loadpatents
Patent applications and USPTO patent grants for Kagami; Kenichi.The latest application filed is for "semiconductor manufacturing apparatus and method for curing materials with uv light".
Patent | Date |
---|---|
Method of cleaning UV irradiation chamber Grant 7,789,965 - Matsushita , et al. September 7, 2 | 2010-09-07 |
UV light irradiating apparatus with liquid filter Grant 7,763,869 - Matsushita , et al. July 27, 2 | 2010-07-27 |
Method for forming insulation film Grant 7,582,575 - Fukazawa , et al. September 1, 2 | 2009-09-01 |
Semiconductor Manufacturing Apparatus And Method For Curing Materials With Uv Light App 20090093134 - Matsushita; Kiyohiro ;   et al. | 2009-04-09 |
Semiconductor Manufacturing Apparatus And Method For Curing Material With Uv Light App 20090093135 - Matsushita; Kiyohiro ;   et al. | 2009-04-09 |
Method for managing UV irradiation for curing semiconductor substrate Grant 7,501,292 - Matsushita , et al. March 10, 2 | 2009-03-10 |
Method For Managing Uv Irradiation For Curing Semiconductor Substrate App 20090023229 - MATSUSHITA; Kiyohiro ;   et al. | 2009-01-22 |
Uv Light Irradiating Apparatus With Liquid Filter App 20080230721 - MATSUSHITA; Kiyohiro ;   et al. | 2008-09-25 |
Method Of Cleaning Uv Irradiation Chamber App 20080066778 - Matsushita; Kiyohiro ;   et al. | 2008-03-20 |
Portable electronic apparatus Grant 7,274,354 - Yamamoto , et al. September 25, 2 | 2007-09-25 |
Method of forming a thin film by plasma CVD of a silicon-containing source gas Grant 7,229,935 - Fukazawa , et al. June 12, 2 | 2007-06-12 |
Method for forming insulation film App 20060110931 - Fukazawa; Atsuki ;   et al. | 2006-05-25 |
System and method of CVD chamber cleaning App 20050178333 - Loke, Chou San Nelson ;   et al. | 2005-08-18 |
Method of forming thin film App 20050048797 - Fukazawa, Atsuki ;   et al. | 2005-03-03 |
Method of cleaning a CVD reaction chamber using an active oxygen species Grant 6,767,836 - San , et al. July 27, 2 | 2004-07-27 |
Portable electronic apparatus App 20040051695 - Yamamoto, Tamotsu ;   et al. | 2004-03-18 |
Method of forming a film on a semiconductor substrate App 20040043626 - Chou San, Nelson Loke ;   et al. | 2004-03-04 |
Mobile terminal device App 20030124991 - Kiuchi, Shinya ;   et al. | 2003-07-03 |
Adjustable Rear View Mirror Grant 3,586,422 - Kagami , et al. June 22, 1 | 1971-06-22 |
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