Kagan; Pavel
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kagan; Pavel.The latest application filed is for "vibration isolator, lithographic apparatus and device manufacturing method".
- Kagan; Pavel - Eindhoven NL
| Patent | Date |
|---|---|
| Vibration isolator, lithographic apparatus and device manufacturing method Grant 10,816,910 - Butler , et al. October 27, 2 | 2020-10-27 |
| Lithographic apparatus and device manufacturing method Grant 10,503,086 - Butler , et al. Dec | 2019-12-10 |
| Vibration Isolator, Lithographic Apparatus And Device Manufacturing Method App 20190049852 - Butler; Hans ; et al. | 2019-02-14 |
| Lithographic Apparatus And Device Manufacturing Method App 20190011838 - BUTLER; Hans ; et al. | 2019-01-10 |
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