KAKIMOTO; Akinobu
Patent Applications and Registrations
Patent applications and USPTO patent grants for KAKIMOTO; Akinobu.The latest application filed is for "plasma processing apparatus and plasma processing method".
Company Profile
4.39.46
- KAKIMOTO; Akinobu - Yamanashi JP
- - Yamanashi JP
- KAKIMOTO; Akinobu - Nirasaki City JP
- Kakimoto; Akinobu - Nirasaki JP
- KAKIMOTO; Akinobu - Nirasaki-Shi JP
Patent Activity
| Patent | Date |
|---|---|
| Plasma Processing Apparatus And Plasma Processing Method App 20200035496 - KAKIMOTO; Akinobu ; et al. | 2020-01-30 |
| Processing Apparatus App 20200035497A1 - | 2020-01-30 |
| Substrate processing system and substrate processing method Grant 10,460,950 - Kakimoto , et al. Oc | 2019-10-29 |
| Cleaning Method and Film Forming Apparatus App 20190283093 - SON; Sung Duk ; et al. | 2019-09-19 |
| Method and apparatus of forming silicon nitride film Grant 9,920,422 - Kakimoto , et al. March 20, 2 | 2018-03-20 |
| Method Of Forming Carbon Film, Apparatus Of Forming Carbon Film And Storage Medium App 20170342548 - SHIMIZU; Akira ; et al. | 2017-11-30 |
| Selective epitaxial growth method and film forming apparatus Grant 9,797,067 - Suzuki , et al. October 24, 2 | 2017-10-24 |
| Thin film forming method Grant 9,777,366 - Kakimoto , et al. October 3, 2 | 2017-10-03 |
| Silicon film forming method, thin film forming method and cross-sectional shape control method Grant 9,758,865 - Hasebe , et al. September 12, 2 | 2017-09-12 |
| Depression filling method and processing apparatus Grant 9,646,879 - Kakimoto , et al. May 9, 2 | 2017-05-09 |
| Substrate Processing System And Substrate Processing Method App 20170125255 - KAKIMOTO; Akinobu ; et al. | 2017-05-04 |
| Method and apparatus of forming carbon-containing silicon film Grant 9,490,122 - Kakimoto November 8, 2 | 2016-11-08 |
| Method And Apparatus For Forming Carbon Film App 20160251755 - KITAMURA; Masayuki ; et al. | 2016-09-01 |
| Depression filling method and processing apparatus Grant 9,425,073 - Onodera , et al. August 23, 2 | 2016-08-23 |
| Apparatus for forming silicon-containing thin film Grant 9,353,442 - Okada , et al. May 31, 2 | 2016-05-31 |
| Method And Apparatus Of Forming Silicon Nitride Film App 20160108519 - KAKIMOTO; Akinobu ; et al. | 2016-04-21 |
| Method and apparatus for forming silicon film Grant 9,318,328 - Komori , et al. April 19, 2 | 2016-04-19 |
| Method and apparatus of forming silicon nitride film Grant 9,263,250 - Kakimoto , et al. February 16, 2 | 2016-02-16 |
| Thin film formation method Grant 9,190,271 - Hasebe , et al. November 17, 2 | 2015-11-17 |
| Vacuum Processing Apparatus App 20150275360 - HASEBE; Kazuhide ; et al. | 2015-10-01 |
| Thin film forming method and film forming apparatus Grant 9,145,604 - Kakimoto , et al. September 29, 2 | 2015-09-29 |
| Thin Film Forming Method App 20150270126 - KAKIMOTO; Akinobu ; et al. | 2015-09-24 |
| Amorphous silicon film formation method and amorphous silicon film formation apparatus Grant 9,123,782 - Hasebe , et al. September 1, 2 | 2015-09-01 |
| Method and Apparatus of Forming Carbon-Containing Silicon Film App 20150243496 - KAKIMOTO; Akinobu | 2015-08-27 |
| Amorphous Silicon Film Formation Method And Amorphous Silicon Film Formation Apparatus App 20150206795 - HASEBE; Kazuhide ; et al. | 2015-07-23 |
| Depression Filling Method and Processing Apparatus App 20150187643 - KAKIMOTO; Akinobu ; et al. | 2015-07-02 |
| Apparatus For Forming Silicon-containing Thin Film App 20150101532 - OKADA; Mitsuhiro ; et al. | 2015-04-16 |
| Amorphous silicon film formation method and amorphous silicon film formation apparatus Grant 9,006,021 - Hasebe , et al. April 14, 2 | 2015-04-14 |
| Film deposition method and film deposition apparatus Grant 9,005,459 - Kakimoto , et al. April 14, 2 | 2015-04-14 |
| Method and Apparatus of Forming Silicon Nitride Film App 20150099374 - KAKIMOTO; Akinobu ; et al. | 2015-04-09 |
| Depression Filling Method And Processing Apparatus App 20150056791 - ONODERA; Satoshi ; et al. | 2015-02-26 |
| Silicon Film Forming Method, Thin Film Forming Method and Cross-Sectional Shape Control Method App 20150037970 - HASEBE; Kazuhide ; et al. | 2015-02-05 |
| Method of forming seed layer and method of forming silicon-containing thin film Grant 8,946,065 - Okada , et al. February 3, 2 | 2015-02-03 |
| Film formation apparatus Grant 8,945,339 - Kakimoto , et al. February 3, 2 | 2015-02-03 |
| Method and apparatus for forming amorphous silicon film Grant 8,895,414 - Kakimoto , et al. November 25, 2 | 2014-11-25 |
