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Acoustic wave device with anti-reflection layer
Grant 11,394,364 - Matsuda , et al. July 19, 2 | 2022-07-19 |
Methods Of Manufacturing Acoustic Wave Device With Anti-reflection Layer
App 20220224308 - Matsuda; Satoru ; et al. | 2022-07-14 |
Spinning forming method
Grant 10,882,094 - Kabe , et al. January 5, 2 | 2021-01-05 |
Acoustic Wave Device With Anti-reflection Layer
App 20200266796 - Matsuda; Satoru ; et al. | 2020-08-20 |
Method of manufacturing preliminary formed body and axisymmetrical component
Grant 10,632,522 - Imamura , et al. | 2020-04-28 |
Methods of manufacturing axisymmetric body and axisymmetric product
Grant 10,413,999 - Tsuji , et al. Sept | 2019-09-17 |
Spinning forming device
Grant 10,259,030 - Mikami , et al. | 2019-04-16 |
Spinning forming device
Grant 10,259,029 - Sakane , et al. | 2019-04-16 |
Acoustic Wave Device Including Interdigital Electrodes Covered By Silicon Oxynitride Film
App 20180269848 - Matsuda; Satoru ; et al. | 2018-09-20 |
Surface Acoustic Wave Elements With Protective Films
App 20180041186 - Yamaji; Toru ; et al. | 2018-02-08 |
Spinning Forming Method
App 20170304885 - MIKAMI; Kohei ; et al. | 2017-10-26 |
Spinning Forming Device
App 20170144208 - MIKAMI; Kohei ; et al. | 2017-05-25 |
Methods Of Manufacturing Axisymmetric Body And Axisymmetric Product
App 20170120385 - TSUJI; Toshiro ; et al. | 2017-05-04 |
Method Of Manufacturing Preliminary Formed Body And Axisymmetrical Component
App 20170043389 - IMAMURA; Yoshihide ; et al. | 2017-02-16 |
Spinning Forming Device
App 20170036257 - SAKANE; Yuto ; et al. | 2017-02-09 |
Spinning Forming Method
App 20170021405 - KABE; Yoshiro ; et al. | 2017-01-26 |
Microwave Heating Apparatus And Processing Method
App 20150090708 - Tanaka; Sumi ; et al. | 2015-04-02 |
Microwave Heat Treatment Method
App 20140283734 - MONDEN; Taichi ; et al. | 2014-09-25 |
Microwave Processing Method And Microwave Processing Apparatus
App 20140042153 - Shimomura; Kouji ; et al. | 2014-02-13 |
Method For Cleaning Microwave Processing Apparatus
App 20140041682 - MONDEN; Taichi ; et al. | 2014-02-13 |
Method For Processing Object
App 20140038430 - Kabe; Yoshiro ; et al. | 2014-02-06 |
Method and apparatus for forming silicon oxide film
Grant 8,389,420 - Kabe , et al. March 5, 2 | 2013-03-05 |
Plasma oxidation processing method, plasma processing apparatus and storage medium
Grant 8,372,761 - Kabe , et al. February 12, 2 | 2013-02-12 |
Silicon Oxide Film Forming Method And Plasma Oxidation Apparatus
App 20130012033 - Kabe; Yoshiro ; et al. | 2013-01-10 |
Method and apparatus for forming silicon oxide film
Grant 8,318,267 - Kabe , et al. November 27, 2 | 2012-11-27 |
Plasma Processing Method
App 20120252226 - KABE; Yoshiro ; et al. | 2012-10-04 |
Method For Forming Germanium Oxide Film And Material For Electronic Device
App 20120248583 - KABE; Yoshiro ; et al. | 2012-10-04 |
Plasma Nitriding Method, Plasma Nitriding Apparatus And Method Of Manufacturing Semiconductor Device
App 20120252209 - Kabe; Yoshiro ; et al. | 2012-10-04 |
Method For Selective Oxidation, Device For Selective Oxidation, And Computer-readable Memory Medium
App 20120094505 - Nakamura; Hideo ; et al. | 2012-04-19 |
Pattern forming method and semiconductor device manufacturing method
Grant 8,119,530 - Hori , et al. February 21, 2 | 2012-02-21 |
Semiconductor device manufacturing method and plasma oxidation treatment method
Grant 8,105,958 - Kabe , et al. January 31, 2 | 2012-01-31 |
Plasma oxidizing method, storage medium, and plasma processing apparatus
Grant 8,043,979 - Kobayashi , et al. October 25, 2 | 2011-10-25 |
Method for insulating film formation, storage medium from which information is readable with computer, and processing system
