Kakegawa; Takashi
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kakegawa; Takashi.The latest application filed is for "valve device, processing apparatus, and control method".
- Kakegawa; Takashi - Niraski JP
- KAKEGAWA; Takashi - Nirasaki City JP
- Kakegawa; Takashi - Yamanashi JP
- Kakegawa; Takashi - Nirasaki JP
- KAKEGAWA; Takashi - Nirasaki-Shi JP
| Patent | Date |
|---|---|
| Valve device, processing apparatus, and control method Grant 11,306,847 - Kimoto , et al. April 19, 2 | 2022-04-19 |
| Valve Device, Processing Apparatus, And Control Method App 20200056724 - KIMOTO; Tomohisa ; et al. | 2020-02-20 |
| Gas Supply Apparatus And Film Forming Apparatus App 20190078207 - Yagi; Hironori ; et al. | 2019-03-14 |
| Gas treatment apparatus and gas treatment method Grant 10,156,014 - Kakegawa , et al. Dec | 2018-12-18 |
| Gas Treatment Apparatus And Gas Treatment Method App 20180171478 - KAKEGAWA; Takashi ; et al. | 2018-06-21 |
| Substrate Processing Apparatus App 20150322571 - YAMASAKI; Hideaki ; et al. | 2015-11-12 |
| Surface Treatment Method, Shower Head, Processing Container, And Processing Apparatus Using Them App 20120115400 - KAKEGAWA; Takashi ; et al. | 2012-05-10 |
| Film forming apparatus and method, gas supply device and storage medium Grant 8,133,323 - Kakegawa March 13, 2 | 2012-03-13 |
| Film-forming apparatus Grant 8,128,751 - Kasai , et al. March 6, 2 | 2012-03-06 |
| Surface Treatment Method, Shower Head, Processing Container, And Processing Apparatus Using Them App 20110061432 - KAKEGAWA; Takashi ; et al. | 2011-03-17 |
| Film Forming Apparatus App 20100107977 - KASAI; Shigeru ; et al. | 2010-05-06 |
| Film forming device Grant 7,661,386 - Kasai , et al. February 16, 2 | 2010-02-16 |
| Film-forming Apparatus App 20090178614 - KASAI; Shigeru ; et al. | 2009-07-16 |
| Film Forming Apparatus And Method, Gas Supply Device And Storage Medium App 20090104351 - KAKEGAWA; Takashi | 2009-04-23 |
| Film-forming apparatus App 20070175396 - Kasai; Shigeru ; et al. | 2007-08-02 |
| Gas Supplying unit and substrate processing apparatus App 20070131168 - Gomi; Hisashi ; et al. | 2007-06-14 |
| Film forming device App 20050000423 - Kasai, Shigeru ; et al. | 2005-01-06 |
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