Kamikawa; Yuji

Patent Applications and Registrations

Patent applications and USPTO patent grants for Kamikawa; Yuji.The latest application filed is for "substrate processing apparatus".

Company Profile

1.73.57

Kamikawa; Yuji - Koshi JP
Kamikawa; Yuji - Tokyo JP
Kamikawa; Yuji - Tosu JP
Kamikawa; Yuji - Kanagawa JP
Kamikawa; Yuji - Saga JP
Kamikawa; Yuji - Kumamoto JP
KAMIKAWA; Yuji - Tosu-Shi JP
Kamikawa; Yuji - Koshi City JP
Kamikawa; Yuji - Tosu City Saga JP
KAMIKAWA; Yuji - Koshi-shi JP
Kamikawa; Yuji - Saga-Ken JP
KAMIKAWA; Yuji - Tosu City JP
Kamikawa; Yuji - Koshi-machi JP
Kamikawa; Yuji - Kumamoto-ken JP
Kamikawa, Yuji - Kikuchi-gun JP
Kamikawa; Yuji - Koshimachi JP
Kamikawa; Yuji - Uto JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Nozzle cleaning device, nozzle cleaning method, and substrate processing apparatus Grant 10,700,166 - Kai , et al.	2020-06-30
Substrate cleaning method, substrate cleaning system and program storage medium Grant 9,358,588 - Watanabe , et al. June 7, 2	2016-06-07
Substrate processing apparatus Grant 9,305,818 - Kamikawa , et al. April 5, 2	2016-04-05
Substrate processing apparatus, substrate processing method, and storage medium Grant 9,236,280 - Toshima , et al. January 12, 2	2016-01-12
Cleaning device and image forming apparatus Grant 9,046,866 - Sato , et al. June 2, 2	2015-06-02
Evaporator, evaporation method and substrate processing apparatus Grant 9,003,674 - Nakashima , et al. April 14, 2	2015-04-14
Substrate processing apparatus Grant 9,004,079 - Kamikawa April 14, 2	2015-04-14
Substrate processing apparatus, substrate processing method and storage medium Grant 8,944,078 - Kamikawa February 3, 2	2015-02-03
Substrate Processing Apparatus App 20140356106 - KAMIKAWA; Yuji ; et al.	2014-12-04
Substrate processing apparatus Grant 8,851,819 - Kamikawa , et al. October 7, 2	2014-10-07
Cleaning device, image forming apparatus, and transfer unit including pressing unit Grant 8,744,302 - Matsushita , et al. June 3, 2	2014-06-03
Cleaning Device And Image Forming Apparatus App 20140056609 - SATO; Koichi ; et al.	2014-02-27
Evaporator, Evaporation Method And Substrate Processing Apparatus App 20140020849 - NAKASHIMA; Mikio ; et al.	2014-01-23
Nozzle Cleaning Device, Nozzle Cleaning Method, And Substrate Processing Apparatus App 20130319470 - Kai; Yoshihiro ; et al.	2013-12-05
Liquid processing apparatus, liquid processing method, computer program, and storage medium Grant 8,577,502 - Tanaka , et al. November 5, 2	2013-11-05
Evaporator, evaporation method and substrate processing apparatus Grant 8,567,089 - Nakashima , et al. October 29, 2	2013-10-29
Ultrasonic cleaning apparatus, ultrasonic cleaning method, and storage medium storing computer program for executing ultrasonic cleaning method Grant 8,567,417 - Kamikawa , et al. October 29, 2	2013-10-29
Liquid processing apparatus and process liquid supplying method Grant 8,491,726 - Kamikawa , et al. July 23, 2	2013-07-23
Substrate Cleaning Method, Substrate Cleaning System And Program Storage Medium App 20130152964 - WATANABE; Tsukasa ; et al.	2013-06-20
Cleaning Device, Image Forming Apparatus, And Transfer Unit App 20130136487 - MATSUSHITA; Kaoru ; et al.	2013-05-30
Liquid processing apparatus, liquid processing method, and storage medium Grant 8,371,318 - Minami , et al. February 12, 2	2013-02-12
Substrate cleaning method, substrate cleaning system and program storage medium Grant 8,347,901 - Watanabe , et al. January 8, 2	2013-01-08
Evaporator, Evaporation Method And Substrate Processing Apparatus App 20120323052 - NAKASHIMA; Mikio ; et al.	2012-12-20
