Kaga; Yasuhiro
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kaga; Yasuhiro.The latest application filed is for "defect inspecting apparatus, defect inspecting method, semiconductor device manufacturing system, and semiconductor device manufacturing method".
- Kaga; Yasuhiro - Yokohama JP
- Kaga; Yasuhiro - Yokohama-Shi JP
| Patent | Date |
|---|---|
| Defect inspecting apparatus for semiconductor wafer Grant 7,512,501 - Morinaga , et al. March 31, 2 | 2009-03-31 |
| Defect inspecting apparatus, defect inspecting method, semiconductor device manufacturing system, and semiconductor device manufacturing method App 20080052021 - Morinaga; Hiroyuki ; et al. | 2008-02-28 |
| Substrate cross-section observing apparatus Grant 5,576,542 - Kaga November 19, 1 | 1996-11-19 |
| Automatic focusing method for scanning electron microscopy Grant 5,302,829 - Komatsu , et al. April 12, 1 | 1994-04-12 |
| Method of and apparatus for measuring pattern profile Grant 5,161,201 - Kaga , et al. November 3, 1 | 1992-11-03 |
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