Patent | Date |
---|
Substrate processing system Grant 10,518,382 - Kweon , et al. Dec | 2019-12-31 |
Polishing compositions and methods of manufacturing semiconductor devices using the same Grant 10,435,587 - Park , et al. O | 2019-10-08 |
Slurry composition for chemical mechanical polishing Grant 10,428,242 - Moon , et al. October 1, 2 | 2019-10-01 |
Chemical Mechanical Polishing Slurry Composition And Method Of Fabricating Semiconductor Device Using The Same App 20180362806 - PARK; Seung Ho ;   et al. | 2018-12-20 |
Abrasive particle-dispersion layer composite and polishing slurry composition including the same Grant 10,138,395 - Kwon , et al. Nov | 2018-11-27 |
Slurry Composition For Chemical Mechanical Polishing App 20180282581 - MOON; Doo-sik ;   et al. | 2018-10-04 |
Polishing slurry composition Grant 10,077,381 - Choi , et al. September 18, 2 | 2018-09-18 |
Substrate processing system and substrate processing method Grant 10,002,777 - Kweon , et al. June 19, 2 | 2018-06-19 |
Slurry composition for polishing tungsten Grant 9,994,735 - Hwang , et al. June 12, 2 | 2018-06-12 |
Method of fabricating integrated circuit device by using slurry composition Grant 9,991,127 - Park , et al. June 5, 2 | 2018-06-05 |
Substrate Processing System App 20170320188 - Kweon; Young Kyu ;   et al. | 2017-11-09 |
Substrate Processing System And Substrate Processing Method App 20170323807 - Kweon; Young Kyu ;   et al. | 2017-11-09 |
Substrate cleaning apparatus and method and brush assembly used therein Grant 9,704,729 - Cho , et al. July 11, 2 | 2017-07-11 |
Abrasive Particle-dispersion Layer Composite And Polishing Slurry Composition Including The Same App 20170183539 - KWON; Jang Kuk ;   et al. | 2017-06-29 |
Polishing Slurry Composition App 20170183537 - YOON; Joo Hyoung ;   et al. | 2017-06-29 |
Additive Composition And Positive Polishing Slurry Composition Including The Same App 20170183538 - KWON; Jang Kuk ;   et al. | 2017-06-29 |
Abrasive Particle-dispersion Layer Composite And Polishing Slurry Composition Including The Same App 20170166780 - KWON; Jang Kuk ;   et al. | 2017-06-15 |
Slot die coating apparatus and coating method using the same Grant 9,581,872 - Park , et al. February 28, 2 | 2017-02-28 |
Method For Preparing Slurry Composition And Slurry Composition Prepared Thereby App 20170051180 - KWON; Jang Kuk ;   et al. | 2017-02-23 |
Polishing Compositions And Methods Of Manufacturing Semiconductor Devices Using The Same App 20170029664 - PARK; Seung-Ho ;   et al. | 2017-02-02 |
Polishing Slurry Composition App 20170022391 - CHOI; Dong Kyu ;   et al. | 2017-01-26 |
Slurry Composition For Polishing Tungsten App 20170009353 - HWANG; Jin Sook ;   et al. | 2017-01-12 |
Thin Film Manufacturing Method And Atomic Layer Deposition Apparatus App 20160108518 - PARK; Sung Hyun ;   et al. | 2016-04-21 |
Slot Die Coating Apparatus And Coating Method Using The Same App 20160016185 - Park; Jae Cheol ;   et al. | 2016-01-21 |
Atomic layer deposition apparatus Grant 8,968,476 - Shin , et al. March 3, 2 | 2015-03-03 |
Membrane assembly and carrier head having the membrane assembly Grant 8,939,817 - Son January 27, 2 | 2015-01-27 |
Substrate Cleaning Apparatus And Method And Brush Assembly Used Therein App 20140366913 - CHO; Moon Gi ;   et al. | 2014-12-18 |
Chemical mechanical polishing system Grant 8,882,563 - Boo , et al. November 11, 2 | 2014-11-11 |
Conditioner of chemical mechanical polishing apparatus Grant 8,662,956 - Seo , et al. March 4, 2 | 2014-03-04 |
Abrasive particles, method of manufacturing the abrasive particles, and method of manufacturing chemical mechanical polishing slurry Grant 8,491,682 - Hong , et al. July 23, 2 | 2013-07-23 |