Liquid Processing Apparatus, Liquid Processing Method, And Storage Medium App 20120312332 - MINAMI; Teruomi ; et al.	2012-12-13
Substrate processing method and non-transitory storage medium for carrying out such method Grant 8,303,724 - Hiroshiro , et al. November 6, 2	2012-11-06
Evaporator, evaporation method and substrate processing apparatus Grant 8,281,498 - Nakashima , et al. October 9, 2	2012-10-09
Liquid processing apparatus, liquid processing method, and storage medium Grant 8,268,087 - Kamikawa , et al. September 18, 2	2012-09-18
Liquid treating apparatus Grant 8,201,567 - Kamikawa June 19, 2	2012-06-19
Substrate Processing Apparatus, Substrate Processing Method, and Storage Medium App 20120132230 - Toshima; Takayuki ; et al.	2012-05-31
Substrate cleaning method, substrate cleaning system and program storage medium Grant 8,152,928 - Watanabe , et al. April 10, 2	2012-04-10
Substrate Processing Apparatus, Substrate Processing Method, and Computer-Readable Storage Medium App 20120006356 - Kamikawa; Yuji	2012-01-12
Substrate Processing Method And Non-transitory Storage Medium For Carrying Out Such Method App 20110290280 - HIROSHIRO; Koukichi ; et al.	2011-12-01
Substrate Processing Apparatus App 20110247662 - KAMIKAWA; Yuji	2011-10-13
Substrate Processing Apparatus, Substrate Processing Method And Storage Medium App 20110240066 - KAMIKAWA; Yuji	2011-10-06
Substrate processing apparatus including a drying mechanism using a fluid mixture of purified water and a volatile organic solvent Grant 8,015,984 - Hiroshiro , et al. September 13, 2	2011-09-13
Batch forming apparatus, substrate processing system, batch forming method, and storage medium Grant 8,002,511 - Kamikawa , et al. August 23, 2	2011-08-23
Semiconductor device fabricating system Grant 7,972,468 - Kamikawa , et al. July 5, 2	2011-07-05
Ultrasonic Cleaning Apparatus, Ultrasonic Cleaning Method, And Storage Medium Storing Computer Program For Executing Ultrasonic Cleaning Method App 20110079240 - KAMIKAWA; Yuji ; et al.	2011-04-07
Substrate Processing Apparatus App 20100215461 - KAMIKAWA; Yuji ; et al.	2010-08-26
Liquid Processing Apparatus, Liquid Processing Method, And Storage Medium App 20100147335 - Ito; Norihiro ; et al.	2010-06-17
Substrate Processing Apparatus And Substrate Processing Method App 20100095981 - KAMIKAWA; Yuji	2010-04-22
Liquid Processing Apparatus, Liquid Processing Method, And Storage Medium App 20100083986 - Kamikawa; Yuji ; et al.	2010-04-08
Evaporator, Evaporation Method And Substrate Processing Apparatus App 20100058606 - NAKASHIMA; Mikio ; et al.	2010-03-11
Vapor drying method, apparatus and recording medium for use in the method Grant 7,637,029 - Kamikawa , et al. December 29, 2	2009-12-29
Substrate Processing Apparatus, Substrate Processing Method And Storage Medium App 20090265039 - Kamikawa; Yuji	2009-10-22
Fluid heating apparatus Grant 7,593,625 - Kamikawa , et al. September 22, 2	2009-09-22
Liquid treating apparatus App 20090151756 - Kamikawa; Yuji	2009-06-18
Substrate Processing Apparatus and Substrate Processing Method App 20090101186 - Hiroshiro; Koukichi ; et al.	2009-04-23
Liquid processing apparatus and process liquid supplying method App 20090078287 - Kamikawa; Yuji ; et al.	2009-03-26
Liquid processing apparatus, liquid processing method, and storage medium App 20090056764 - Minami; Teruomi ; et al.	2009-03-05
Batch forming apparatus, substrate processing system, batch forming method, and storage medium App 20090010748 - Kamikawa; Yuji ; et al.	2009-01-08
