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System, control device, and module Grant 11,214,369 - Tsutsui , et al. January 4, 2 | 2022-01-04 |
System, Control Device, And Module App 20210253243 - TSUTSUI; Tatsushi ;   et al. | 2021-08-19 |
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Charged particle beam application system App 20070023654 - Kamimura; Osamu ;   et al. | 2007-02-01 |
Method of charged particle beam lithography and equipment for charged particle beam lithography Grant 7,105,842 - Tanimoto , et al. September 12, 2 | 2006-09-12 |
Electron beam writing equipment and electron beam writing method Grant 7,098,464 - Sohda , et al. August 29, 2 | 2006-08-29 |
Electron beam writing equipment and electron beam writing method Grant 7,049,607 - Sohda , et al. May 23, 2 | 2006-05-23 |
Electron beam exposure apparatus and electron beam processing apparatus Grant 7,041,988 - Hamaguchi , et al. May 9, 2 | 2006-05-09 |
Electron beam writing equipment using plural beams and method Grant 7,015,482 - Sohda , et al. March 21, 2 | 2006-03-21 |
Charged particle beam exposure apparatus, charged particle beam exposure method, and device manufacturing method using the same apparatus Grant 7,005,659 - Muraki , et al. February 28, 2 | 2006-02-28 |
Charged particle beam exposure apparatus, charged particle beam exposure method and device manufacturing method App 20060017019 - Hosoda; Masaki ;   et al. | 2006-01-26 |
Charged-particle-beam exposure apparatus and method of controlling same Grant 6,969,862 - Muraki , et al. November 29, 2 | 2005-11-29 |
Case with hinged lid App 20050224508 - Tajiri, Takeshi ;   et al. | 2005-10-13 |
Electron beam writing equipment and electron beam writing method App 20050072939 - Sohda, Yasunari ;   et al. | 2005-04-07 |
Method of charged particle beam lithography and equipment for charged particle beam lithography App 20050072941 - Tanimoto, Sayaka ;   et al. | 2005-04-07 |
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Electron beam exposure equipment and electron beam exposure method Grant 6,838,682 - Sohda , et al. January 4, 2 | 2005-01-04 |
Electron beam writing equipment and electron beam writing method Grant 6,809,319 - Sohda , et al. October 26, 2 | 2004-10-26 |
Charged-particle-beam exposure apparatus and method of controlling same App 20040135102 - Muraki, Masato ;   et al. | 2004-07-15 |
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Electron beam exposure equipment and electron beam exposure method App 20040119026 - Sohda, Yasunari ;   et al. | 2004-06-24 |
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Electron beam exposure apparatus and electron beam processing apparatus App 20030209674 - Hamaguchi, Shinichi ;   et al. | 2003-11-13 |
Handy-phone with shielded high and low frequency circuits and planar antenna Grant 6,031,494 - Okabe , et al. February 29, 2 | 2000-02-29 |
Multilayered wiring board having printed inductor Grant 5,373,112 - Kamimura , et al. December 13, 1 | 1994-12-13 |