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Patent applications and USPTO patent grants for Kalk; Franklin Dean.The latest application filed is for "photomask and method for manufacturing the same".
Patent | Date |
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Photomask and method for manufacturing the same Grant 7,056,623 - Dieu , et al. June 6, 2 | 2006-06-06 |
Method and apparatus for coupling a pellicle to a photomask using a non-distorting mechanism Grant 6,911,283 - Gordon , et al. June 28, 2 | 2005-06-28 |
Photomask and method for forming an opaque border on the same Grant 6,803,158 - Gordon , et al. October 12, 2 | 2004-10-12 |
Alternating aperture phase shifting photomask with improved transmission balancing Grant 6,780,548 - Kalk August 24, 2 | 2004-08-24 |
Alternating aperture phase shifting photomask with improved intensity balancing Grant 6,759,171 - Kalk July 6, 2 | 2004-07-06 |
Method and apparatus for evaluating the runability of a photomask inspection tool Grant 6,721,695 - Chen , et al. April 13, 2 | 2004-04-13 |
Photomask and method for manufacturing the same App 20030138707 - Dieu, Laurent ;   et al. | 2003-07-24 |
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