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Patent applications and USPTO patent grants for Kamata; Tadashi.The latest application filed is for "semiconductor integrated circuit device, method for producing the same, and ion implanter for use in the method".
Patent | Date |
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Semiconductor integrated circuit device, method for producing the same, and ion implanter for use in the method Grant 5,244,820 - Kamata , et al. September 14, 1 | 1993-09-14 |
Ion implanting apparatus, having ion contacting surfaces made of high purity silicon, for fabricating semiconductor integrated circuit devices Grant 5,134,301 - Kamata , et al. July 28, 1 | 1992-07-28 |
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