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Semiconductor Device And Manufacturing Method Of The Semiconductor Device App 20220216341 - YAMAZAKI; Shunpei ;   et al. | 2022-07-07 |
Semiconductor device having a laminate contact plug of specified configuration including a conductive metal oxide layer Grant 11,362,034 - Kakehata , et al. June 14, 2 | 2022-06-14 |
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Manufacturing Method Of Semiconductor Device App 20210320193 - YAMAZAKI; Shunpei ;   et al. | 2021-10-14 |
Semiconductor Device And Method For Manufacturing The Semiconductor Device App 20210242207 - YAMAZAKI; Shunpei ;   et al. | 2021-08-05 |
Semiconductor Device And Method For Manufacturing The Semiconductor Device App 20210233769 - YAMAZAKI; Shunpei ;   et al. | 2021-07-29 |
Semiconductor Device and Method for Manufacturing Semiconductor Device App 20210234046 - KAKEHATA; Tetsuya ;   et al. | 2021-07-29 |
Method for manufacturing semiconductor device Grant 10,985,278 - Kakehata April 20, 2 | 2021-04-20 |
Semiconductor Device And Method For Manufacturing Semiconductor Device App 20200402910 - KAKEHATA; Tetsuya ;   et al. | 2020-12-24 |
Negative electrode for lithium secondary battery, lithium secondary battery, and manufacturing methods thereof Grant 10,026,966 - Kakehata , et al. July 17, 2 | 2018-07-17 |
Method for manufacturing SOI substrate Grant 9,837,300 - Kakehata , et al. December 5, 2 | 2017-12-05 |
Method For Manufacturing Semiconductor Device App 20170025543 - KAKEHATA; Tetsuya | 2017-01-26 |
SOI substrate, method for manufacturing the same, and semiconductor device Grant 9,536,774 - Ohnuma , et al. January 3, 2 | 2017-01-03 |
Nonvolatile semiconductor memory device and manufacturing method thereof, semiconductor device and manufacturing method thereof, and manufacturing method of insulating film Grant 9,231,070 - Kakehata , et al. January 5, 2 | 2016-01-05 |
Semiconductor device and manufacturing method thereof Grant 9,184,173 - Takano , et al. November 10, 2 | 2015-11-10 |
Semiconductor substrate and method for manufacturing the same Grant 8,912,624 - Kakehata December 16, 2 | 2014-12-16 |
Method of manufacturing a semiconductor device and a non-volatile semiconductor storage device including the formation of an insulating layer using a plasma treatment Grant 8,895,388 - Kakehata , et al. November 25, 2 | 2014-11-25 |
SOI substrate and manufacturing method thereof Grant 8,884,371 - Kakehata , et al. November 11, 2 | 2014-11-11 |
Soi Substrate, Method For Manufacturing The Same, And Semiconductor Device App 20140329371 - OHNUMA; Hideto ;   et al. | 2014-11-06 |
Manufacturing method of SOI substrate Grant 8,828,844 - Ohnuma , et al. September 9, 2 | 2014-09-09 |
SOI substrate, method for manufacturing the same, and semiconductor device Grant 8,823,063 - Ohnuma , et al. September 2, 2 | 2014-09-02 |
Method of manufacturing semiconductor device Grant 8,815,657 - Ozawa , et al. August 26, 2 | 2014-08-26 |
Soi Substrate And Manufacturing Method Thereof App 20140103409 - KAKEHATA; Tetsuya ;   et al. | 2014-04-17 |
Semiconductor Device And Manufacturing Method Thereof App 20140035028 - TAKANO; Tamae ;   et al. | 2014-02-06 |
SOI substrate and manufacturing method thereof Grant 8,633,542 - Kakehata , et al. January 21, 2 | 2014-01-21 |
Semiconductor device and manufacturing method thereof Grant 8,581,332 - Takano , et al. November 12, 2 | 2013-11-12 |
Silicon nitride film, a semiconductor device, a display device and a method for manufacturing a silicon nitride film Grant 8,535,965 - Maekawa , et al. September 17, 2 | 2013-09-17 |
Method for manufacturing semiconductor device Grant 8,470,648 - Yamazaki , et al. June 25, 2 | 2013-06-25 |
Negative Electrode For Lithium Secondary Battery, Lithium Secondary Battery, And Manufacturing Methods Thereof App 20130149605 - KAKEHATA; Tetsuya ;   et al. | 2013-06-13 |
Method for manufacturing semiconductor device Grant 8,420,504 - Kato , et al. April 16, 2 | 2013-04-16 |
Substrate for manufacturing semiconductor device and manufacturing method thereof Grant 8,390,067 - Kakehata , et al. March 5, 2 | 2013-03-05 |
Method For Manufacturing Soi Substrate App 20120282757 - KAKEHATA; Tetsuya ;   et al. | 2012-11-08 |