Liquid processing apparatus and method Grant 7,412,981 - Egashira , et al. August 19, 2	2008-08-19
Substrate processing system and substrate processing method Grant 7,404,409 - Kamikawa July 29, 2	2008-07-29
Liquid processing apparatus, liquid processing method, computer program, and storage medium App 20080097647 - Tanaka; Hiroshi ; et al.	2008-04-24
Rotary shaft sealing mechanism and liquid processing apparatus Grant 7,347,214 - Egashira , et al. March 25, 2	2008-03-25
Liquid processing apparatus and liquid processing method Grant 7,337,792 - Kamikawa , et al. March 4, 2	2008-03-04
Semiconductor device fabricating system App 20080041525 - Kamikawa; Yuji ; et al.	2008-02-21
Liquid processing apparatus with nozzle having planar ejecting orifices Grant 7,314,054 - Egashira , et al. January 1, 2	2008-01-01
Substrate cleaning method, substrate cleaning system and program storage medium App 20070267040 - Watanabe; Tsukasa ; et al.	2007-11-22
Liquid processing apparatus Grant 7,284,560 - Kamikawa October 23, 2	2007-10-23
Substrate cleaning method, substrate cleaning system and program storage medium App 20070215172 - Watanabe; Tsukasa ; et al.	2007-09-20
Substrate processing apparatus for resist film removal App 20070204885 - Toshima; Takayuki ; et al.	2007-09-06
Substrate processing apparatus for resist film removal Grant 7,191,785 - Toshima , et al. March 20, 2	2007-03-20
Liquid processing apparatus and method App 20070028950 - Egashira; Koji ; et al.	2007-02-08
Fluid heating apparatus App 20070017502 - Kamikawa; Yuji ; et al.	2007-01-25
Vapor drying method, apparatus and recording medium for use in the method App 20070006483 - Kamikawa; Yuji ; et al.	2007-01-11
Processing apparatus and processing method Grant 6,895,979 - Kohama , et al. May 24, 2	2005-05-24
Liquid processing apparatus App 20050103364 - Kamikawa, Yuji	2005-05-19
Substrate processing system and substarate processing method App 20050051195 - Kamikawa, Yuji	2005-03-10
Substrate processing system and substrate processing method Grant 6,861,371 - Kamikawa , et al. March 1, 2	2005-03-01
Substrate processing method and apparatus App 20050011537 - Toshima, Takayuki ; et al.	2005-01-20
Substrate processing method Grant 6,799,586 - Kamikawa , et al. October 5, 2	2004-10-05
System for processing substrate with liquid Grant 6,792,958 - Kamikawa September 21, 2	2004-09-21
Liquid processing apparatus Grant 6,776,173 - Kamikawa August 17, 2	2004-08-17
Apparatus for and method of cleaning objects to be processed Grant 6,746,543 - Kamikawa , et al. June 8, 2	2004-06-08
Rotary substrate processing apparatus and method Grant 6,743,297 - Egashira , et al. June 1, 2	2004-06-01
Liquid processing apparatus Grant 6,725,868 - Kamikawa , et al. April 27, 2	2004-04-27
Liquid processing apparatus with storage tank having an internal and external tank Grant 6,708,702 - Kamikawa March 23, 2	2004-03-23
Processing apparatus with sealing mechanism Grant 6,698,439 - Kamikawa , et al. March 2, 2	2004-03-02
Liquid processing apparatus and method Grant 6,647,642 - Kamikawa , et al. November 18, 2	2003-11-18
Rotary shaft sealing mechanism and liquid processing apparatus App 20030178785 - Egashira, Koji ; et al.	2003-09-25
Liquid processing apparatus and liquid processing method App 20030164179 - Kamikawa, Yuji ; et al.	2003-09-04
Substrate processing method and apparatus Grant 6,613,692 - Toshima , et al. September 2, 2	2003-09-02
Apparatus for and method of cleaning objects to be processed App 20030159718 - Kamikawa, Yuji ; et al.	2003-08-28
Processing apparatus and processing method App 20030127117 - Kohama, Kyouji ; et al.	2003-07-10
