor-substrate product using these
Grant 10,199,210 - Kamimura , et al. Fe | 2019-02-05 |
Treatment Liquid, Method Of Manufacturing Treatment Liquid, Pattern Forming Method, And Method Of Manufacturing Electronic Device
App 20190033718 - KAMIMURA; Tetsuya | 2019-01-31 |
Treatment Liquid For Manufacturing Semiconductor And Pattern Forming Method
App 20190025702 - KAMIMURA; Tetsuya ; et al. | 2019-01-24 |
Treatment Liquid For Manufacturing Semiconductor, Method Of Manufacturing Treatment Liquid For Manufacturing Semiconductor, Pattern Forming Method, And Method Of Manufacturing Electronic Device
App 20190025701 - KAMIMURA; Tetsuya | 2019-01-24 |
Treatment Liquid For Manufacturing Semiconductor, Storage Container Storing Treatment Liquid For Manufacturing Semiconductor, Pattern Forming Method, And Method Of Manufacturing Electronic Device
App 20190025703 - SHIMIZU; Tetsuya ; et al. | 2019-01-24 |
Etchant, etching method using same, and method for manufacturing semiconductor substrate product
Grant 10,062,580 - Mizutani , et al. August 28, 2 | 2018-08-28 |
Coloring Photosensitive Composition, Cured Film, Color Filter, Light-shielding Film, Solid-state Imaging Device, Image Display Device, And Method For Producing Cured Film
App 20180164681 - KAMIMURA; Tetsuya ; et al. | 2018-06-14 |
Coloring Composition, Method For Producing Coloring Composition, Color Filter, Pattern Forming Method, Method For Manufacturing Color Filter, Solid-state Imaging Device, And Image Display Device
App 20170269270 - TAGUCHI; Yoshinori ; et al. | 2017-09-21 |
Etching method, and etching liquid to be used therein and method of producing a semiconductor substrate product using the same
Grant 9,688,912 - Kamimura June 27, 2 | 2017-06-27 |
Composition, Method Of Manufacturing Composition, Curablecomposition, Cured Film, Near-infrared Cut Filter, Solid-stateimaging Device, Infrared Sensor, And Camera Module
App 20170174869 - ARAYAMA; Kyohei ; et al. | 2017-06-22 |
Etching method, and method of producing semiconductor substrate product and semiconductor device using the same
Grant 9,558,953 - Muro , et al. January 31, 2 | 2017-01-31 |
Coloring Composition, Film, Color Filter, Pattern Forming Method, Method Of Manufacturing Color Filter, Solid Image Pickup Element, And Infrared Sensor
App 20170023858 - TAKISHITA; Hirotaka ; et al. | 2017-01-26 |
Etching method of semiconductor substrate, and method of producing semiconductor device
Grant 9,548,217 - Muro , et al. January 17, 2 | 2017-01-17 |
Coloring Composition, Film, Color Filter, Pattern Forming Method, Method Of Manufacturing Color Filter, Solid Image Pickup Element, And Infrared Sensor
App 20170010528 - TAKISHITA; Hirotaka ; et al. | 2017-01-12 |
Etchant, Etching Method Using Same, And Method For Manufacturing Semiconductor Substrate Product
App 20160365254 - MIZUTANI; Atsushi ; et al. | 2016-12-15 |
Etching method of semiconductor substrate, and method of producing semiconductor device
Grant 9,514,958 - Nishiwaki , et al. December 6, 2 | 2016-12-06 |
Method For Stripping Modified Resist, Modified-resist Stripper Used Therefor, And Method For Manufacturing Semiconductor-substrate Product
App 20160254164 - SUGISHIMA; Yasuo ; et al. | 2016-09-01 |
Semiconductor Substrate Treatment Liquid, Treatment Method, And Method For Manufacturing Semiconductor-substrate Product Using These
App 20160254139 - KAMIMURA; Tetsuya ; et al. | 2016-09-01 |
Modified-resist Stripper, Method For Stripping Modified Resist Using Same, And Method For Manufacturing Semiconductor-substrate Product
App 20160252819 - SUGISHIMA; Yasuo ; et al. | 2016-09-01 |
Etching Method, Etching Solution Used In Same, Etching Solution Kit, And Method For Manufacturing Semiconductor Substrate Product
App 20160118264 - KAMIMURA; Tetsuya ; et al. | 2016-04-28 |
Etching Method, Etching Liquid And Etching Liquid Kit To Be Used In Said Method, And Semiconductor Substrate Product Manufacturing Method
App 20160056054 - TAKAHASHI; Satomi ; et al. | 2016-02-25 |
Etching Solution And Etching Solution Kit, Etching Method Using Same, And Production Method For Semiconductor Substrate Product
App 20160053386 - MIZUTANI; Atsushi ; et al. | 2016-02-25 |
Etching Method, Etching Solution Used In Same, And Production Method For Semiconductor Substrate Product
App 20160053385 - MURO; Naotsugu ; et al. | 2016-02-25 |
Etching Solution, Etching Solution Kit, Etching Method Using Same, And Method For Manufacturing Semiconductor Substrate Product
App 20160047053 - SUGISHIMA; Yasuo ; et al. | 2016-02-18 |
Etching Method Of Semiconductor Substrate, And Method Of Producing Semiconductor Device
App 20150255309 - NISHIWAKI; Yoshinori ; et al. | 2015-09-10 |
Etching Liquid For Semiconductor Substrate, Etching Method Using The Same, And Method Of Producing Semiconductor Device
