KAGA; Yukinao

Patent Applications and Registrations

Patent applications and USPTO patent grants for KAGA; Yukinao.The latest application filed is for "method of manufacturing semiconductor device, non-transitory computer-readable recording medium, substrate processing apparatus and substrate processing method".

Company Profile

11.26.34

KAGA; Yukinao - Toyama JP
KAGA; Yukinao - Toyama-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method of Manufacturing Semiconductor Device, Non-transitory Computer-readable Recording Medium, Substrate Processing Apparatus and Substrate Processing Method App 20210395891 - JODA; Takuya ; et al.	2021-12-23
Substrate processing apparatus, substrate holder and mounting tool Grant 11,031,270 - Hirano , et al. June 8, 2	2021-06-08
Method for manufacturing semiconductor device, non-transitory computer-readable recording medium, and substrate processing apparatus Grant 11,004,676 - Ogawa , et al. May 11, 2	2021-05-11
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium App 20200411330 - YOSHIDA; Ryosuke ; et al.	2020-12-31
Substrate Processing Apparatus And Recording Medium App 20200219745 - OKAZAKI; Tadashi ; et al.	2020-07-09
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, Method of Loading Substrate and Non-Transitory Com App 20200144082 - KAGA; Yukinao ; et al.	2020-05-07
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium Grant 10,640,869 - Okuda , et al.	2020-05-05
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Non-Transitory Computer-readable Recording Med App 20200135506 - KAGA; Yukinao ; et al.	2020-04-30
Method of manufacturing semiconductor device Grant 10,622,213 - Kaga	2020-04-14
Method of manufacturing semiconductor device, method of loading substrate and non-transitory computer-readable recording medium Grant 10,559,485 - Kaga , et al. Feb	2020-02-11
Method of manufacturing semiconductor device and substrate processing apparatus Grant 10,388,530 - Ogawa , et al. A	2019-08-20
Method of manufacturing semiconductor device, substrate processing device, and recording medium Grant 10,366,894 - Kaga , et al. July 30, 2	2019-07-30
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus App 20190157089 - OGAWA; Arito ; et al.	2019-05-23
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium App 20190093222 - OKUDA; Kazuyuki ; et al.	2019-03-28
Method For Manufacturing Semiconductor Device, Non-transitory Computer-readable Recording Medium, And Substrate Processing Apparatus App 20190096663 - OGAWA; Arito ; et al.	2019-03-28
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus And Non-transitory Computer-readable Recording Medium App 20190093224 - YOSHIDA; Ryosuke ; et al.	2019-03-28
Substrate Processing Apparatus, Substrate Holder And Mounting Tool App 20180374734 - HIRANO; Atsushi ; et al.	2018-12-27
Method of Manufacturing Semiconductor Device, Method of Loading Substrate and Non-Transitory Computer-readable Recording Medium App 20180350638 - KAGA; Yukinao ; et al.	2018-12-06
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus App 20180247819 - OGAWA; Arito ; et al.	2018-08-30
Method of manufacturing semiconductor device Grant 9,972,500 - Kaga , et al. May 15, 2	2018-05-15
Method Of Manufacturing Semiconductor Device App 20170287716 - KAGA; Yukinao	2017-10-05
Method of forming metal-containing film Grant 9,650,715 - Kaga , et al. May 16, 2	2017-05-16
Method of Manufacturing Semiconductor Device App 20170047227 - KAGA; Yukinao ; et al.	2017-02-16
Method of manufacturing semiconductor device Grant 9,508,555 - Kaga , et al. November 29, 2	2016-11-29
Method of manufacturing semiconductor device and substrate processing apparatus Grant 9,472,398 - Saito , et al. October 18, 2	2016-10-18
