Junghahnel; Michael

Patent Applications and Registrations

Patent applications and USPTO patent grants for Junghahnel; Michael.The latest application filed is for "apparatus for generating a hollow cathode arc discharge plasma".

Company Profile

0.6.3

Junghahnel; Michael - Dresden DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Apparatus for generating a hollow cathode arc discharge plasma Grant 9,443,703 - Morgner , et al. September 13, 2	2016-09-13
Apparatus For Generating A Hollow Cathode Arc Discharge Plasma App 20140354149 - Morgner; Henry ; et al.	2014-12-04
Method of producing a thin-film system Grant 6,605,312 - Winkler , et al. August 12, 2	2003-08-12
Process and switching arrangement for pulsing energy introduction into magnetron discharges Grant 6,522,076 - Goedicke , et al. February 18, 2	2003-02-18
Method of producing a thin-film system App 20020063053 - Winkler, Torsten ; et al.	2002-05-30
Process and switching arrangement for pulsing energy introduction into magnetron discharges App 20020047539 - Goedicke, Klaus ; et al.	2002-04-25
Process and system for operating magnetron discharges Grant 6,340,416 - Goedicke , et al. January 22, 2	2002-01-22
Magnetron sputtering method and apparatus utilizing a pulsed energy pattern Grant 6,063,245 - Frach , et al. May 16, 2	2000-05-16
Pulsed DC sputtering method of thin film magnetic disks Grant 6,019,876 - Goedicke , et al. February 1, 2	2000-02-01

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