Patent | Date |
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Silicon carbide semiconductor device Grant 11,081,556 - Kamada August 3, 2 | 2021-08-03 |
Silicon Carbide Semiconductor Device App 20200251564 - Kind Code | 2020-08-06 |
Method for controlling resistivity and N-type silicon single crystal Grant 10,400,353 - Hoshi , et al. Sep | 2019-09-03 |
Method for heat treatment of silicon single crystal wafer Grant 10,066,322 - Hoshi , et al. September 4, 2 | 2018-09-04 |
Method for heat treatment of silicon single crystal wafer Grant 9,938,640 - Hoshi , et al. April 10, 2 | 2018-04-10 |
Method for heat treatment of silicon single crystal wafer Grant 9,850,595 - Hoshi , et al. December 26, 2 | 2017-12-26 |
Method For Heat Treatment Of Silicon Single Crystal Wafer App 20170342596 - HOSHI; Ryoji ;   et al. | 2017-11-30 |
Method for evaluating concentration of defect in silicon single crystal substrate Grant 9,773,710 - Kamada , et al. September 26, 2 | 2017-09-26 |
Method For Controlling Resistivity And N-type Silicon Single Crystal App 20170260645 - HOSHI; Ryoji ;   et al. | 2017-09-14 |
Method for manufacturing a defect-controlled low-oxygen concentration silicon single crystal wafer Grant 9,650,725 - Hoshi , et al. May 16, 2 | 2017-05-16 |
Method For Heat Treatment Of Silicon Single Crystal Wafer App 20170037541 - HOSHI; Ryoji ;   et al. | 2017-02-09 |
Method For Heat Treatment Of Silicon Single Crystal Wafer App 20170002480 - HOSHI; Ryoji ;   et al. | 2017-01-05 |
Method For Evaluating Concentration Of Defect In Silicon Single Crystal Substrate App 20160300768 - KAMADA; Hiroyuki ;   et al. | 2016-10-13 |
Method for evaluating silicon single crystal and method for manufacturing silicon single crystal Grant 9,111,883 - Hoshi , et al. August 18, 2 | 2015-08-18 |
Method For Manufacturing Silicon Single Crystal Wafer App 20150020728 - Hoshi; Ryoji ;   et al. | 2015-01-22 |
Method For Calculating Nitrogen Concentration In Silicon Single Crystal And Method For Calculating Resistivity Shift Amount App 20140379276 - Hoshi; Ryoji ;   et al. | 2014-12-25 |
Method For Evaluating Silicon Single Crystal And Method For Manufacturing Silicon Single Crystal App 20140363904 - Hoshi; Ryoji ;   et al. | 2014-12-11 |
Silica Glass Crucible, Method For Manufacturing Same, And Method For Manufacturing Silicon Single Crystal App 20130340671 - Kimura; Akihiro ;   et al. | 2013-12-26 |
Silicon Single Crystal Wafer App 20130323153 - Hoshi; Ryoji ;   et al. | 2013-12-05 |
Fabrication method of semiconductor device Grant 8,247,875 - Kamada August 21, 2 | 2012-08-21 |
Fabrication Method Of Semiconductor Device App 20110049644 - KAMADA; Hiroyuki | 2011-03-03 |
Fabrication method of semiconductor device Grant 7,851,316 - Kamada December 14, 2 | 2010-12-14 |
Fabrication Method Of Semiconductor Device App 20090191682 - KAMADA; Hiroyuki | 2009-07-30 |
Printed circuit board Grant 7,544,899 - Kamada , et al. June 9, 2 | 2009-06-09 |
Semiconductor device fabrication method and semiconductor device fabrication system for minimizing film-thickness variations Grant 7,294,569 - Kamada November 13, 2 | 2007-11-13 |
Manufacturing method for semiconductor device and rapid thermal annealing apparatus App 20060183290 - Kamada; Hiroyuki ;   et al. | 2006-08-17 |
Printed circuit board App 20060125081 - Kamada; Hiroyuki ;   et al. | 2006-06-15 |
Semiconductor device and manufacturing method thereof App 20060076558 - Morita; Kiyoyuki ;   et al. | 2006-04-13 |
Polishing method, polishing system and process-managing system Grant 6,914,000 - Kamada July 5, 2 | 2005-07-05 |
Semiconductor device fabrication method and semiconductor device fabrication system App 20050014377 - Kamada, Hiroyuki | 2005-01-20 |
Polishing method, polishing system and process-managing system App 20030068889 - Kamada, Hiroyuki | 2003-04-10 |