Method of manufacturing semiconductor device, substrate processing apparatus, and semiconductor device Grant 9,466,477 - Saito , et al. October 11, 2	2016-10-11
Semiconductor device manufacturing method and substrate processing apparatus Grant 9,416,446 - Saito , et al. August 16, 2	2016-08-16
Method Of Manufacturing Semiconductor Device, Substrate Processing Device, And Recording Medium App 20160196978 - KAGA; Yukinao ; et al.	2016-07-07
Semiconductor device manufacturing method and substrate processing apparatus Grant 9,340,873 - Saito , et al. May 17, 2	2016-05-17
Reaction tube, substrate processing apparatus and method of manufacturing semiconductor device Grant 9,263,269 - Okada , et al. February 16, 2	2016-02-16
Semiconductor Device Manufacturing Method And Substrate Processing Apparatus App 20160024649 - SAITO; Tatsuyuki ; et al.	2016-01-28
Method of manufacturing semiconductor device, cleaning method, and substrate processing apparatus Grant 9,238,257 - Sakai , et al. January 19, 2	2016-01-19
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus App 20150325447 - OGAWA; Arito ; et al.	2015-11-12
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus App 20150262816 - SAITO; Tatsuyuki ; et al.	2015-09-17
Method Of Forming Metal-containing Film App 20150225852 - KAGA; Yukinao ; et al.	2015-08-13
Semiconductor Device Manufacturing Method and Substrate Processing Apparatus App 20150214045 - Saito; Tatsuyuki ; et al.	2015-07-30
Method of forming metal-containing film Grant 9,045,825 - Kaga , et al. June 2, 2	2015-06-02
Method of Manufacturing Semiconductor Device App 20140295667 - Kaga; Yukinao ; et al.	2014-10-02
Substrate processing apparatus and method of manufacturing semiconductor device Grant 8,808,455 - Saito , et al. August 19, 2	2014-08-19
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus App 20140162454 - KAGA; Yukinao ; et al.	2014-06-12
Method of manufacturing semiconductor device and substrate processing apparatus Grant 8,691,708 - Kaga , et al. April 8, 2	2014-04-08
Mehod Of Manufacturing A Semiconductor Device And Substrate Processing Apparatus App 20140080317 - KAGA; Yukinao ; et al.	2014-03-20
Reaction Tube, Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device App 20140073146 - OKADA; Satoshi ; et al.	2014-03-13
Semiconductor Device Manufacturing Method And Substrate Processing Apparatus App 20130095668 - SAITO; Tatsuyuki ; et al.	2013-04-18
Method of manufacturing semiconductor device, method of processing substrate, and substrate processing apparatus Grant 8,410,001 - Takasawa , et al. April 2, 2	2013-04-02
Semiconductor Device Manufacturing Method And Substrate Processing Apparatus App 20120214300 - Kaga; Yukinao ; et al.	2012-08-23
Substrate Processing Apparatus And Semiconductor Device Manufacturing Method App 20120108077 - KAGA; Yukinao ; et al.	2012-05-03
Method Of Manufacturing Semiconductor Device, Cleaning Method, And Substrate Processing Apparatus App 20110290182 - SAKAI; Masanori ; et al.	2011-12-01
Method Of Manufacturing Semiconductor Device, Method Of Processing Substrate, And Substrate Processing Apparatus App 20110230057 - TAKASAWA; Yushin ; et al.	2011-09-22
Substrate Processing Apparatus And Method Of Manufacturing Semiconductor Device App 20110186984 - SAITO; Tatsuyuki ; et al.	2011-08-04
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus App 20110183519 - KAGA; Yukinao ; et al.	2011-07-28
Method Of Manufacturing Semiconductor Device, Cleaning Method, And Substrate Processing Apparatus App 20110059600 - SAKAI; Masanori ; et al.	2011-03-10
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Semiconductor Device App 20110031593 - SAITO; Tatsuyuki ; et al.	2011-02-10
Method of manufacturing a semiconductor device and substrate processing apparatus App 20100297846 - Kaga; Yukinao ; et al.	2010-11-25

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