Silicon Nitride Film, A Semiconductor Device, A Display Device and a Method for Manufacturing a Silicon Nitride Film App 20120270413 - Maekawa; Shinji ;   et al. | 2012-10-25 |
Method for manufacturing semiconductor substrate Grant 8,273,611 - Kakehata , et al. September 25, 2 | 2012-09-25 |
Method for manufacturing SOI substrate Grant 8,236,668 - Ohnuma , et al. August 7, 2 | 2012-08-07 |
Silicon nitride film, a semiconductor device, a display device and a method for manufacturing a silicon nitride film Grant 8,227,805 - Maekawa , et al. July 24, 2 | 2012-07-24 |
Semiconductor substrate and semiconductor device and manufacturing method of the same Grant 8,227,866 - Kakehata July 24, 2 | 2012-07-24 |
Method for manufacturing SOI substrate Grant 8,207,045 - Kakehata , et al. June 26, 2 | 2012-06-26 |
Manufacturing method of semiconductor device Grant 8,114,722 - Kakehata February 14, 2 | 2012-02-14 |
Soi Substrate, Method For Manufacturing The Same, And Semiconductor Device App 20120025274 - OHNUMA; Hideto ;   et al. | 2012-02-02 |
Soi Substrate And Manufacturing Method Thereof App 20110316082 - KAKEHATA; Tetsuya ;   et al. | 2011-12-29 |
Semiconductor Device And Manufacturing Method Thereof App 20110291173 - Takano; Tamae ;   et al. | 2011-12-01 |
Semiconductor Substrate And Semiconductor Device And Manufacturing Method Of The Same App 20110248377 - Kakehata; Tetsuya | 2011-10-13 |
SOI substrate, method for manufacturing the same, and semiconductor device Grant 8,034,694 - Ohnuma , et al. October 11, 2 | 2011-10-11 |
SOI substrate and manufacturing method thereof Grant 8,030,169 - Kakehata , et al. October 4, 2 | 2011-10-04 |
Nonvolatile Semiconductor Memory Device And Manufacturing Method Thereof, Semiconductor Device And Manufacturing Method Thereof, And Manufacturing Method Of Insulating Film App 20110227139 - KAKEHATA; Tetsuya ;   et al. | 2011-09-22 |
Semiconductor device and manufacturing method thereof Grant 8,022,469 - Takano , et al. September 20, 2 | 2011-09-20 |
Semiconductor substrate and semiconductor device and manufacturing method of the same Grant 7,994,022 - Kakehata August 9, 2 | 2011-08-09 |
Method for manufacturing semiconductor device Grant 7,989,315 - Kakehata , et al. August 2, 2 | 2011-08-02 |
Nonvolatile semiconductor memory device and manufacturing method thereof, semiconductor device and manufacturing method thereof, and manufacturing method of insulating film Grant 7,955,995 - Kakehata , et al. June 7, 2 | 2011-06-07 |
Substrate For Manufacturing Semiconductor Device And Manufacturing Method Thereof App 20110115045 - KAKEHATA; Tetsuya ;   et al. | 2011-05-19 |
Semiconductor Device And Manufacturing Method Thereof App 20110073934 - TAKANO; Tamae ;   et al. | 2011-03-31 |
Method For Manufacturing Semiconductor Device App 20110053343 - KATO; Sho ;   et al. | 2011-03-03 |
Semiconductor Device App 20110027968 - YAMAZAKI; Shunpei ;   et al. | 2011-02-03 |
Substrate for manufacturing semiconductor device and manufacturing method thereof Grant 7,875,532 - Kakehata , et al. January 25, 2 | 2011-01-25 |
Semiconductor device and method for manufacturing the same Grant 7,851,332 - Yamazaki , et al. December 14, 2 | 2010-12-14 |
Manufacturing method of semiconductor device Grant 7,851,279 - Takano , et al. December 14, 2 | 2010-12-14 |
Method for manufacturing semiconductor device Grant 7,842,584 - Kato , et al. November 30, 2 | 2010-11-30 |
Semiconductor Substrate, Method For Manufacturing Semiconductor Substrate, Semiconductor Device, And Electronic Device App 20100291753 - KAKEHATA; Tetsuya ;   et al. | 2010-11-18 |
Semiconductor Substrate And Method For Manufacturing The Same App 20100237458 - KAKEHATA; Tetsuya | 2010-09-23 |
Semiconductor device, electronic device and method for manufacturing semiconductor device Grant 7,790,563 - Kakehata September 7, 2 | 2010-09-07 |
Semiconductor substrate and method for manufacturing the same Grant 7,781,306 - Kakehata August 24, 2 | 2010-08-24 |
Semiconductor substrate, method for manufacturing semiconductor substrate, semiconductor device, and electronic device Grant 7,763,502 - Kakehata , et al. July 27, 2 | 2010-07-27 |
Method For Manufacturing Semiconductor Device App 20100136765 - KAKEHATA; Tetsuya ;   et al. | 2010-06-03 |