Polishing slurry, method of producing same, and method of polishing substrate Grant 8,361,177 - Kim , et al. January 29, 2 | 2013-01-29 |
Membrane Assembly And Carrier Head Having The Membrane Assembly App 20120309275 - Son; Jun Ho | 2012-12-06 |
CMP slurry, preparation method thereof and method of polishing substrate using the same Grant 8,062,547 - Paik , et al. November 22, 2 | 2011-11-22 |
Conditioner Of Chemical Mechanical Polishing Apparatus App 20110275289 - SEO; Keon Sik ;   et al. | 2011-11-10 |
Chemical Mechanical Polishing System App 20110269378 - Boo; Jae Phil ;   et al. | 2011-11-03 |
Loading device of chemical mechanical polishing equipment for semiconductor wafers Grant 7,892,069 - Na , et al. February 22, 2 | 2011-02-22 |
Atomic Layer Deposition Apparatus App 20100186669 - Shin; In Chul ;   et al. | 2010-07-29 |
Nozzle for spraying sublimable solid particles entrained in gas for cleaning surface Grant 7,762,869 - Yoon July 27, 2 | 2010-07-27 |
Cleaning device for chemical mechanical polishing equipment Grant 7,674,156 - Son , et al. March 9, 2 | 2010-03-09 |
Abrasive Particles, Method Of Manufacturing The Abrasive Particles, And Method Of Manufacturing Chemical Mechanical Polishing Slurry App 20090193721 - HONG; Suk Min ;   et al. | 2009-08-06 |
Polishing Slurry, Method Of Producing Same, And Method Of Polishing Substrate App 20090133336 - Kim; Dae Hyeong ;   et al. | 2009-05-28 |
Polishing Slurry, Method Of Producing Same, And Method Of Polishing Substrate App 20090100765 - Kim; Dae Hyeong ;   et al. | 2009-04-23 |
Nozzle For Spraying Sublimable Solid Particles Entrained In Gas For Cleaning Surface App 20090039178 - Yoon; Cheol-Nam | 2009-02-12 |
Polishing slurry, method of producing same, and method of polishing substrate Grant 7,470,295 - Kim , et al. December 30, 2 | 2008-12-30 |
Nozzle for spraying sublimable solid particles entrained in gas for cleaning surface Grant 7,442,112 - Yoon October 28, 2 | 2008-10-28 |
Slurry for CMP and method of polishing substrate using same Grant 7,364,600 - Kim , et al. April 29, 2 | 2008-04-29 |
Apparatus and method for measuring widthwise ejection uniformity of slit nozzle App 20070275157 - Cho; Kang II | 2007-11-29 |
Apparatus and method for measuring widthwise ejection uniformity of slit nozzle App 20070272146 - Cho; Kang Il | 2007-11-29 |
Apparatus for cleaning the edges of wafers Grant 7,270,136 - Ko , et al. September 18, 2 | 2007-09-18 |
Manufacturing Method Of Electrode For Atmospheric Pressure Plasma, Electrode Structure, And Atmospheric Pressure Plasma Apparatus Using The Same App 20070182327 - KIM; Tae Wook ;   et al. | 2007-08-09 |
Abrasive particles, polishing slurry, and producing method thereof App 20060156635 - Kim; Dae Hyeong ;   et al. | 2006-07-20 |
System for forming aerosols and cooling device incorporated therein Grant 7,013,660 - Kim March 21, 2 | 2006-03-21 |
Nozzle for injecting sublimable solid particles entrained in gas for cleaning a surface Grant 7,008,306 - Yoon , et al. March 7, 2 | 2006-03-07 |
Polishing slurry, method of producing same, and method of polishing substrate App 20060032149 - Kim; Dae Hyeong ;   et al. | 2006-02-16 |
System for forming aerosols and cooling device incorporated therein Grant 6,978,625 - Kim December 27, 2 | 2005-12-27 |
Nozzle for spraying sublimable solid particles entrained in gas for cleaning surface and method of cleaning surface using the same App 20050266777 - Yoon, Cheol-Nam | 2005-12-01 |
Slurry for CMP and method of polishing substrate using same App 20050252092 - Kim, Dae Hyeong ;   et al. | 2005-11-17 |
Polishing slurry, method of producing same, and method of polishing substrate App 20050198912 - Kim, Dae Hyung ;   et al. | 2005-09-15 |