App 20150247087 - KAMIMURA; Tetsuya ; et al. | 2015-09-03 |
Etching Method Of Semiconductor Substrate, And Method Of Producing Semiconductor Device
App 20150243527 - MURO; Naotsugu ; et al. | 2015-08-27 |
Etching Liquid, Etching Method Using The Same, And Method Of Producing Semiconductor Device
App 20150225645 - KAMIMURA; Tetsuya ; et al. | 2015-08-13 |
Cleaning agent for semiconductor substrate, cleaning method using the cleaning agent, and method for producing semiconductor element
Grant 9,070,636 - Kamimura June 30, 2 | 2015-06-30 |
Method Of Producing A Semiconductor Substrate Product And Etching Liquid
App 20150179471 - MIZUTANI; Atsushi ; et al. | 2015-06-25 |
Polishing fluid and polishing method
Grant 9,048,195 - Kamimura June 2, 2 | 2015-06-02 |
Etching Method, And Method Of Producing Semiconductor Substrate Product And Semiconductor Device Using The Same
App 20150118860 - MURO; Naotsugu ; et al. | 2015-04-30 |
Etching Method, And Method Of Producing Semiconductor Substrate Product And Semiconductor Device Using The Same, As Well As Kit For Preparation Of Etching Liquid
App 20150087156 - KAMIMURA; Tetsuya ; et al. | 2015-03-26 |
Polishing Liquid And Polishing Method
App 20150072525 - KAMIMURA; Tetsuya | 2015-03-12 |
Method of producing a semiconductor substrate product and etching liquid
Grant 8,940,644 - Mizutani , et al. January 27, 2 | 2015-01-27 |
Polishing liquid and polishing method
Grant 8,932,479 - Kamimura January 13, 2 | 2015-01-13 |
Polishing liquid and polishing method
Grant 8,911,643 - Kamimura December 16, 2 | 2014-12-16 |
Etching composition
Grant 8,889,025 - Takahashi , et al. November 18, 2 | 2014-11-18 |
Polishing liquid
Grant 8,715,524 - Kamimura , et al. May 6, 2 | 2014-05-06 |
Novel Etching Composition
App 20140120734 - Takahashi; Tomonori ; et al. | 2014-05-01 |
Etching composition
Grant 8,647,523 - Takahashi , et al. February 11, 2 | 2014-02-11 |
Etching Method, And Etching Liquid To Be Used Therein And Method Of Producing A Semiconductor Substrate Product Using The Same
App 20140030896 - KAMIMURA; Tetsuya | 2014-01-30 |
Multi-agent type cleaning kit for semiconductor substrates, cleaning method using the same and method of producing semiconductor element
Grant 8,551,928 - Kamimura October 8, 2 | 2013-10-08 |
Method Of Producing A Semiconductor Substrate Product And Etching Liquid
App 20130244443 - MIZUTANI; Atsushi ; et al. | 2013-09-19 |
Method Of Producing A Semiconductor Substrate Product And Etching Liquid
App 20130244444 - MIZUTANI; Atsushi ; et al. | 2013-09-19 |
Silicon nitride polishing liquid and polishing method
Grant 8,419,970 - Kamimura April 16, 2 | 2013-04-16 |
Polishing liquid for semiconductor integrated circuit
Grant 8,409,467 - Saie , et al. April 2, 2 | 2013-04-02 |
Polishing slurry
Grant 8,372,304 - Yamada , et al. February 12, 2 | 2013-02-12 |
Polishing liquid
Grant 8,338,303 - Kamimura December 25, 2 | 2012-12-25 |
Polishing Liquid And Polishing Method
App 20120252214 - KAMIMURA; Tetsuya | 2012-10-04 |
Novel Etching Composition
App 20120231632 - Takahashi; Tomonori ; et al. | 2012-09-13 |
Multi-agent Type Cleaning Kit For Semiconductor Substrates, Cleaning Method Using The Same And Method Of Producing Semiconductor Element
App 20120108485 - KAMIMURA; Tetsuya | 2012-05-03 |
Cleaning Agent For Semiconductor Substrate, Cleaning Method Using The Cleaning Agent, And Method For Producing Semiconductor Element
App 20120073610 - KAMIMURA; Tetsuya | 2012-03-29 |
Polishing Fluid And Polishing Method
App 20120028467 - KAMIMURA; Tetsuya | 2012-02-02 |
Polishing Liquid And Polishing Method
App 20110244684 - KAMIMURA; Tetsuya | 2011-10-06 |
Massaging device
Grant 7,927,294 - Kamimura , et al. April 19, 2 | 2011-04-19 |
Polishing Liquid
App 20100167547 - KAMIMURA; Tetsuya | 2010-07-01 |
Silicon nitride polishing liquid and polishing method
App 20100009538 - Kamimura; Tetsuya | 2010-01-14 |
Polishing slurry
App 20090311864 - Yamada; Tooru ; et al. | 2009-12-17 |
Polishing liquid and polishing method
App 20090298290 - Kamimura; Tetsuya | 2009-12-03 |
Polishing Liquid And Polishing Method
App 20090246957 - KAMIMURA; Tetsuya | 2009-10-01 |
Polishing Liquid And Polishing Method Using The Same
App 20090087989 - Kamimura; Tetsuya | 2009-04-02 |
Polishing Liquid
App 20090078908 - SAIE; Toshiyuki ; et al. | 2009-03-26 |
Polishing Liquid And Polishing Method Using The Same
App 20090004863 - KAMIMURA; Tetsuya | 2009-01-01 |
Polishing Liquid
App 20080203354 - KAMIMURA; Tetsuya ; et al. | 2008-08-28 |
Massaging device
App 20070203436 - Kamimura; Tetsuya ; et al. | 2007-08-30 |
Polishing liquid for barrier layer
App 20070181850 - Kamimura; Tetsuya ; et al. | 2007-08-09 |
Barrier polishing liquid and chemical mechanical polishing method
App 20070181534 - Kamimura; Tetsuya | 2007-08-09 |
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