Cleaning method and cleaning apparatus for substrate Grant 6,589,359 - Kamikawa , et al. July 8, 2	2003-07-08
Substrate processing apparatus and substrate processing method App 20030106571 - Kamikawa, Yuji ; et al.	2003-06-12
Substrate processing system and substrate processing method App 20030084929 - Kamikawa, Yuji ; et al.	2003-05-08
Processing apparatus and processing method Grant 6,536,452 - Kohama , et al. March 25, 2	2003-03-25
Rotary substrate processing apparatus and method App 20020170571 - Egashira, Koji ; et al.	2002-11-21
Treatment apparatus Grant 6,435,199 - Kamikawa August 20, 2	2002-08-20
System for processing substrate with liquid App 20020078980 - Kamikawa, Yuji	2002-06-27
Liquid processing apparatus and method App 20020073576 - Kamikawa, Yuji ; et al.	2002-06-20
Liquid processing apparatus App 20020056471 - Kamikawa, Yuji ; et al.	2002-05-16
Cleaning method and cleaning apparatus for substrate App 20020053355 - Kamikawa, Yuji ; et al.	2002-05-09
Processing apparatus with sealing mechanism App 20020053367 - Kamikawa, Yuji ; et al.	2002-05-09
Liquid processing apparatus and method App 20020029789 - Egashira, Koji ; et al.	2002-03-14
Apparatus for and method of cleaning object to be processed App 20020017315 - Kamikawa, Yuji ; et al.	2002-02-14
Method of cleaning objects to be processed Grant 6,342,104 - Kamikawa , et al. January 29, 2	2002-01-29
Liquid processing apparatus App 20020000240 - Kamikawa, Yuji	2002-01-03
Substrate processing apparatus and substrate processing method App 20010045224 - Kamikawa, Yuji ; et al.	2001-11-29
Substrate processing apparatus and substrate processing method Grant 6,299,696 - Kamikawa , et al. October 9, 2	2001-10-09
Cleaning apparatus and cleaning method App 20010011548 - Tanaka, Hiroshi ; et al.	2001-08-09
Cleaning And Drying Method And Apparatus For Objects To Be Processed App 20010007259 - NAKASHIMA, SATOSHI ; et al.	2001-07-12
Substrate processing apparatus and substrate processing method App 20010004898 - Kamikawa, Yuji ; et al.	2001-06-28
Washing/drying process apparatus and washing/drying process method Grant 6,247,479 - Taniyama , et al. June 19, 2	2001-06-19
Liquid processing apparatus and liquid processing method App 20010003067 - Kamikawa, Yuji ; et al.	2001-06-07
Method for cleaning a workpiece Grant 6,241,827 - Tanaka , et al. June 5, 2	2001-06-05
Cleaning and drying apparatus for objects to be processed Grant 6,164,297 - Kamikawa December 26, 2	2000-12-26
Apparatus for and method of cleaning object to be processed Grant 6,131,588 - Kamikawa , et al. October 17, 2	2000-10-17
Cleaning and drying apparatus, wafer processing system and wafer processing method Grant 6,068,002 - Kamikawa , et al. May 30, 2	2000-05-30
Apparatus for and method of cleaning objects to be processed Grant 6,045,624 - Kamikawa , et al. April 4, 2	2000-04-04
Drying treatment method and apparatus Grant 6,029,371 - Kamikawa , et al. February 29, 2	2000-02-29
Substrate transporting and processing system Grant 6,009,890 - Kaneko , et al. January 4, 2	2000-01-04
Apparatus and method for drying substrates Grant 5,940,985 - Kamikawa , et al. August 24, 1	1999-08-24
Liquid treatment method and apparatus Grant 5,922,138 - Shindo , et al. July 13, 1	1999-07-13
Substrate cleaning method and a substrate cleaning apparatus Grant 5,862,823 - Kamikawa , et al. January 26, 1	1999-01-26
Washing apparatus, and washing method Grant 5,488,964 - Murakami , et al. February 6, 1	1996-02-06
Washing apparatus Grant 5,226,437 - Kamikawa , et al. July 13, 1	1993-07-13