| Method And Apparatus For Forming Amorphous Silicon Film App 20140342534 - KAKIMOTO; Akinobu ; et al. | 2014-11-20 |
| Method Of Forming A Germanium Thin Film App 20140331928 - KAKIMOTO; Akinobu ; et al. | 2014-11-13 |
| Selective Epitaxial Growth Method And Film Forming Apparatus App 20140251203 - SUZUKI; Daisuke ; et al. | 2014-09-11 |
| Method of forming a germanium thin film Grant 8,815,714 - Kakimoto , et al. August 26, 2 | 2014-08-26 |
| Method and apparatus for forming amorphous silicon film Grant 8,802,547 - Kakimoto , et al. August 12, 2 | 2014-08-12 |
| Thin Film Formation Method App 20140206180 - HASEBE; Kazuhide ; et al. | 2014-07-24 |
| Thin film formation method and film formation apparatus Grant 8,728,957 - Hasebe , et al. May 20, 2 | 2014-05-20 |
| Method for Sr--Ti--O-based film formation Grant 8,679,913 - Kawano , et al. March 25, 2 | 2014-03-25 |
| Method and device for cleaning a substrate and storage medium Grant 8,673,086 - Tamura , et al. March 18, 2 | 2014-03-18 |
| Method And Apparatus For Forming Silicon Film App 20130323915 - KOMORI; Katsuhiko ; et al. | 2013-12-05 |
| Method and apparatus for forming silicon film Grant 8,586,448 - Kakimoto , et al. November 19, 2 | 2013-11-19 |
| Method Of Forming A Germanium Thin Film App 20130230975 - KAKIMOTO; Akinobu ; et al. | 2013-09-05 |
| Method and apparatus for forming oxide film on carbon film Grant 8,518,834 - Kakimoto , et al. August 27, 2 | 2013-08-27 |
| Method Of Forming Seed Layer And Method Of Forming Silicon-containing Thin Film App 20130109155 - OKADA; Mitsuhiro ; et al. | 2013-05-02 |
| Thin Film Forming Method And Film Forming Apparatus App 20130084693 - KAKIMOTO; Akinobu ; et al. | 2013-04-04 |
| Method for forming SrTiO.sub.3 film and storage medium Grant 8,361,550 - Kakimoto , et al. January 29, 2 | 2013-01-29 |
| Method And Apparatus For Forming Amorphous Silicon Film App 20130023110 - KAKIMOTO; Akinobu ; et al. | 2013-01-24 |
| Method And Apparatus For Forming Silicon Film App 20130005142 - Kakimoto; Akinobu ; et al. | 2013-01-03 |
| Film Deposition Method And Film Deposition Apparatus App 20120267340 - KAKIMOTO; Akinobu ; et al. | 2012-10-25 |
| Method And Apparatus For Forming Oxide Film On Carbon Film App 20120164844 - KAKIMOTO; Akinobu ; et al. | 2012-06-28 |
| Substrate Processing Method, Storage Medium, And Substrate Processing Apparatus App 20120118231 - TAKAGI; Toshio ; et al. | 2012-05-17 |
| Film Formation Apparatus App 20120103518 - KAKIMOTO; Akinobu ; et al. | 2012-05-03 |
| Method For Forming Metal Nitride Film App 20120034793 - Narushima; Kensaku ; et al. | 2012-02-09 |
| Silicon Film Formation Method And Silicon Film Formation Apparatus App 20110287629 - KAKIMOTO; Akinobu ; et al. | 2011-11-24 |
| Thin Film Formation Method And Film Formation Apparatus App 20110269315 - Hasebe; Kazuhide ; et al. | 2011-11-03 |
| Amorphous Silicon Film Formation Method And Amorphous Silicon Film Formation Apparatus App 20110263105 - HASEBE; Kazuhide ; et al. | 2011-10-27 |
| Method And Device For Cleaning A Substrate And Storage Medium App 20110155177 - Tamura; Akitake ; et al. | 2011-06-30 |
| Film Forming Method And Storage Medium App 20110052810 - Kawano; Yumiko ; et al. | 2011-03-03 |
| Sr-ti-o-based Film Forming Method And Storage Medium App 20110036288 - Kawano; Yumiko ; et al. | 2011-02-17 |
| METHOD FOR Sr-Ti-O-BASED FILM FORMATION AND STORAGE MEDIUM App 20110014797 - Kawano; Yumiko ; et al. | 2011-01-20 |
| Method for forming SrTiO.sub.3 film Grant 7,816,282 - Kawano , et al. October 19, 2 | 2010-10-19 |
| Method For Forming Srtio3 Film And Storage Medium App 20100015335 - Kakimoto; Akinobu ; et al. | 2010-01-21 |
| Processing Apparatus App 20090277389 - Kakimoto; Akinobu | 2009-11-12 |
| Processing device using shower head structure and processing method Grant 7,615,251 - Kakimoto , et al. November 10, 2 | 2009-11-10 |
| Method Of Substrate Treatment, Recording Medium And Substrate Treating Apparatus App 20090220692 - Takagi; Toshio ; et al. | 2009-09-03 |
| Method For Forming Srtio3 Film App 20080175994 - KAWANO; Yumiko ; et al. | 2008-07-24 |
| Thin Film Capacitor, Method for Forming Same, and Computer Readable Recording Medium App 20070228442 - Kakimoto; Akinobu | 2007-10-04 |
| Processing device using shower head structure and processing method App 20050223981 - Kakimoto, Akinobu ; et al. | 2005-10-13 |
| Single-substrate-heat-processing apparatus and method for semiconductor process App 20020022379 - Ashizawa, Hiroaki ; et al. | 2002-02-21 |
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