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Patent applications and USPTO patent grants for KAGAYA; Munehito.The latest application filed is for "plasma processing device, and plasma processing method".
Patent | Date |
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Plasma Processing Device, And Plasma Processing Method App 20220165544 - KAGAYA; Munehito ;   et al. | 2022-05-26 |
Substrate Processing Method And Substrate Processing System App 20220157616 - KUMAGAI; Kae ;   et al. | 2022-05-19 |
Film Forming Method And Film Forming Apparatus App 20210398863 - OTSUKI; Yuji ;   et al. | 2021-12-23 |
Film Forming Apparatus And Film Forming Method App 20210375589 - KAGAYA; Munehito ;   et al. | 2021-12-02 |
Film Forming Apparatus And Film Forming Method App 20210301402 - SUZUKI; Yusuke ;   et al. | 2021-09-30 |
Method Or Apparatus For Forming Thin Film On Substrate Employing Atomic Layer Epitaxy Method App 20210217609 - KAGAYA; Munehito | 2021-07-15 |
Film forming apparatus and film forming method Grant 10,643,839 - Suzuki , et al. | 2020-05-05 |
Process for producing carbon nanotubes and method for forming wiring Grant 10,378,104 - Nishide , et al. A | 2019-08-13 |
Substrate processing apparatus Grant 10,121,680 - Kagaya , et al. November 6, 2 | 2018-11-06 |
Substrate Processing Apparatus App 20180166298 - KAGAYA; Munehito ;   et al. | 2018-06-14 |
Gas Supply And Exhaust Structure App 20180155830 - SUZUKI; Ayuta ;   et al. | 2018-06-07 |
Film Forming Apparatus And Film Forming Method App 20180158671 - SUZUKI; Ayuta ;   et al. | 2018-06-07 |
Method for producing graphene Grant 9,822,009 - Kagaya , et al. November 21, 2 | 2017-11-21 |
Method For Forming Base Film Of Graphene, Graphene Forming Method, And Apparatus For Forming Base Film Of Graphene App 20170268103 - NISHIDE; Daisuke ;   et al. | 2017-09-21 |
Graphene forming method Grant 9,702,039 - Nishide , et al. July 11, 2 | 2017-07-11 |
Process For Producing Carbon Nanotubes And Method For Forming Wiring App 20160251757 - NISHIDE; Daisuke ;   et al. | 2016-09-01 |
Organic Semiconductor Film, Method for Manufacturing Same, and Transistor Structure App 20160118589 - KAGAYA; Munehito ;   et al. | 2016-04-28 |
Method For Producing Graphene App 20160075560 - KAGAYA; Munehito ;   et al. | 2016-03-17 |
Method For Forming Base Film Of Graphene, Graphene Forming Method, And Apparatus For Forming Base Film Of Graphene App 20160042958 - NISHIDE; Daisuke ;   et al. | 2016-02-11 |
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