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Method of fabricating rare-earth doped piezoelectric material with various amounts of dopants and a selected C-axis orientation Grant 9,679,765 - Larson, III , et al. June 13, 2 | 2017-06-13 |
Surface Acoustic Wave (saw) Resonator Structure With Dielectric Material Below Electrode Fingers App 20170155373 - Ruby; Richard C. ;   et al. | 2017-06-01 |
Bulk acoustic wave resonator comprising bridge formed within piezoelectric layer Grant 9,048,812 - Burak , et al. June 2, 2 | 2015-06-02 |
Method of fabricating piezoelectric materials with opposite C-axis orientations Grant 8,673,121 - Larson, III , et al. March 18, 2 | 2014-03-18 |
Bulk Acoustic Resonator Comprising Non-piezoelectric Layer App 20120319530 - BURAK; Dariusz ;   et al. | 2012-12-20 |
Bulk acoustic resonator comprising non-piezoelectric layer Grant 8,330,325 - Burak , et al. December 11, 2 | 2012-12-11 |
Bulk Acoustic Wave Resonator Comprising Bridge Formed Within Piezoelectric Layer App 20120218060 - Burak; Dariusz ;   et al. | 2012-08-30 |
Method Of Fabricating Piezoelectric Materials With Opposite C-axis Orientations App 20120177816 - LARSON, III; John D. ;   et al. | 2012-07-12 |
Bulk acoustic wave device Grant 8,018,303 - Handtmann , et al. September 13, 2 | 2011-09-13 |
Bulk acoustic wave device with a semiconductor layer Grant 7,977,850 - Allah , et al. July 12, 2 | 2011-07-12 |
Integrated coupled resonator filter and bulk acoustic wave devices Grant 7,825,749 - Thalhammer , et al. November 2, 2 | 2010-11-02 |
Thin-film BAW filter, and a method for production of a thin-film BAW filter Grant 7,825,747 - Fattinger , et al. November 2, 2 | 2010-11-02 |
Bulk acoustic wave device with coupled resonators Grant 7,786,825 - Handtmann , et al. August 31, 2 | 2010-08-31 |
Apparatus with acoustically coupled BAW resonators and a method for matching impedances Grant 7,786,826 - Thalhammer , et al. August 31, 2 | 2010-08-31 |
Bulk Acoustic Wave Device with a Semiconductor Layer App 20090218912 - Abd Allah; Mohamed ;   et al. | 2009-09-03 |
Bulk acoustic wave device App 20090096550 - Handtmann; Martin ;   et al. | 2009-04-16 |
Apparatus with acoustically coupled BAW resonators and a method for matching impedances App 20090096549 - Thalhammer; Robert ;   et al. | 2009-04-16 |
Acoustic resonator Grant 7,515,018 - Handtmann , et al. April 7, 2 | 2009-04-07 |
Integrated Coupled Resonator Filter and Bulk Acoustic Wave Devices App 20080297280 - Thalhammer; Robert ;   et al. | 2008-12-04 |
Bulk Acoustic Wave Device with Coupled Resonators App 20080297278 - Handtmann; Martin ;   et al. | 2008-12-04 |
Acoustic Resonator App 20080055020 - Handtmann; Martin ;   et al. | 2008-03-06 |
Thin-film BAW filter, and a method for production of a thin-film BAW filter App 20060119453 - Fattinger; Gernot ;   et al. | 2006-06-08 |
Acoustic reflector for a BAW resonator providing specified reflection of both shear waves and longitudinal waves Grant 6,933,807 - Marksteiner , et al. August 23, 2 | 2005-08-23 |
Resonator structure and a filter comprising such a resonator structure Grant 6,812,619 - Kaitila , et al. November 2, 2 | 2004-11-02 |
Acoustic reflector for a BAW resonator App 20040140869 - Marksteiner, Stephan ;   et al. | 2004-07-22 |
Method of producing thin-film bulk acoustic wave devices Grant 6,548,943 - Kaitila , et al. April 15, 2 | 2003-04-15 |
Bulk acoustic wave resonator with a conductive mirror Grant 6,509,813 - Ella , et al. January 21, 2 | 2003-01-21 |
Solidly mounted multi-resonator bulk acoustic wave filter with a patterned acoustic mirror Grant 6,496,085 - Ella , et al. December 17, 2 | 2002-12-17 |
Method And System For Wafer-level Tuning Of Bulk Acoustic Wave Resonators And Filters App 20020158702 - Tikka, Pasi ;   et al. | 2002-10-31 |
Method And System For Wafer-level Tuning Of Bulk Acoustic Wave Resonators And Filters By Reducing Thickness Non-uniformity App 20020158714 - Kaitila, Jyrki ;   et al. | 2002-10-31 |
Method of producting thin-film acoustic wave devices App 20020149300 - Kaitila, Jyrki ;   et al. | 2002-10-17 |
Method and system for wafer-level tuning of bulk acoustic wave resonators and filters Grant 6,462,460 - Tikka , et al. October 8, 2 | 2002-10-08 |
Method and system for wafer-level tuning of bulk acoustic wave resonators and filters Grant 6,441,702 - August 27, 2 | 2002-08-27 |
Method And System For Wafer-level Tuning Of Bulk Acoustic Wave Resonators And Filters App 20020109565 - Ella, Juha ;   et al. | 2002-08-15 |
Bulk acoustic wave resonator with a conductive mirror App 20020093398 - Ella, Juha ;   et al. | 2002-07-18 |
Monolithic Fbar Duplexer And Method Of Making The Same App 20020089393 - Tikka, Pasi ;   et al. | 2002-07-11 |
Solidly Mounted Multi-resonator Bulk Acoustic Wave Filter With A Patterned Acoustic Mirror App 20020084873 - Ella, Juha ;   et al. | 2002-07-04 |
Monolithic FBAR duplexer and method of making the same Grant 6,407,649 - Tikka , et al. June 18, 2 | 2002-06-18 |