Patent | Date |
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Thin film transistor, integrated circuit, liquid crystal display, method of producing thin film transistor, and method of exposure using attenuated type mask Grant 7,843,523 - Yamaguchi , et al. November 30, 2 | 2010-11-30 |
Apparatus for producing a hologram mask Grant 7,675,663 - Taniguchi March 9, 2 | 2010-03-09 |
Thin film transistor, circuit apparatus and liquid crystal display Grant 7,608,891 - Hiramatsu , et al. October 27, 2 | 2009-10-27 |
Thin film transistor, integrated circuit, liquid crystal display, method of producing thin film transistor, and method of exposure using attenuated type mask Grant 7,456,038 - Yamaguchi , et al. November 25, 2 | 2008-11-25 |
Apparatus for forming a semiconductor thin film Grant 7,335,261 - Matsumura , et al. February 26, 2 | 2008-02-26 |
Plasma processing apparatus Grant 7,311,796 - Goto , et al. December 25, 2 | 2007-12-25 |
Processing method for annealing and doping a semiconductor Grant 7,241,702 - Jyumonji July 10, 2 | 2007-07-10 |
Method of forming metallic wiring layer, method of selective metallization, apparatus for selective metallization and substrate apparatus Grant 7,169,703 - Aomori January 30, 2 | 2007-01-30 |
Protection circuit for input and output of liquid crystal display Grant 7,138,987 - Nakazaki November 21, 2 | 2006-11-21 |
Thin film transistor, circuit device and liquid crystal display Grant 7,118,946 - Hiramatsu , et al. October 10, 2 | 2006-10-10 |
Method of in-situ monitoring of crystallization state Grant 7,102,750 - Takami September 5, 2 | 2006-09-05 |
Apparatus for producing a hologram mask App 20060040186 - Taniguchi; Yukio | 2006-02-23 |
Exposure method for producing a hologram mask Grant 6,994,938 - Taniguchi February 7, 2 | 2006-02-07 |
Apparatus for forming a semiconductor thin film App 20050272274 - Matsumura, Masakiyo ;   et al. | 2005-12-08 |
Methods for forming a semiconductor thin film Grant 6,946,367 - Matsumura , et al. September 20, 2 | 2005-09-20 |
Processing method and apparatus for annealing and doping semiconductor Grant 6,911,717 - Jyumonji June 28, 2 | 2005-06-28 |
Optical recorder and method thereof Grant 6,900,827 - Taniguchi May 31, 2 | 2005-05-31 |
Exposure method and apparatus Grant 6,819,401 - Tsujikawa , et al. November 16, 2 | 2004-11-16 |
Thin film transistor Grant 6,753,549 - Korenari June 22, 2 | 2004-06-22 |
Exposure method and apparatus for producing a hologram mask and recording method using the hologram mask App 20030124437 - Taniguchi, Yukio | 2003-07-03 |