Semiconductor device, manufacturing method thereof, liquid crystal display device, RFID tag, light emitting device, and electronic device Grant 7,723,205 - Kakehata May 25, 2 | 2010-05-25 |
Method For Manufacturing Soi Substrate App 20100120225 - KAKEHATA; Tetsuya ;   et al. | 2010-05-13 |
Method for manufacturing SOI substrate Grant 7,696,058 - Kakehata , et al. April 13, 2 | 2010-04-13 |
Method Of Manufacturing Soi Substrate App 20100075470 - OZAWA; Suguru ;   et al. | 2010-03-25 |
Manufacturing method of SOI substrate and manufacturing method of semiconductor device Grant 7,678,668 - Shimomura , et al. March 16, 2 | 2010-03-16 |
Soi Substrate And Manufacturing Method Thereof App 20100006940 - KAKEHATA; Tetsuya ;   et al. | 2010-01-14 |
Semiconductor device and manufacturing method thereof Grant 7,608,490 - Yamazaki , et al. October 27, 2 | 2009-10-27 |
Manufacturing Method Of Semiconductor Device App 20090203176 - KAKEHATA; Tetsuya | 2009-08-13 |
Method For Manufacturing Semiconductor Device App 20090162992 - KATO; Sho ;   et al. | 2009-06-25 |
Method For Manufacturing Soi Substrate App 20090111236 - Kakehata; Tetsuya ;   et al. | 2009-04-30 |
Manufacturing Method Of Soi Substrate App 20090111248 - OHNUMA; Hideto ;   et al. | 2009-04-30 |
Semiconductor Substrate And Semiconductor Device And Manufacturing Method Of The Same App 20090102008 - KAKEHATA; Tetsuya | 2009-04-23 |
Method For Manufacturing Soi Substrate App 20090098739 - OHNUMA; Hideto ;   et al. | 2009-04-16 |
Semiconductor Device And Method For Manufacturing The Same App 20090096054 - YAMAZAKI; Shunpei ;   et al. | 2009-04-16 |
Semiconductor Device And Electronic Appliance App 20090072343 - OHNUMA; Hideto ;   et al. | 2009-03-19 |
Semiconductor device App 20090050941 - Yamazaki; Shunpei ;   et al. | 2009-02-26 |
Semiconductor device, electronic device and method for manufacturing semiconductor device App 20090017568 - Kakehata; Tetsuya | 2009-01-15 |
Manufacturing method of SOI substrate and manufacturing method of semiconductor device App 20090011575 - Shimomura; Akihisa ;   et al. | 2009-01-08 |
Semiconductor device and manufacturing method thereof App 20090001452 - Takano; Tamae ;   et al. | 2009-01-01 |
Semiconductor substrate and maehtod for manufacturing the same App 20080315351 - Kakehata; Tetsuya | 2008-12-25 |
Semiconductor substrate, method for manufacturing semiconductor substrate, semiconductor device, and electronic device App 20080318394 - Kakehata; Tetsuya ;   et al. | 2008-12-25 |
Substrate for manufacturing semiconductor device and manufacturing method thereof App 20080308897 - Kakehata; Tetsuya ;   et al. | 2008-12-18 |
Nonvolatile semiconductor memory device and manufacturing method thereof, semiconductor device and manufacturing method thereof, and manufacturing method of insulating film App 20080290393 - Kakehata; Tetsuya ;   et al. | 2008-11-27 |
SOI substrate, method for manufacturing the same, and semiconductor device App 20080246109 - Ohnuma; Hideto ;   et al. | 2008-10-09 |
Manufacturing method of semiconductor device Grant 7,416,928 - Kakehata , et al. August 26, 2 | 2008-08-26 |
Method of manufacturing semiconductor device and method of manufacturing nonvolatile semiconductor storage device App 20080020528 - Kakehata; Tetsuya ;   et al. | 2008-01-24 |
A Silicon Nitride Film, A Semiconductor Device, A Display Device and a Method for Manufacturing a Silicon Nitride Film App 20070253881 - Maekawa; Shinji ;   et al. | 2007-11-01 |
Silicon nitride film, a semiconductor device, a display device and a method for manufacturing a silicon nitride film Grant 7,274,038 - Maekawa , et al. September 25, 2 | 2007-09-25 |
Semiconductor device, manufacturing method thereof, liquid crystal display device, RFID tag, light emitting device, and electronic device App 20070069401 - Kakehata; Tetsuya | 2007-03-29 |
Semiconductor device and manufacturing method thereof App 20060275710 - Yamazaki; Shunpei ;   et al. | 2006-12-07 |
Manufacturing method of semiconductor device App 20060051914 - Kakehata; Tetsuya ;   et al. | 2006-03-09 |
Silicon nitride film, a semiconductor device, a display device and a method for manufacturing a silicon nitride film App 20040262613 - Maekawa, Shinji ;   et al. | 2004-12-30 |