Kamensky; Sergey

Patent Applications and Registrations

Patent applications and USPTO patent grants for Kamensky; Sergey.The latest application filed is for "systems, methods and metrics for wafer high order shape characterization and wafer classification using wafer dimensional geomet".

Company Profile

2.11.7

Kamensky; Sergey - Campbell CA
Kamensky; Sergey - US

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Systems, Methods And Metrics For Wafer High Order Shape Characterization And Wafer Classification Using Wafer Dimensional Geomet App 20190271654 - Chen; Haiguang ; et al.	2019-09-05
Systems, methods and metrics for wafer high order shape characterization and wafer classification using wafer dimensional geometry tool Grant 10,379,061 - Chen , et al. A	2019-08-13
Systems and methods for wafer structure uniformity monitoring using interferometry wafer geometry tool Grant 10,352,691 - Chen , et al. July 16, 2	2019-07-16
Systems and methods for wafer surface feature detection, classification and quantification with wafer geometry metrology tools Grant 10,330,608 - Chen , et al.	2019-06-25
Systems and methods for wafer surface feature detection and quantification Grant 9,702,829 - Chen , et al. July 11, 2	2017-07-11
Systems, methods and metrics for wafer high order shape characterization and wafer classification using wafer dimensional geometry tool Grant 9,546,862 - Chen , et al. January 17, 2	2017-01-17
Systems and methods of advanced site-based nanotopography for wafer surface metrology Grant 9,177,370 - Chen , et al. November 3, 2	2015-11-03
Methods and systems of object based metrology for advanced wafer surface nanotopography Grant 9,031,810 - Chen , et al. May 12, 2	2015-05-12
Systems, Methods and Metrics for Wafer High Order Shape Characterization and Wafer Classification Using Wafer Dimensional Geometry Tool App 20140114597 - Chen; Haiguang ; et al.	2014-04-24
Methods and systems for improved localized feature quantification in surface metrology tools Grant 8,630,479 - Chen , et al. January 14, 2	2014-01-14
Systems And Methods For Wafer Surface Feature Detection, Classification And Quantification With Wafer Geometry Metrology Tools App 20130304399 - Chen; Haiguang ; et al.	2013-11-14
Systems and Methods of Advanced Site-Based Nanotopography for Wafer Surface Metrology App 20130236085 - Chen; Haiguang ; et al.	2013-09-12
Methods And Systems For Improved Localized Feature Quantification In Surface Metrology Tools App 20120177282 - Chen; Haiguang ; et al.	2012-07-12
Methods And Systems Of Object Based Metrology For Advanced Wafer Surface Nanotopography App 20120179419 - Chen; Haiguang ; et al.	2012-07-12

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