Patent | Date |
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Process For Thin Film Deposition Through Controlled Formation Of Vapor Phase Transient Species App 20220119940 - ARKLES; Barry C. ;   et al. | 2022-04-21 |
Silicon Carbide Thin Films and Vapor Deposition Methods Thereof App 20220098732 - ARKLES; Barry C. ;   et al. | 2022-03-31 |
Process for thin film deposition through controlled formation of vapor phase transient species Grant 11,248,291 - Arkles , et al. February 15, 2 | 2022-02-15 |
Silicon-based Thin Films From N-alkyl Substituted Perhydridocyclotrisilazanes App 20210371981 - KALOYEROS; Alain E. ;   et al. | 2021-12-02 |
Process For Thin Film Deposition Through Controlled Formation Of Vapor Phase Transient Species App 20210140036 - ARKLES; Barry C. ;   et al. | 2021-05-13 |
Process for pulsed thin film deposition Grant 10,961,624 - Arkles , et al. March 30, 2 | 2021-03-30 |
Process for Pulsed Thin Film Deposition App 20200318236 - ARKLES; Barry C. ;   et al. | 2020-10-08 |
Methods and System for the Integrated Synthesis, Delivery, and Processing of Source Chemicals for Thin Film Manufacturing App 20190112709 - ARKLES; Barry C. ;   et al. | 2019-04-18 |
Methods for chemical vapor deposition of titanium-silicon-nitrogen films App 20060088661 - Arkles; Barry C. ;   et al. | 2006-04-27 |
Process for low-temperature metal-organic chemical vapor deposition of tungsten nitride and tungsten nitride films Grant 6,884,466 - Kaloyeros , et al. April 26, 2 | 2005-04-26 |
Method for low-temperature organic chemical vapor deposition of tungsten nitride, tungsten nitride films and tungsten nitride diffusion barriers for computer interconnect metallization App 20030198587 - Kaloyeros, Alain E. ;   et al. | 2003-10-23 |
Silicon based films formed from iodosilane precursors and method of making the same Grant 6,586,056 - Arkles , et al. July 1, 2 | 2003-07-01 |
Methodology for in-situ doping of aluminum coatings Grant 6,534,133 - Kaloyeros , et al. March 18, 2 | 2003-03-18 |
Methods for chemical vapor deposition of titanium-silicon-nitrogen films App 20020197403 - Arkles, Barry C. ;   et al. | 2002-12-26 |
Silicon based films formed from iodosilane precursors and method of making the same App 20020119327 - Arkles, Barry C. ;   et al. | 2002-08-29 |
Method of interlayer mediated epitaxy of cobalt silicide from low temperature chemical vapor deposition of cobalt Grant 6,346,477 - Kaloyeros , et al. February 12, 2 | 2002-02-12 |
Methods for chemical vapor deposition of titanium-silicon-nitrogen films App 20010051215 - Arkles, Barry C. ;   et al. | 2001-12-13 |
MOCVD processes using precursors based on organometalloid ligands Grant 6,099,903 - Kaloyeros , et al. August 8, 2 | 2000-08-08 |
Methods for chemical vapor deposition and preparation of conformal titanium-based films Grant 6,090,709 - Kaloyeros , et al. July 18, 2 | 2000-07-18 |
Conformal pure and doped aluminum coatings and a methodology and apparatus for their preparation Grant 6,077,571 - Kaloyeros , et al. June 20, 2 | 2000-06-20 |
Method for the chemical vapor deposition of copper-based films and copper source precursors for the same Grant 6,066,196 - Kaloyeros , et al. May 23, 2 | 2000-05-23 |
Method for the chemical vapor deposition of copper-based films Grant 6,037,001 - Kaloyeros , et al. March 14, 2 | 2000-03-14 |
Silicon nitrogen-based films and method of making the same Grant 5,968,611 - Kaloyeros , et al. October 19, 1 | 1999-10-19 |
Tantalum and tantalum-based films and methods of making the same Grant 5,919,531 - Arkles , et al. July 6, 1 | 1999-07-06 |