Justesen; Perry J. I.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Justesen; Perry J. I..The latest application filed is for "heated electrostatic chuck including mechanical clamp capability at high temperature".
- Justesen; Perry J. I. - Beverly MA US
| Patent | Date |
|---|---|
| Heated electrostatic chuck including mechanical clamp capability at high temperature Grant 8,941,968 - Justesen , et al. January 27, 2 | 2015-01-27 |
| Heated annulus chuck Grant 8,797,706 - Lee , et al. August 5, 2 | 2014-08-05 |
| Heated Annulus Chuck App 20110299218 - Lee; William Davis ; et al. | 2011-12-08 |
| Heated Electrostatic Chuck Including Mechanical Clamp Capability At High Temperature App 20110299217 - Justesen; Perry J.I. ; et al. | 2011-12-08 |
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