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Patent applications and USPTO patent grants for Kachi; Yoshifumi.The latest application filed is for "ceramic susceptor for semiconductor manufacturing equipment".
Patent | Date |
---|---|
Ceramic susceptor for semiconductor manufacturing equipment Grant 7,491,432 - Kachi , et al. February 17, 2 | 2009-02-17 |
Ceramic Susceptor For Semiconductor Manufacturing Equipment App 20060177697 - Kachi; Yoshifumi ;   et al. | 2006-08-10 |
Ceramics heater for semiconductor production system App 20050241584 - Kachi, Yoshifumi ;   et al. | 2005-11-03 |
Ceramics heater for semiconductor production system App 20050184054 - Kachi, Yoshifumi ;   et al. | 2005-08-25 |
Ceramics heater for semiconductor production system App 20050167422 - Kachi, Yoshifumi ;   et al. | 2005-08-04 |
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