Grant 8,034,179 - Kabe , et al. October 11, 2 | 2011-10-11 |
Method of forming silicon oxide film and method of production of semiconductor memory device using this method
Grant 8,026,187 - Kabe , et al. September 27, 2 | 2011-09-27 |
Method for forming silicon oxide film, plasma processing apparatus and storage medium
Grant 8,003,484 - Kabe , et al. August 23, 2 | 2011-08-23 |
Plasma oxidation processing method
Grant 7,989,364 - Hori , et al. August 2, 2 | 2011-08-02 |
Plasma Processing Apparatus, Plasma Processing Method And End Point Detection Method
App 20110174776 - Kabe; Yoshiro ; et al. | 2011-07-21 |
Method for manufacturing semiconductor device and plasma oxidation method
Grant 7,981,785 - Sasaki , et al. July 19, 2 | 2011-07-19 |
Method And Apparatus For Forming Silicon Oxide Film
App 20110171835 - KABE; Yoshiro ; et al. | 2011-07-14 |
Plasma oxidizing method, plasma processing apparatus, and storage medium
Grant 7,910,495 - Shiozawa , et al. March 22, 2 | 2011-03-22 |
Method For Insulating Film Formation, Storage Medium From Which Information Is Readable With Computer, And Treatment System
App 20110039418 - Kabe; Yoshiro ; et al. | 2011-02-17 |
Method for cleaning treatment chamber in substrate treating apparatus and method for detecting endpoint of cleaning
Grant 7,887,637 - Ozaki , et al. February 15, 2 | 2011-02-15 |
Plasma Processing Apparatus
App 20110024048 - Nakamura; Hideo ; et al. | 2011-02-03 |
Method for forming silicon oxide film, storage medium, and plasma processing apparatus
App 20110017586 - Nakamura; Hideo ; et al. | 2011-01-27 |
Plasma Processing Apparatus And Plasma Processing Method
App 20100291319 - Yamashita; Jun ; et al. | 2010-11-18 |
Method And Apparatus For Forming Silicon Oxide Film
App 20100247805 - Kabe; Yoshiro ; et al. | 2010-09-30 |
Method Of Forming Silicon Oxide Film And Method Of Production Of Semiconductor Memory Device Using This Method
App 20100184267 - Kabe; Yoshiro ; et al. | 2010-07-22 |
Plasma Oxidation Processing Method, Plasma Processing Apparatus And Storage Medium
App 20100136797 - Kabe; Yoshiro ; et al. | 2010-06-03 |
Plasma Oxidizing Method, Storage Medium, And Plasma Processing Apparatus
App 20100105216 - Kobayashi; Takashi ; et al. | 2010-04-29 |
Method For Forming Silicon Oxide Film, Plasma Processing Apparatus And Storage Medium
App 20100093185 - Kabe; Yoshiro ; et al. | 2010-04-15 |
Pattern Forming Method And Semiconductor Device Manufacturing Method
App 20100093179 - Hori; Masaru ; et al. | 2010-04-15 |
Plasma Oxidizing Method, Plasma Processing Apparatus, And Storage Medium
App 20100029093 - Shiozawa; Toshihiko ; et al. | 2010-02-04 |
Plasma Oxidizing Method, Plasma Processing Apparatus, And Storage Medium
App 20100015815 - Shiozawa; Toshihiko ; et al. | 2010-01-21 |
Plasma Oxidation Processing Method
App 20090263919 - Hori; Masaru ; et al. | 2009-10-22 |
Manufacturing method of semiconductor device, semiconductor manufacturing apparatus, plasma nitridation method, computer recording medium, and program
Grant 7,524,774 - Sasaki , et al. April 28, 2 | 2009-04-28 |
Semiconductor Device Manufacturing Method and Plasma Oxidation Treatment Method
App 20080032511 - Kabe; Yoshiro ; et al. | 2008-02-07 |
Method for Manufacturing Semiconductor Device and Plasma Oxidation Method
App 20070224836 - Sasaki; Masaru ; et al. | 2007-09-27 |
Method for cleaning treatment chamber iIn substrate treating apparatus and method for detecting endpoint of cleaning
App 20070163617 - Ozaki; Shigenori ; et al. | 2007-07-19 |
Manufacturing method of semiconductor device, semiconductor manufacturing apparatus, plasma nitridation method, computer recording medium, and program
App 20060166446 - Sasaki; Masaru ; et al. | 2006-07-27 |
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