Kamikawa; Yuuji
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kamikawa; Yuuji.The latest application filed is for "substrate washing method, substrate washing-drying method, substrate washing apparatus and substrate washing-drying apparatus".
- Kamikawa; Yuuji - Koshimachi JP
- Kamikawa; Yuuji - Uto JP
- Kamikawa; Yuuji - Kumamoto-ken JP
- Kamikawa; Yuuji - Kumamoto JP
| Patent | Date |
|---|---|
| Substrate washing method, substrate washing-drying method, substrate washing apparatus and substrate washing-drying apparatus Grant 6,001,191 - Kamikawa , et al. December 14, 1 | 1999-12-14 |
| Washing apparatus, and washing method Grant 5,887,604 - Murakami , et al. March 30, 1 | 1999-03-30 |
| Substrate washing and drying apparatus, substrate washing method, and substrate washing apparatus Grant 5,845,660 - Shindo , et al. December 8, 1 | 1998-12-08 |
| Washing apparatus, and washing method Grant 5,671,764 - Murakami , et al. September 30, 1 | 1997-09-30 |
| Processing apparatus with a gas distributor having back and forth parallel movement relative to a workpiece support surface Grant 5,445,699 - Kamikawa , et al. August 29, 1 | 1995-08-29 |
| Apparatus and method for drying substrates Grant 5,443,540 - Kamikawa August 22, 1 | 1995-08-22 |
| Substrate drying apparatus Grant 5,369,891 - Kamikawa December 6, 1 | 1994-12-06 |
| Washing system Grant 5,301,700 - Kamikawa , et al. April 12, 1 | 1994-04-12 |
| Transfer apparatus Grant 5,253,663 - Tanaka , et al. October 19, 1 | 1993-10-19 |
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