Kakizaki; Yukio

Patent Applications and Registrations

Patent applications and USPTO patent grants for Kakizaki; Yukio.The latest application filed is for "movable body apparatus, exposure apparatus and optical system unit, and device manufacturing method".

Company Profile

0.14.3

Kakizaki; Yukio - Yokohama N/A JP
Kakizaki; Yukio - Yokohama-shi JP
Kakizaki; Yukio - Kumagaya JP
Kakizaki; Yukio - Kanagawa-ken JP
Kakizaki; Yukio - Kawasaki JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Movable body apparatus, exposure apparatus and optical system unit, and device manufacturing method Grant 8,749,753 - Tanaka , et al. June 10, 2	2014-06-10
Movable Body Apparatus, Exposure Apparatus And Optical System Unit, And Device Manufacturing Method App 20090059190 - Tanaka; Keiichi ; et al.	2009-03-05
Stage apparatus including non-containing gas bearings and microlithography apparatus comprising same Grant 6,583,597 - Tanaka , et al. June 24, 2	2003-06-24
Stage apparatus including non-containing gas bearings and microlithography apparatus comprising same App 20020070699 - Tanaka, Keiichi ; et al.	2002-06-13
Projection exposure apparatus App 20020021431 - Hamada, Tomohide ; et al.	2002-02-21
Exposure apparatus Grant 6,049,372 - Kato , et al. April 11, 2	2000-04-11
Mask substrate, projection exposure apparatus equipped with the mask substrate, and a pattern formation method utilizing the projection exposure apparatus Grant 6,040,096 - Kakizaki , et al. March 21, 2	2000-03-21
Mask substrate, projection exposure apparatus equipped with the mask substrate, and a pattern formation method utilizing the projection exposure apparatus Grant 5,894,056 - Kakizaki , et al. April 13, 1	1999-04-13
Exposure apparatus Grant 5,617,211 - Nara , et al. April 1, 1	1997-04-01
Conveyor arm apparatus with gap detection Grant 4,803,373 - Imamura , et al. February 7, 1	1989-02-07
Foreign substance inspecting system including a calibration standard Grant 4,776,693 - Imamura , et al. October 11, 1	1988-10-11
Stage device with levelling mechanism Grant 4,770,531 - Tanaka , et al. September 13, 1	1988-09-13
Apparatus for conveying and inspecting a substrate Grant 4,716,299 - Tanaka , et al. December 29, 1	1987-12-29
Substrate positioning apparatus Grant 4,655,584 - Tanaka , et al. April 7, 1	1987-04-07
Container for holding substrate Grant 4,422,547 - Abe , et al. December 27, 1	1983-12-27
Cross-movable carriage Grant 4,113,223 - Kakizaki September 12, 1	1978-09-12

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